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US4680971A Expired / Lapsed US ⏱️ 0.0 years remaining

Dual diaphragm differential pressure transducer

Assignee: Kavlico Corp
•
Filing: 1985-11-19
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Granted: 1987-07-21
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Expires: 2005-11-19
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Abstract

Abstract A corrosion proof differential pressure transducer includes a central disk and two thin ceramic diaphragms mounted close to but spaced from the disk on both sides thereof, with the diaphragms being intercoupled to move together. This may be accomplished, for example, by a rod passing through a hole in the center of the central disk which is secured to each of the diaphragms; or by a fluid such as silicone oil between the diaphragms and flowing through one or more holes through the central disk. The diaphragm, and disks and the rod are formed of alumina, quartz, or other inert, insulating material having substantially zero mechanical hysteresis. Conductive plates providing variable capacitance with changes in pressure are mounted on the inner surface one or both of the diaphragms and on the facing surface of the central disk. A housing and associated gaskets direct pressures from two different fluids to the two diaphragms, so that the differential pressure is measured.

Inventors

  • 👤 Fred Kavli
  • 👤 Kyong Park

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 22:42
CPC Classifications
G; G01; G01L; G01L9/00; G01L9/0041; G01L9/0051; G01L13/00; G01L13/02; G01L13/025; G01L9/0072; G01L9/0075

Claims Analysis

Total Claims: 30
Claim 1
Independent Claim 257 words
A corrosion proof pressure transducer assembly for measuring the pressure difference between two fluids, comprising: a central circular insulating base member having a central opening and two spaced flat sides; first and second thin circular, flat insulating diaphragms having substantially zero mechanical hysteresis, and each having a diameter substantially equal to that of said base member; means for mounting said diaphragms, one on each side of said base member and spaced apart from said base member by between 0.0005 and 0.010 inch; a coupling member having substantially the same coefficient of thermal expansion as said insulating base member, mechanically interconnecting the centers of said pair of diaphragms and extending through the central opening in said base member; facing conductive means in the form of conductive surfaces on the inner surface of one of at least one of said ceramic diaphragms and the adjacent surface of said base member, for forming a variable capacitor having a capacitance which varies as the diaphragms flex; housing means having first and second input ports for applying fluid pressures from two different sources directly to the outer surfaces of said first and second diaphragms, respectively; and resilient means mounted near the peripheries of said first and second diaphragms directing and limiting the fluid path from each of said input ports to the associated diaphragm; whereby the capacitance between said two conductive surfaces is a function of the difference in the fluid pressures applied to said two diaphragms, and said conductive surfaces are isolated from any possible corrosion from the fluids being measured.
Claim 2
Dependent Claim 257 words
A corrosion proof pressure transducer assembly for measuring the pressure difference between two fluids, comprising: a central circular insulating base member having a central opening and two spaced flat sides; first and second thin circular, flat insulating diaphragms having substantially zero mechanical hysteresis, and each having a diameter substantially equal to that of said base member; means for mounting said diaphragms, one on each side of said base member and spaced apart from said base member by between 0.0005 and 0.010 inch; a coupling member having substantially the same coefficient of thermal expansion as said insulating base member, mechanically interconnecting the centers of said pair of diaphragms and extending through the central opening in said base member; facing conductive means in the form of conductive surfaces on the inner surface of one of at least one of said ceramic diaphragms and the adjacent surface of said base member, for forming a variable capacitor having a capacitance which varies as the diaphragms flex; housing means having first and second input ports for applying fluid pressures from two different sources directly to the outer surfaces of said first and second diaphragms, respectively; and resilient means mounted near the peripheries of said first and second diaphragms directing and limiting the fluid path from each of said input ports to the associated diaphragm; whereby the capacitance between said two conductive surfaces is a function of the difference in the fluid pressures applied to said two diaphragms, and said conductive surfaces are isolated from any possible corrosion from the fluids being measured.
Claim 3
Dependent Claim 48 words
A differential pressure transducer assembly as defined in claim 1 wherein said housing means is a plastic housing having first and second input conduits; and resilient gasket means for directing fluid pressure from said first and second conduits to the surfaces of the respective first and second diaphragms.
Claim 4
Dependent Claim 29 words
A differential pressure transducer assembly as defined in claim 1 wherein said coupling member, said diaphragms and said base member are all formed of the same type of material.
Claim 5
Dependent Claim 24 words
A differential pressure transducer assembly as defined in claim 1 wherein each of said diaphragms is between 0.010 inch and 0.10 inch in thickness.
Claim 6
Dependent Claim 27 words
A differential pressure transducer assembly as defined in claim 1 when said two diaphragms and said base member are each between one and two inches in diameter.
Claim 7
Dependent Claim 21 words
A differential pressure transducer assembly as defined in claim 1 wherein said diaphragms and said base member are formed of alumina.
Claim 8
Dependent Claim 26 words
A differential pressure transducer assembly as defined in claim 1 wherein said diaphragms are spaced from and peripherally sealed to said base member by glass frit.
Claim 9
Dependent Claim 37 words
A differential pressure transducer assembly as defined in claim 1 including conductive surfaces on the inner surfaces of said first and second diaphragms and on the facing surfaces of said base member to form two variable capacitors.
Claim 10
Dependent Claim 205 words
A corrosion-proof pressure transducer assembly for measuring the pressure difference between two fluids, comprising: a central insulating base member having at least one opening and two spaced flat sides, said base member having flat sides extending all of the way across both sides thereof; first and second thin flat insulating diaphragms having substantially zero mechanical hysteresis; means for mounting said diaphragms, one on each side of said base member and spaced apart from said base member by between 0.0005 and 0.010 inch, and peripherally secured to said basemember; means for intercoupling said pair of diaphragms and extending through the opening in said base member; means responsive to the flexing of at least one of said diaphragms for producing an electrical output signal proportional to the differential pressure; housing means having first and second input ports for applying fluid pressures from two different sources directly to the outer surfaces of said first and second diaphragms, respectively; resilient peripheral sealing means for sealing against fluid pressure leakage between said housing and the outer edges of said diaphragms; and said assembly including conductive means for shielding said transducer; whereby the electrical output signal is a function of the difference in the fluid pressures applied to said two diaphragms.
Claim 11
Dependent Claim 205 words
A corrosion-proof pressure transducer assembly for measuring the pressure difference between two fluids, comprising: a central insulating base member having at least one opening and two spaced flat sides, said base member having flat sides extending all of the way across both sides thereof; first and second thin flat insulating diaphragms having substantially zero mechanical hysteresis; means for mounting said diaphragms, one on each side of said base member and spaced apart from said base member by between 0.0005 and 0.010 inch, and peripherally secured to said basemember; means for intercoupling said pair of diaphragms and extending through the opening in said base member; means responsive to the flexing of at least one of said diaphragms for producing an electrical output signal proportional to the differential pressure; housing means having first and second input ports for applying fluid pressures from two different sources directly to the outer surfaces of said first and second diaphragms, respectively; resilient peripheral sealing means for sealing against fluid pressure leakage between said housing and the outer edges of said diaphragms; and said assembly including conductive means for shielding said transducer; whereby the electrical output signal is a function of the difference in the fluid pressures applied to said two diaphragms.
Claim 12
Dependent Claim 245 words
A corrosion-proof pressure transducer assembly for measuring the pressure difference between two fluids, comprising: a central circular insulating base member having a central opening and two spaced flat sides; first and second thin circular, flat insulating diaphragms having substantially zero mechanical hysteresis, and each having a diameter substantially equal to that of said base member; means for mounting said diaphragms, one on each side of said base member and spaced apart from said base member by between 0.005 and 0.010 inch; a coupling member having substantially the same coefficient of thermal expansion as said insulating base member, mechanically interconnecting the centers of said pair of diaphragms and extending through the central opening in said base member; facing conductive means in the form of conductive surfaces on the inner surface of one of at least one of said diaphragms and the adjacent surface of said base member, for forming a variable capacitor having a capacitance which varies as the diaphragms flex; housing means having first and second input ports for applying fluid pressures from two different sources to the outer surfaces of said first and second diaphragms, respectively; said transducer assembly including an inner metal housing extending around at least the periphery of said diaphragms and base member; whereby the capacitance between said two conductive surfaces is a function of the difference in the fluid pressures applied to said two diaphragms, and said conductive surfaces are isolated from any possible corrosion by the fluids being measured.
Claim 13
Dependent Claim 245 words
A corrosion-proof pressure transducer assembly for measuring the pressure difference between two fluids, comprising: a central circular insulating base member having a central opening and two spaced flat sides; first and second thin circular, flat insulating diaphragms having substantially zero mechanical hysteresis, and each having a diameter substantially equal to that of said base member; means for mounting said diaphragms, one on each side of said base member and spaced apart from said base member by between 0.005 and 0.010 inch; a coupling member having substantially the same coefficient of thermal expansion as said insulating base member, mechanically interconnecting the centers of said pair of diaphragms and extending through the central opening in said base member; facing conductive means in the form of conductive surfaces on the inner surface of one of at least one of said diaphragms and the adjacent surface of said base member, for forming a variable capacitor having a capacitance which varies as the diaphragms flex; housing means having first and second input ports for applying fluid pressures from two different sources to the outer surfaces of said first and second diaphragms, respectively; said transducer assembly including an inner metal housing extending around at least the periphery of said diaphragms and base member; whereby the capacitance between said two conductive surfaces is a function of the difference in the fluid pressures applied to said two diaphragms, and said conductive surfaces are isolated from any possible corrosion by the fluids being measured.
Claim 14
Dependent Claim 224 words
A corrosion-proof pressure transducer assembly for measuring the pressure difference between two fluids, comprising: a central insulating base member having at least one opening and two spaced flat sides; first and second thin flat insulating diaphragms having substantially zero mechanical hysteresis; means for mounting said diaphragms, one on each side of said base member and spaced apart from said base member by between 0.0005 and 0.010 inch, and peripherally secured to said base member; means for intercoupling said pair of diaphragms and extending through the opening in said base member; facing conductive means in the form of conductive surfaces on the inner surface of one of at least one of said diaphrams and the adjacent surface of said base member, for forming a variable capacitor having a capacitance which varies as the diaphragms flex; enclosing means having first and second input ports for applying fluid pressures from two different sources to the outer surfaces of said first and second diaphragms, respectively; and resilient gasket means for directing fluid pressure from said first and second input ports to the surfaces of the respective first and second diaphragms; whereby the capacitance between said two conductive surfaces is a function of the difference in the fluid pressures applied to said two diaphragms, and said conductive surfaces are isolated from any possible corrosion by the fluids being measured.
Claim 15
Dependent Claim 224 words
A corrosion-proof pressure transducer assembly for measuring the pressure difference between two fluids, comprising: a central insulating base member having at least one opening and two spaced flat sides; first and second thin flat insulating diaphragms having substantially zero mechanical hysteresis; means for mounting said diaphragms, one on each side of said base member and spaced apart from said base member by between 0.0005 and 0.010 inch, and peripherally secured to said base member; means for intercoupling said pair of diaphragms and extending through the opening in said base member; facing conductive means in the form of conductive surfaces on the inner surface of one of at least one of said diaphrams and the adjacent surface of said base member, for forming a variable capacitor having a capacitance which varies as the diaphragms flex; enclosing means having first and second input ports for applying fluid pressures from two different sources to the outer surfaces of said first and second diaphragms, respectively; and resilient gasket means for directing fluid pressure from said first and second input ports to the surfaces of the respective first and second diaphragms; whereby the capacitance between said two conductive surfaces is a function of the difference in the fluid pressures applied to said two diaphragms, and said conductive surfaces are isolated from any possible corrosion by the fluids being measured.
Claim 16
Dependent Claim 43 words
A differential pressure transducer as defined in claim 11 including a plastic housing having first and second input conduits, and resilient gasket means for directing fluid pressure from said first and second conduits to the surfaces of the respective first and second diaphragms.
Claim 17
Dependent Claim 37 words
A differential pressure transducer assembly as defined in claim 12 wherein said assembly includes metal housing means extending around at least the periphery of said diaphragm and base member assembly for holding said gasket means in place.
Claim 18
Dependent Claim 29 words
A differential pressure transducer assembly as defined in claim 11 wherein said coupling member, said diaphragms and said base member are all formed of the same type of material.
Claim 19
Dependent Claim 26 words
A differential pressure transducer assembly as defined in claim 11 wherein at least one of said diaphragms is between 0.010 inch and 0.10 inch in thickness.
Claim 20
Dependent Claim 21 words
A differential pressure transducer assembly as defined in claim 11 wherein said diaphragms and said base member are formed of alumina.
Claim 21
Dependent Claim 26 words
A differential pressure transducer assembly as defined in claim 11 wherein said diaphragms are spaced from and peripherally sealed to said base member by glass frit.
Claim 22
Dependent Claim 48 words
A corrosion-proof pressure transducer system for measuring the pressure difference between two fluids, as defined in claim 11 further including electronic circuitry means mounted within said enclosing means and coupled to said variable capacitor means, for providing an output electrical signal which varies with changes in differential pressure.
Claim 23
Dependent Claim 30 words
A corrosion-proof pressure transducer system for measuring the pressure difference between two fluids, as defined in claim 11 further including means for shielding said variable capacitor from stray electrical signals.
Claim 24
Dependent Claim 32 words
A corrosion-proof pressure transducer system for measuring the pressure difference between two fluids, as defined in claim 19 wherein said shielding means includes apertured metal shields extending over each of said diaphragms.
Claim 25
Dependent Claim 32 words
A corrosion-proof pressure transducer system for measuring the pressure difference between two fluids, as defined in claim 19 wherein said shielding means includes conductive material extending generally co-extensively with said enclosing means.
Claim 26
Dependent Claim 32 words
A corrosion-proof pressure transducer system as defined in claim 11, wherein said intercoupling means is a fluid filling the space between said diaphragms and said base member and extending through said hole.
Claim 27
Dependent Claim 31 words
A corrosion-proof pressure transducer system as defined in claim 22 wherein said base member has a plurality of holes therethrough for intercoupling the spaces between said diaphragms and said base member.
Claim 28
Dependent Claim 256 words
A corrosion-proof pressure transducer assembly for measuring the pressure difference between two fluids, comprising: a central circular insulating base member having a central opening and two spaced flat sides; first and second thin circular, flat insulating diaphragms having substantially zero mechanical hysteresis, and each having a diameter substantially equal to that of said base member; means for mounting said diaphragms, one on each side of said base member and spaced apart from said base member by between 0.0005 and 0.010 inch; a coupling member having substantially the same coefficient of thermal expansion as said insulating base member, mechanically interconnecting the centers of said pair of diaphragms and extending through the central opening in said base member; facing conductive means in the form of conductive surfaces on the inner surface of one of at least one of said diaphragms and the adjacent surface of said base member, for forming a variable capacitor having a capacitance which varies as the diaphragms flex; housing means having first and second input ports for applying fluid pressures from two different sources to the outer surfaces of said first and second diaphragms, respectively; and first and second resilient rings mounted near the peripheries of said first and second diaphragms directing and limiting the fluid path from each said input ports to the associated diaphragm; whereby the capacitance between said two conductive surfaces is a function of the difference in the fluid pressures applied to said two diaphragms, and said conductive surfaces are isolated from any possible corrosion by the fluids being measured.
Claim 29
Dependent Claim 256 words
A corrosion-proof pressure transducer assembly for measuring the pressure difference between two fluids, comprising: a central circular insulating base member having a central opening and two spaced flat sides; first and second thin circular, flat insulating diaphragms having substantially zero mechanical hysteresis, and each having a diameter substantially equal to that of said base member; means for mounting said diaphragms, one on each side of said base member and spaced apart from said base member by between 0.0005 and 0.010 inch; a coupling member having substantially the same coefficient of thermal expansion as said insulating base member, mechanically interconnecting the centers of said pair of diaphragms and extending through the central opening in said base member; facing conductive means in the form of conductive surfaces on the inner surface of one of at least one of said diaphragms and the adjacent surface of said base member, for forming a variable capacitor having a capacitance which varies as the diaphragms flex; housing means having first and second input ports for applying fluid pressures from two different sources to the outer surfaces of said first and second diaphragms, respectively; and first and second resilient rings mounted near the peripheries of said first and second diaphragms directing and limiting the fluid path from each said input ports to the associated diaphragm; whereby the capacitance between said two conductive surfaces is a function of the difference in the fluid pressures applied to said two diaphragms, and said conductive surfaces are isolated from any possible corrosion by the fluids being measured.
Claim 30
Dependent Claim 41 words
A corrosion-proof pressure transducer assembly as defined in claim 24 wherein said central base member is entirely flat across its entire surface, and at least one of said diaphragms is spaced from and sealed to said base member by glass frit.

References Cited (Backward Citations)

US4301492A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1990-07-20 1991-01-19 1991-07-21 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1994-07-20 1995-01-19 1995-07-21 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1998-07-20 1999-01-19 1999-07-21 $7700.00 Window Closed / Lapsed

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