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US4678733A Expired / Lapsed US ⏱️ 0.0 years remaining

Member having light receiving layer of A-Si: Ge (C,N,O) A-Si/surface antireflection layer with non-parallel interfaces

Assignee: Canon Inc
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Filing: 1985-10-11
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Granted: 1987-07-07
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Expires: 2005-10-11
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Abstract

Abstract A light receiving member comprises a light receiving layer of a multi-layer structure having a first layer comprising an amorphous material containing silicon atoms and germanium atoms, a second layer comprising an amorphous material containing silicon atoms and exhibiting photoconductivity and a surface layer having reflection preventive function provided on a substrate successively from the substrate side, said light receiving layer containing at least one selected from oxygen atoms, carbon atoms and nitrogen atoms and having at least one pair of non-parallel interfaces within a short range and said non-parallel interfaces being arranged in a large number in at least one direction within the plane perpendicular to the layer thickness direction.

Inventors

  • 👤 Keishi Saitoh
  • 👤 Masahiro Kanai
  • 👤 Tetsuo Sueda
  • 👤 Teruo Misumi
  • 👤 Yoshio Tsuezuki
  • 👤 Kyosuke Ogawa

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 12:20
CPC Classifications
G; G03; G03G; G03G5/00; G03G5/02; G03G5/04; G03G5/08; G03G5/082; G03G5/08214; G03G5/08235; G03G5/08242; H; H10; H10F; H10F30/00; H10F30/10; H10F30/15; H10F77/00; H10F77/10; H10F77/16; H10F77/162; H10F77/166; H10F77/1662; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/548

Claims Analysis

Total Claims: 59
Claim 1
Independent Claim 108 words
A light-receiving member comprising a light-receiving layer of a multi-layer structure having a first layer comprising an amorphous material containing silicon atoms and germanium atoms, a second layer comprising an amorphous material containing silicon atoms and exhibiting photoconductivity and a surface layer having reflection preventive function provided on a substrate successively from the substrate side, said light-receiving layer containing at least one selected from oxgen atoms, carbon atoms and nitrogen atoms and having at least one pair of non-parallel interfaces within a short range and said non-parallel interfaces being arranged in a large number in at least one direction within the plane perpendicular to the layer thickness direction.
Claim 2
Dependent Claim 108 words
A light-receiving member comprising a light-receiving layer of a multi-layer structure having a first layer comprising an amorphous material containing silicon atoms and germanium atoms, a second layer comprising an amorphous material containing silicon atoms and exhibiting photoconductivity and a surface layer having reflection preventive function provided on a substrate successively from the substrate side, said light-receiving layer containing at least one selected from oxgen atoms, carbon atoms and nitrogen atoms and having at least one pair of non-parallel interfaces within a short range and said non-parallel interfaces being arranged in a large number in at least one direction within the plane perpendicular to the layer thickness direction.
Claim 3
Dependent Claim 112 words
An electrophotographic system comprising a light-receiving member comprising a light-receiving layer of a multi-layer structure having a first layer comprising an amorphous material containing silicon atoms and germanium atoms, a second layer comprising an amorphous material containing silicon atoms and exhibiting photoconductivity and a surface layer having reflection preventive function provided on a substrate successively from the substrate side, said light-receiving layer containing at least one selected from oxgen atoms, carbon atoms and nitrogen atoms and having at least one pair of non-parallel interfaces within a short range and said non-parallel interfaces being arranged in a large number in at least one direction within the plane perpendicular to the layer thickness direction.
Claim 4
Dependent Claim 112 words
An electrophotographic system comprising a light-receiving member comprising a light-receiving layer of a multi-layer structure having a first layer comprising an amorphous material containing silicon atoms and germanium atoms, a second layer comprising an amorphous material containing silicon atoms and exhibiting photoconductivity and a surface layer having reflection preventive function provided on a substrate successively from the substrate side, said light-receiving layer containing at least one selected from oxgen atoms, carbon atoms and nitrogen atoms and having at least one pair of non-parallel interfaces within a short range and said non-parallel interfaces being arranged in a large number in at least one direction within the plane perpendicular to the layer thickness direction.
Claim 5
Dependent Claim 15 words
The invention according to claim 1 or 2, wherein the non-parallel interfaces are arranged regularly.
Claim 6
Dependent Claim 16 words
The invention according to claim 1 or 2, wherein the non-parallel interfaces are arranged in cycles.
Claim 7
Dependent Claim 16 words
The invention according to claim 1 or 2, wherein the short range is 0.3μ to 500μ.
Claim 8
Dependent Claim 29 words
The invention according to claim 1 or 2, wherein the non-parallel interfaces are formed on the basis of the unevenness arranged regularly provided on the surface of said substrate.
Claim 9
Dependent Claim 16 words
The invention according to claim 6, wherein the said unevenness is formed by reverse-V-shaped linear projections.
Claim 10
Dependent Claim 20 words
The invention according to claim 7, wherein the longitudinal section of said reverse-V-Shaped linear projection is substantially an isosceles triangle.
Claim 11
Dependent Claim 20 words
The invention according to claim 7, wherein the longitudinal section of said reverse-V-shaped linear projection is substantially a right triangle.
Claim 12
Dependent Claim 20 words
The invention according to claim 7, wherein the longitudinal section of said reverse-V-shaped linear projection is substantially a scalene triangle.
Claim 13
Dependent Claim 13 words
The invention according to claim 1 or 2, wherein the substrate is cylindrical.
Claim 14
Dependent Claim 21 words
The invention according to claim 11, wherein the reverse-V-shaped linear projection has a spiral structure within the plane of said substrate.
Claim 15
Dependent Claim 15 words
The invention according to claim 12, wherein the spiral structure is a multiple spiral structure.
Claim 16
Dependent Claim 18 words
The invention according to claim 7, wherein the reverse-V-shaped linear projection is divided in its edge line direction.
Claim 17
Dependent Claim 25 words
The invention according to claim 11, wherein the edge line direction of the reverse-V-shaped linear projection is along the center axis of the cylindrical substrate.
Claim 18
Dependent Claim 12 words
The invention according to claim 7, wherein the unevenness has slanted planes.
Claim 19
Dependent Claim 13 words
The invention according to claim 16, wherein the slanted planes are mirror finished.
Claim 20
Dependent Claim 31 words
The invention according to claim 6,wherein on the free surface of the light-receiving layer is formed an unevenness arranged with the same pitch as the unevenness provided on the substrate surface.
Claim 21
Dependent Claim 26 words
The invention according to claim 1 or 2, wherein the distribution state of germanium atoms in the first layer is ununiform in the layer thickness direction.
Claim 22
Dependent Claim 20 words
The invention according to claim 19, the ununiform distribution state of germanium atoms is more enriched toward the substrate side.
Claim 23
Dependent Claim 20 words
The invention according to claim 1 or 2, wherein a substance for controlling conductivity is contained in the first layer.
Claim 24
Dependent Claim 28 words
The invention according to claim 21, wherein the substance for controlling conductivity is an atom belonging to the group III or the group V of the periodic table.
Claim 25
Dependent Claim 20 words
The invention according to claim 1 or 2, wherein a substance for controlling conductivity is contained in the second layer.
Claim 26
Dependent Claim 28 words
The invention according to claim 23, wherein the substance for controlling conductivity is an atom belonging to the group III or the group v of the periodic table.
Claim 27
Dependent Claim 23 words
The invention according to claim 1 or 2, wherein the light-receiving layer has a layer region (PN) containing a substance for controlling conductivity.
Claim 28
Dependent Claim 28 words
The invention according to claim 25, wherein the distribution state of the substance for controlling conductivity in the layer region (PN) is ununiform in the layer thickness direction.
Claim 29
Dependent Claim 28 words
The invention according to claim 25, wherein the distribution state of the substance for controlling conductivity in the layer region (PN) is uniform in the layer thickness direction.
Claim 30
Dependent Claim 28 words
The invention according to claim 25, wherein the substance for controlling conductivity is an atom belonging to the group III or the group V of the periodic table.
Claim 31
Dependent Claim 17 words
The invention according to claim 25, wherein the layer region (PN) is provided in the first layer.
Claim 32
Dependent Claim 17 words
The invention according to claim 25, wherein the layer region (PN) is provided in the second layer.
Claim 33
Dependent Claim 25 words
The invention according to claim 25, wherein the layer region (PN) is provided at the end portion on the substrate side of the light-receiving layer.
Claim 34
Dependent Claim 22 words
The invention according to claim 25, wherein the layer region (PN) is provided over both the first layer and the second layer.
Claim 35
Dependent Claim 19 words
The invention according to claim 25, wherein the layer region (PN) occupies a layer region in the light-receiving layer.
Claim 36
Dependent Claim 27 words
The invention according to claim 33, wherein the content of the substance for controlling conductivity in the layer region (PN) is 0.01 to 5×10 4 atomic ppm.
Claim 37
Dependent Claim 24 words
The invention according to claim 1 or 2, wherein at least one of hydrogen atoms and halogen atoms are contained in the first layer.
Claim 38
Dependent Claim 23 words
The invention according to claim 1 or 2, wherein 0.01 to 40 atomic % of hydrogen atoms are contained in the first layer.
Claim 39
Dependent Claim 23 words
The invention according to claim 1 or 2, wherein 0.01 to 40 atomic % of halogen atoms are contained in the first layer.
Claim 40
Dependent Claim 29 words
The invention according to claim 1 or 2, wherein 0.01 to 40 atomic % as a total of hydrogen atoms and halogen atoms are contained in the first layer.
Claim 41
Dependent Claim 23 words
The invention according to claim 1 or 2, wherein 1 to 40 atomic % of hydrogen atoms are contained in the second layer.
Claim 42
Dependent Claim 23 words
The invention according to claim 1 or 2, wherein 1 to 40 atomic % of halogen atoms are contained in the second layer.
Claim 43
Dependent Claim 29 words
The invention according to claim 1 or 2, wherein 1 to 40 atomic % as a total of hydrogen atoms and halogen atoms are contained in the second layer.
Claim 44
Dependent Claim 24 words
The invention according to claim 1 or 2, wherein at least one of hydrogen atoms and halogen atoms are contained in the second layer.
Claim 45
Dependent Claim 21 words
The invention according to claim 1 or 2, wherein the first layer has a layer thickness of 30 Å to 50μ.
Claim 46
Dependent Claim 20 words
The invention according to claim 1 or 2, wherein the second layer has a layer thickness of 0.5 to 90μ.
Claim 47
Dependent Claim 21 words
The invention according to claim 1 or 2, wherein the light receiving layer has a layer thickness of 1 to 100μ.
Claim 48
Dependent Claim 32 words
The invention according to claim 1 or 2, wherein the layer thickness T B of the first layer and the layer thickness T of the second layer satisfy the relationship of TB/T≦1.
Claim 49
Dependent Claim 37 words
The invention according to claim 1 or 2, wherein the light-receiving layer contains at least one kind of atoms selected from oxygen atoms, carbon atoms and nitrogen atoms in uniform distribution state in the layer thickness direction.
Claim 50
Dependent Claim 37 words
The invention according to claim 1 or 2, wherein the light-receiving layer contains at least one kind of atoms selected from oxygen atoms, carbon atoms and nitrogen atoms in nonuniform distribution state in the layer thickness direction.
Claim 51
Dependent Claim 33 words
The invention according to claim 1 or 2, wherein the light-receiving layer has a layer region (OCN) containing at least one kind of atoms selected from oxygen atoms, carbon atoms and nitrogen atoms.
Claim 52
Dependent Claim 25 words
The invention according to claim 49, wherein the layer region (OCN) is provided at the end portion on the substrate side of the light-receiving layer.
Claim 53
Dependent Claim 20 words
The invention according to claim 50, wherein the layer region (OCN) contains 0.001 to 50 atomic % of oxygen atoms.
Claim 54
Dependent Claim 20 words
The invention according to claim 50, wherein the layer region (OCN) contains 0.001 to 50 atomic % of nitrogen atoms.
Claim 55
Dependent Claim 25 words
The invention according to claim 50, wherein oxygen atoms are contained in the layer region (OCN) in nonuniform distribution state in the layer thickness direction.
Claim 56
Dependent Claim 25 words
The invention according to claim 50, wherein oxygen atoms are contained in the layer region (OCN) in uniform distribution state in the layer thickness direction.
Claim 57
Dependent Claim 25 words
The invention according to claim 50, wherein nitrogen atoms are contained in the layer region (OCN) in nonuniform distribution state in the layer thickness direction.
Claim 58
Dependent Claim 25 words
The invention according to claim 50, wherein nitrogen atoms are contained in the layer region (OCN) in uniform distribution state in the layer thickness direction.
Claim 59
Dependent Claim 46 words
An electrophotographic image forming process comprising: (a) applying a charging treatment to the light receiving member of claim 1 or 2; (b) irradiating the light receiving member with a laser beam carrying information to form an electrostatic latent image; and (c) developing said electrostatic latent image.

References Cited (Backward Citations)

DE2733187A1 Cited
JPS56150754A Cited
US4359514A Cited
US4514483A Cited
US4492745A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1990-07-06 1991-01-05 1991-07-07 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1994-07-06 1995-01-05 1995-07-07 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1998-07-06 1999-01-05 1999-07-07 $7700.00 Window Closed / Lapsed

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