Abstract A surface-coated article or part, for example, hard material-coated steels or cemented carbides for cutting tools, wear resisting tools, sliding parts or decoration articles, having good properties comparable to those obtained by the PVD method, can be produced by a plasma CVD method characterized by using jointly a high frequency source and a direct current source as a plasma exciting source, holding a substrate or base metal at a negative potential by the direct current source and adjusting a high frequency power density applied to a plasma-forming space to 0.01 to 1 W/cm3, an absolute value of a direct current voltage to at most 1500 V and a gaseous atmosphere pressure to 0.05 to 5 Torr.
A process for the production of a coated article by coating a substrate with a hard or chemically stable material using a plasma CVD method, which comprises using jointly a high frequency source and a direct current source as a plasma exciting source, holding the substrate at a negative potential by the direct current source and adjusting a high frequency power density applied to a plasma-forming space to 0.01 to 1 W/cm 3 , an absolute value of a direct current voltage to at most 1500 V and a gaseous atmosphere pressure to 0.05 to 5 Torr.
Claim 2
Dependent Claim
97 words
A process for the production of a coated article by coating a substrate with a hard or chemically stable material using a plasma CVD method, which comprises using jointly a high frequency source and a direct current source as a plasma exciting source, holding the substrate at a negative potential by the direct current source and adjusting a high frequency power density applied to a plasma-forming space to 0.01 to 1 W/cm 3 , an absolute value of a direct current voltage to at most 1500 V and a gaseous atmosphere pressure to 0.05 to 5 Torr.
Claim 3
Dependent Claim
22 words
The process of claim 1, wherein the substrate is of a material selected from the group consisting of steels and cemented carbides.
Claim 4
Dependent Claim
57 words
The process of claim 1, wherein the hard or chemically stable material is at least one compound of at least one element selected from the group consisting of Group IVa, Va and VIa elements of Periodic Table, silicon, aluminum and boron and at least one element selected from the group consisting of boron, carbon, nitrogen and oxygen.
Claim 5
Dependent Claim
23 words
The process of claim 1, wherein the high frequency source is selected from the group consisting of RF wave sources and microwave sources.
Claim 6
Dependent Claim
19 words
The process of claim 1, wherein the coating is carried out at a temperature of 300° to 1100° C.