US4673777A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Microbeam sensor contact damper
Assignee: Motorola Solutions Inc
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Filing: 1986-06-09
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Granted: 1987-06-16
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Expires: 2006-06-09
Abstract
Abstract The present invention consists of an apparatus for damping the movement of a microbeam sensor. The damping device consists of a gold plated chrome bar, or the like being placed, or fabricated, above the microbeam. This damper prevents excessive movement that could be caused from harmonic vibrations or the like.
Inventors
- 👤 Monty W. Bai
- 👤 John D. Titus
- 👤 Louis P. Farace
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 16:46
CPC Classifications
H; H01; H01H; H01H35/00; H01H35/14; H01H35/141; H01H35/142; H01H1/00; H01H1/0036
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
120 words
A microbeam sensor contact damper comprising: a first layer of a silicon wafer having an upper surface, a lower surface, and an opening disposed therethrough said first layer defining a microbeam having a first end and a second end opposite said first end, in said opening of said first layer of said silicon wafer, said first end of said microbeam extending from said first layer of said silicon wafer; and damper means for damping the movement of said microbeam, said damper means being coupled to said upper surface of said first layer of said silicon wafer and being disposed above said microbeam so that a gap exists between said damper means and said microbeam when said microbeam is at rest.
Claim 2
Dependent Claim
120 words
A microbeam sensor contact damper comprising: a first layer of a silicon wafer having an upper surface, a lower surface, and an opening disposed therethrough said first layer defining a microbeam having a first end and a second end opposite said first end, in said opening of said first layer of said silicon wafer, said first end of said microbeam extending from said first layer of said silicon wafer; and damper means for damping the movement of said microbeam, said damper means being coupled to said upper surface of said first layer of said silicon wafer and being disposed above said microbeam so that a gap exists between said damper means and said microbeam when said microbeam is at rest.
Claim 3
Dependent Claim
91 words
The microbeam sensor contact damper of claim 1 further comprising: a second layer of said silicon wafer having an upper surface, a lower surface and an opening disposed therethrough, said upper surface of said second layer being coupled to said lower surface of said first layer and the opening of said second layer being disposed in a matching relation to the opening of said first layer; and a third layer of said silicon wafer having an upper surface, said upper surface being coupled to said lower surface of said second layer.
Claim 4
Dependent Claim
33 words
The microbeam sensor contact damper of claim 1 further comprising contact means being coupled to said microbeam and fixed contact means on the upper surface of the first layer of the silicon wafer.
Claim 5
Dependent Claim
53 words
The microbeam sensor contact damper of claim 1 where said damper comprises a gold plated chrome beam having a first end and a second end, said first and second ends being coupled to said upper surface of said first layer of said silicon wafer such that said silicon beam extends above said microbeam.
Claim 6
Dependent Claim
199 words
A microbeam sensor contact damper comprising: a first layer of silicon wafer having an upper surface, a lower surface, and an opening disposed therethrough, said first layer defining a microbeam having a first end and a second end opposite said first end, in said opening of said first layer of said silicon wafer, said first end of said microbeam extending from said first layer of said silicon wafer; damper means for damping the movement of said microbeam, said damper means being coupled to said upper surface of said first layer of said silicon wafer and being disposed above said microbeam so that a gap exists between said damper means and said microbeam when said microbeam is at rest; a second layer of said silicon wafer having an upper surface, a lower surface and an opening disposed therethrough, said upper surface of said second layer being coupled to said lower surface of said first layer and the opening of said second layer being disposed in a matching relation to the opening of said first layer; and a third layer of said silicon wafer having an upper surface, said upper surface being coupled to said lower surface of said second layer.
Claim 7
Dependent Claim
199 words
A microbeam sensor contact damper comprising: a first layer of silicon wafer having an upper surface, a lower surface, and an opening disposed therethrough, said first layer defining a microbeam having a first end and a second end opposite said first end, in said opening of said first layer of said silicon wafer, said first end of said microbeam extending from said first layer of said silicon wafer; damper means for damping the movement of said microbeam, said damper means being coupled to said upper surface of said first layer of said silicon wafer and being disposed above said microbeam so that a gap exists between said damper means and said microbeam when said microbeam is at rest; a second layer of said silicon wafer having an upper surface, a lower surface and an opening disposed therethrough, said upper surface of said second layer being coupled to said lower surface of said first layer and the opening of said second layer being disposed in a matching relation to the opening of said first layer; and a third layer of said silicon wafer having an upper surface, said upper surface being coupled to said lower surface of said second layer.
Claim 8
Dependent Claim
34 words
The microbeam sensor contact damper of claim 5 further comprising contact means being being coupled to said microbeam and fixed contact means on the upper surface of the first layer of the silicon wafer.
Claim 9
Dependent Claim
53 words
The microbeam sensor contact damper of claim 5 where said damper comprises a gold plated chrome beam having a first end and a second end, said first and second ends being coupled to said upper surface of said first layer of said silicon wafer such that said silicon beam extends above said microbeam.
Claim 10
Dependent Claim
54 words
A microbeam sensor contact damper comprising: a silicon wafer having a microbeam defined therein adapted to move in a perpendicular relation with respect to said silicon wafer; and damper means for damping the movement of said microbeam, said damper having first and second ends coupled to said silicon wafer and disposed above said microbeam.
Claim 11
Dependent Claim
54 words
A microbeam sensor contact damper comprising: a silicon wafer having a microbeam defined therein adapted to move in a perpendicular relation with respect to said silicon wafer; and damper means for damping the movement of said microbeam, said damper having first and second ends coupled to said silicon wafer and disposed above said microbeam.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-06-15 | 1990-12-15 | 1991-06-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-06-15 | 1994-12-15 | 1995-06-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-06-15 | 1998-12-15 | 1999-06-16 | $7700.00 | Window Closed / Lapsed |