US4672997A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Modular, self-diagnostic mass-flow controller and system
Assignee: BTU Engineering Corp
•
Filing: 1984-10-29
•
Granted: 1987-06-16
•
Expires: 2004-10-29
Abstract
Abstract A modular, self-diagnostic mass-flow controller and system includes separable and readily interchangeable housing portions cooperative to provide mass-flow controller component repair and replacement without further system disconnection. The mass-flow controller includes dual mass-flow sensors and associated electronics including a processor operative in response to the dual mass-flow sensor and other signals to both provide mass-flow control of a controlled gas and self-diagnostics to ensure that the controller is operating in its intended manner.
Inventors
- 👤 Donald Landis
- 👤 John H. Fabricius
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 04:34
CPC Classifications
G; G05; G05D; G05D7/00; G05D7/06; G05D7/0617; G05D7/0629; G05D7/0635; G05D7/0641; G05D7/0647; G01; G01F; G01F1/00; G01F1/68; G01F1/684; G01F1/6847; Y; Y10; Y10T; Y10T137/00; Y10T137/8158; Y10T137/8225; Y10T137/8242
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
151 words
A modular, self-diagnostic mass-flow controller for controlling the mass-flow of a controlled gas along a main gas flow path, comprising: first means for providing a first control signal proportional to mass-flow of the controlled gas along a first gas flow path parallel to said main gas flow path; second means of providing a second control signal proportional to mass-flow of the controlled gas along a second gas flow path parallel to said main gas flow path; and third means coupled to said first and to said second means for providing a third control signal in response to a preselected combination of said first and said second control signals for controlling the mass-flow of the controlled gas along said main gas flow path, and for providing a self-diagnostic alarm signal in response to a preselected characteristic of said first and said second control signals that indicates a operating state of the controller.
Claim 2
Dependent Claim
151 words
A modular, self-diagnostic mass-flow controller for controlling the mass-flow of a controlled gas along a main gas flow path, comprising: first means for providing a first control signal proportional to mass-flow of the controlled gas along a first gas flow path parallel to said main gas flow path; second means of providing a second control signal proportional to mass-flow of the controlled gas along a second gas flow path parallel to said main gas flow path; and third means coupled to said first and to said second means for providing a third control signal in response to a preselected combination of said first and said second control signals for controlling the mass-flow of the controlled gas along said main gas flow path, and for providing a self-diagnostic alarm signal in response to a preselected characteristic of said first and said second control signals that indicates a operating state of the controller.
Claim 3
Dependent Claim
58 words
The invention of claim 1, wherein each of said first and said second control signals include third and fourth constituent signals, and wherein said self-diagnostic alarm signal is produced when the characteristic of said third and fourth constituent signals of each of said first and said second control signals is such that they have substantially the same magnitude.
Claim 4
Dependent Claim
21 words
The invention of claim 1, wherein said preselected combination is the difference of said first and of said second control signals.
Claim 5
Dependent Claim
59 words
The invention of claim 3, wherein said third means includes a processor having a memory having stored data defining a difference frequency reference standard, and wherein said self-diagnostic alarm signal is produced when the characteristic of said difference of said first and said second control signals is such that it is not equal to said difference frequency reference standard.
Claim 6
Dependent Claim
72 words
The invention of claim 1, wherein said third means includes a processor having a memory having stored data defining first and second reference signal standards, and wherein said self-diagnostic alarm signal is produced when the characteristic of said first and said second control signals is such that individual ones of said first and of said second control signals are different from respective ones of said first and said second reference signal standards.
Claim 7
Dependent Claim
66 words
The invention of claim 5, further including a control valve controlled by said third control signal, wherein said third means includes a processor having a memory having control valve reference standard data, and wherein said processor is operative to produce said self-diagnostic alarm signal in response to a preselected characteristic of said first control signal, of said second control signal, and of said third control signal.
Claim 8
Dependent Claim
69 words
The invention of claim 1, further including fourth means for providing a signal representative of gas pressure along the main gas flow path, wherein said third means includes a processor having a memory having reference pressure data, and wherein said third means is further operative to provide a self-diagnostic alarm signal when the characteristic of the pressure signal is such that it is larger than said reference pressure data.
Claim 9
Dependent Claim
66 words
The invention of claim 1, further including fourth means for providing a signal representative of pressure along the main fluid-flow path, wherein said third means includes a processor having a memory having reference pressure data, and wherein said third means is operative to provide a self-diagnostic alarm signal when the characteristic of the pressure signal is such that it is less than the reference pressure data.
Claim 10
Dependent Claim
30 words
The invention of claim 1, wherein said first and said second means each include a sensing tube that is serially connected in spaced-apart relation along said main gas flow path.
Claim 11
Dependent Claim
104 words
A modular, self-diagnostic mass-flow controller having a gas flow passageway, comprising: a housing having first and second removably attachable housing portions cooperative to define when attached a portion of the gas flow passageway, said first housing portion defining an exposed flow restrictor receiving surface when the housing is detached for providing expeditious flow restrictor placement, removal, and replacement; at least one flow restrictor removably positioned on the flow restrictor receiving surface in position to restrict flow along the gas-flow passageway; and first and second mass-flow sensors coupled to the housing for providing first and second signal indications of mass-flow along the gas flow passageway.
Claim 12
Dependent Claim
104 words
A modular, self-diagnostic mass-flow controller having a gas flow passageway, comprising: a housing having first and second removably attachable housing portions cooperative to define when attached a portion of the gas flow passageway, said first housing portion defining an exposed flow restrictor receiving surface when the housing is detached for providing expeditious flow restrictor placement, removal, and replacement; at least one flow restrictor removably positioned on the flow restrictor receiving surface in position to restrict flow along the gas-flow passageway; and first and second mass-flow sensors coupled to the housing for providing first and second signal indications of mass-flow along the gas flow passageway.
Claim 13
Dependent Claim
21 words
The invention of claim 10, wherein said first housing portion includes an integral peripheral flange defining said flow restrictor receiving surface.
Claim 14
Dependent Claim
22 words
The invention of claim 10, wherein said first and said second mass-flow sensors are connected in series along said gas flow passageway.
Claim 15
Dependent Claim
45 words
The invention of claim 10, wherein said second housing portion includes a plate, and wherein said first and said second sensors include first and second sensing tubes mounted to said plate and in communication with said gas flow passageway when said housing portions are attached.
Claim 16
Dependent Claim
35 words
The invention of claim 10, further including a control valve, and means coupled to said first and said second mass-flow sensors for controlling said control valve in response to said first and said second signals.
Claim 17
Dependent Claim
30 words
The invention of claim 14, further including means coupled to said first and said second sensors for providing self-diagnostic alarm signals in response to said first and said second signals.
Claim 18
Dependent Claim
94 words
A modular, self-diagnostic mass-flow controller, comprising: a two-part housing cooperative to define a fluid-flow passageway; means mounted to the housing for providing first and second signal indications proportional to mass-flow along the fluid-flow passageway; means responsive to said first and said second signal indication for providing a third signal representative of mass-flow along the fluid-flow passageway; and means including a memory having reference data and responsive to said first, second, and third signals for providing self-diagnostic alarm signals in dependence upon predetermined relations between said first, second, and third signals and said reference data.
Claim 19
Dependent Claim
94 words
A modular, self-diagnostic mass-flow controller, comprising: a two-part housing cooperative to define a fluid-flow passageway; means mounted to the housing for providing first and second signal indications proportional to mass-flow along the fluid-flow passageway; means responsive to said first and said second signal indication for providing a third signal representative of mass-flow along the fluid-flow passageway; and means including a memory having reference data and responsive to said first, second, and third signals for providing self-diagnostic alarm signals in dependence upon predetermined relations between said first, second, and third signals and said reference data.
Claim 20
Dependent Claim
36 words
The invention of claim 16, wherein said two-part housing includes a housing portion having an upstanding peripheral flange defining a flat recessed surface, and further including a flow restrictor removably mounted to said flat recessed surface.
Claim 21
Dependent Claim
21 words
The invention of claim 17, wherein said first and second signal indication providing means includes first and second mass-flow sensing tubes.
References Cited (Backward Citations)
US2895502A
Cited
US2917066A
Cited
US3543578A
Cited
US3776249A
Cited
US3938384A
Cited
US3851526A
Cited
US3992940A
Cited
US3931736A
Cited
US4080821A
Cited
US4213335A
Cited
US4142170A
Cited
US4135396A
Cited
US4306453A
Cited
US4255968A
Cited
US4320655A
Cited
US4319483A
Cited
US4487213A
Cited
US4480467A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-06-15 | 1990-12-15 | 1991-06-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-06-15 | 1994-12-15 | 1995-06-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-06-15 | 1998-12-15 | 1999-06-16 | $7700.00 | Window Closed / Lapsed |