US4670126A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputter module for modular wafer processing system
Assignee: Varian Medical Systems Inc
•
Filing: 1986-04-28
•
Granted: 1987-06-02
•
Expires: 2006-04-28
Abstract
Abstract A machine for sputter deposition of a wafer workpiece also sputters on the wafer supporting mechanism. This causes a need for cleaning or replacement of the support mechanism. A sputter machine is provided in which the supporting mechanism can be isolated from the sputtering source, the pumps and other processing apparatus for cleaning without exposing the entire machine to atmosphere.
Inventors
- 👤 Mark G. Messer
- 👤 Lawrence R. Stark
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 12:26
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; H; H10; H10P; H10P72/00; H10P72/30; H10P72/36; H10P72/3604; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/136; Y10S414/137; Y10S414/139
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
150 words
A sputter deposition module comprising: a first vacuum chamber and a second chamber having an opening therebetween; a heater located in said second chamber; a sputter source located in said second chamber opposite said heater; a first arm member in said first vacuum chamber for receiving a substrate in a horizontal orientation from a second arm extended through a port in said first vacuum chamber; means attached to said first arm member for rotating said first arm member and said substrate attached thereto through a first selected angle about a first axis so that said first arm member is positioned opposite said opening; and means attached to said first arm member for rotating said first arm member and said substrate attached thereto through a second selected angle about a second axis perpendicular to said first axis so that said substrate rotates through said opening and is positioned opposite said heater.
Claim 2
Dependent Claim
150 words
A sputter deposition module comprising: a first vacuum chamber and a second chamber having an opening therebetween; a heater located in said second chamber; a sputter source located in said second chamber opposite said heater; a first arm member in said first vacuum chamber for receiving a substrate in a horizontal orientation from a second arm extended through a port in said first vacuum chamber; means attached to said first arm member for rotating said first arm member and said substrate attached thereto through a first selected angle about a first axis so that said first arm member is positioned opposite said opening; and means attached to said first arm member for rotating said first arm member and said substrate attached thereto through a second selected angle about a second axis perpendicular to said first axis so that said substrate rotates through said opening and is positioned opposite said heater.
Claim 3
Dependent Claim
43 words
A sputter deposition module as in claim 1 including means attached to said first arm member for rotating said first arm member and said substrate attached thereto opposite said heater through a third selected angle so that said substrate contacts said heater surface.
Claim 4
Dependent Claim
39 words
A sputter deposition module as in claim 2 wherein said means for rotating said first arm member through said first selected angle are the same as the means for rotating said first arm member through said third selected angle.
Claim 5
Dependent Claim
20 words
A sputter deposition module as in claim 2 wherein said third selected angle is said first selected angle minus 90°.
Claim 6
Dependent Claim
29 words
A sputter deposition module as in claim 1 further including means for closing said opening to provide a vacuum seal between said first vacuum chamber and said second chamber.
Claim 7
Dependent Claim
69 words
A sputter deposition module as in claim 5 wherein said means for closing comprises: a member; sealing means; means for rotating said member to a position opposite said opening; and means for linearly translating said member toward said opening so that said sealing means is positioned between said member and a portion of said first chamber, thereby providing a vacuum seal between said first chamber and said second chamber.
Claim 8
Dependent Claim
22 words
A sputter deposition module as in claim 6 wherein said means for linearly translating comprises a shaft driven by an air piston.
Claim 9
Dependent Claim
40 words
A sputter deposition module as in claim 7 wherein said means for linearly translating includes a static seal between said first chamber and atmosphere when said sealing means provides a vacuum seal between said first chamber and said second chamber.
Claim 10
Dependent Claim
27 words
A sputter deposition module as in claim 1 wherein said first arm includes a removeable layer on a surface thereof exposed to sputtering from said sputter source.
Claim 11
Dependent Claim
17 words
A sputter deposition module as in claim 1 wherein said first selected angle is greater than 90°.
Claim 12
Dependent Claim
37 words
A sputter deposition module as in claim 1 further including valve means for opening and closing said port so that a vacuum seal is formed between said first vacuum chamber and a region exterior to said port.
References Cited (Backward Citations)
US4313815A
Cited
US4379743A
Cited
US4405435A
Cited
US4500407A
Cited
US4584045A
Cited
US4548699A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-06-01 | 1990-12-01 | 1991-06-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-06-01 | 1994-12-01 | 1995-06-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-06-01 | 1998-12-01 | 1999-06-02 | $7700.00 | Window Closed / Lapsed |