US4664793A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Pure water manufacturing apparatus
Assignee: Toshiba Corp
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Filing: 1985-10-25
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Granted: 1987-05-12
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Expires: 2005-10-25
Abstract
Abstract A pure water manufacturing apparatus for producing ultra pure water to be used in the electronic and medical industries. This apparatus comprises a pure water circulation system consisting of a pure water storage tank, a first heat exchanger arranged at the downstream side of the tank for thermally sterilizing pure water, a filter arranged at the downstream side of the first heat exchanger for removing dead bacteria, a pure water circulating means, and a second heat exchanger for cooling pure water disposed between the filter and a terminal device at which pure water is required. The ultrapure water is supplied to the terminal device from the downstream side of the filter through the second heat exchanger.
Inventors
- 👤 Kenji Murakami
- 👤 Yositaka Konomatu
- 👤 Kanro Sato
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 20:32
CPC Classifications
F; F24; F24D; F24D17/00; F24D17/0078; C; C02; C02F; C02F1/00; C02F1/02
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
119 words
A pure water manufacturing apparatus comprising: a pure water circulating system including; a pure water storage tank connected to a primary pure water manufacturing apparatus comprising an agglomerating/clarifying apparatus, a filtration apparatus, an ultraviolet sterilization apparatus and an ion exchanger, with said tank being supplied with primarily treated water from said primary pure water manufacturing apparatus, a heat exchanger for performing thermal sterilization arranged downstream of said tank; and a filter for removing bacteria positioned immediately downstream of said heat exchanger; means for circulating pure water through said pure water circulating system; and a heat exchanger for cooling pure water positioned in a pure water path between said filter and a terminal device at which pure water is required.
Claim 2
Dependent Claim
119 words
A pure water manufacturing apparatus comprising: a pure water circulating system including; a pure water storage tank connected to a primary pure water manufacturing apparatus comprising an agglomerating/clarifying apparatus, a filtration apparatus, an ultraviolet sterilization apparatus and an ion exchanger, with said tank being supplied with primarily treated water from said primary pure water manufacturing apparatus, a heat exchanger for performing thermal sterilization arranged downstream of said tank; and a filter for removing bacteria positioned immediately downstream of said heat exchanger; means for circulating pure water through said pure water circulating system; and a heat exchanger for cooling pure water positioned in a pure water path between said filter and a terminal device at which pure water is required.
Claim 3
Dependent Claim
15 words
An apparatus according to claim 1, wherein said terminal device is a semiconductor manufacturing line.
Claim 4
Dependent Claim
23 words
An apparatus according to claim 1, wherein a heat exchanger for cooling the pure water is inserted in said pure water circulation system.
Claim 5
Dependent Claim
23 words
An apparatus according to claim 1, wherein a heat exchanger for cooling the pure water is arranged outside said pure water circulation system.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-05-11 | 1990-11-10 | 1991-05-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-05-11 | 1994-11-10 | 1995-05-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-05-11 | 1998-11-10 | 1999-05-12 | $7700.00 | Window Closed / Lapsed |