US4661963A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Recovery system for xenon chloride laser
Assignee: Westinghouse Electric Corp
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Filing: 1985-10-17
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Granted: 1987-04-28
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Expires: 2005-10-17
Abstract
Abstract Disclosed is a method of maintaining the power of the output of a xenon chloride laser. The gases in the lasing chamber are circulated between the lasing chamber and a reforming chamber. In the reforming chamber, the gases are contacted with at least one metal chloride which is chemically less stable than hydrogen chloride. The temperature of the metal chloride in the reforming chamber is maintained between the condensation temperature of hydrogen chloride and the dissociation temperature of the metal chloride used. Also disclosed is apparatus for performing this method.
Inventors
- 👤 Chi-sheng Liu
- 👤 Donald W. Feldman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 07:39
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/09; H01S3/095; H01S3/02; H01S3/03; H01S3/036; H01S3/14; H01S3/22; H01S3/223; H01S3/225
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
74 words
In a xenon chloride excimer laser having a lasing chamber containing gases, a method of maintaining the power output of said laser, comprising circulating said gases between said lasing chamber and a reforming chamber, and contacting said gases in said reforming chamber with at least one metal chloride of less chemical stability than hydrogen chloride, at a temperature between the condensation temperature of hydrogen chloride and the dissociation temperature of the metal chloride used.
Claim 2
Dependent Claim
74 words
In a xenon chloride excimer laser having a lasing chamber containing gases, a method of maintaining the power output of said laser, comprising circulating said gases between said lasing chamber and a reforming chamber, and contacting said gases in said reforming chamber with at least one metal chloride of less chemical stability than hydrogen chloride, at a temperature between the condensation temperature of hydrogen chloride and the dissociation temperature of the metal chloride used.
Claim 3
Dependent Claim
13 words
A method according to claim 1 wherein said metal chloride is molybdenum chloride.
Claim 4
Dependent Claim
15 words
A method according to claim 1 wherein said gases include hydrogen chloride, xenon, and helium.
Claim 5
Dependent Claim
36 words
A method according to claim 1 wherein said metal chloride is selected from the group consisting of ReCl 3 , MoCl 3 , MoCl 4 , WCl 2 , WCl 3 , and WCl 5 .
Claim 6
Dependent Claim
18 words
A method according to claim 1 wherein said metal chloride is a powder held on a suspending agent.
Claim 7
Dependent Claim
13 words
A method according to claim 5 wherein said suspending agent is quartz wool.
Claim 8
Dependent Claim
109 words
In a xenon chloride laser having a lasing chamber that contains gases, including hydrogen chloride and xenon, apparatus for maintaining the power of the output of said laser comprising: (A) a reforming chamber containing at least one metal chloride of less chemical stability than hydrogen chloride; (B) conduit means between said reforming chamber and said lasing chamber; (C) pump means for circulating gases through said conduit means between said lasing chamber and said reforming chamber in contact with said metal chloride; and (D) means for heating said reforming chamber to a temperature between the condensation temperature of said hydrogen chloride and the dissociation temperature of the metal chloride used.
Claim 9
Dependent Claim
109 words
In a xenon chloride laser having a lasing chamber that contains gases, including hydrogen chloride and xenon, apparatus for maintaining the power of the output of said laser comprising: (A) a reforming chamber containing at least one metal chloride of less chemical stability than hydrogen chloride; (B) conduit means between said reforming chamber and said lasing chamber; (C) pump means for circulating gases through said conduit means between said lasing chamber and said reforming chamber in contact with said metal chloride; and (D) means for heating said reforming chamber to a temperature between the condensation temperature of said hydrogen chloride and the dissociation temperature of the metal chloride used.
Claim 10
Dependent Claim
12 words
Apparatus according to claim 7 wherein said metal chloride is molybdenum chloride.
Claim 11
Dependent Claim
14 words
Apparatus according to claim 7 wherein said gases include a buffer gas of helium.
Claim 12
Dependent Claim
35 words
Apparatus according to claim 7 wherein said metal chloride is selected from the group consisting of ReCl 3 , MoCl 3 , MoCl 4 , WCl 2 , WCl 3 , and WCl 5 .
Claim 13
Dependent Claim
17 words
Apparatus according to claim 7 wherein said metal chloride is a powder held on a suspending agent.
Claim 14
Dependent Claim
12 words
Apparatus according to claim 11 wherein said suspending agent is quartz wool.
References Cited (Backward Citations)
US3634778A
Cited
US3648194A
Cited
US3668549A
Cited
US3745483A
Cited
US4031484A
Cited
US4143336A
Cited
US4063191A
Cited
US4607371A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-04-27 | 1990-10-27 | 1991-04-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-04-27 | 1994-10-27 | 1995-04-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-04-27 | 1998-10-27 | 1999-04-28 | $7700.00 | Window Closed / Lapsed |