Integrated circuit fabrication process

Claim 2

A process for fabricating integrated circuits, comprising the steps of: providing a substrate having semiconductor active device regions near the surface thereof; providing an insulating layer above predetermined portions of said active device regions; defining a first metal interconnect layer which interconnects predetermined portions of said active device regions to configure a predetermined circuit function; providing an interlevel dielectric above said first metal interconnect layer, and anisotropically etching said interlevel dielectric to expose said first metal interconnect layer at predetermined via locations; conformally depositing an additional layerof insulating material, and anisotropically etching said additional layer of insulating material to remove it from exposed flat surfaces, whereby said exposed via locations are narrowed at the periphery thereof by remaining portions of said additional layer of insulating material; and depositing, patterning, and etching an additional layer of conductive material, to interconnect said via areas in a predetermined pattern; wherein said first metal interconnect layer is defined to be no wider under at least some locations where said interlevel dielectric is etched than the minimum width of said first metal interconnect layer elsewhere.

Claim 3

The process of claim 1, wherein said interlevel dielectric has a top portion compositionally different from said additional layer of insulating material, and wherein said step of etching said additional layer of insulating material is controlled with respect to endpoint detection with respect to said compositionally different top portion of said interlevel dielectric.

Claim 4

The process of claim 1 wherein said additional layer of conductive material is defined to be no wider under at least some locations where said interlevel dielectric is etched than the minimum width of said second metal interconnect layer elsewhere.

Claim 5

The process of claim 1, wherein said step of depositing and additional layer of insulating material comprises low pressure chemical vapor deposition of silicon oxides.

Claim 6

The process of claim 1, wherein said step of depositing an additional layer of insulating material comprises low temperature plasma-assisted deposition of silicon oxides.

Claim 7

A process for fabricating integrated circuits, comprising the steps of: providing a substrate having semiconductor active device regions near the surface thereof, said device regions comprising field-effect transistors comprising gates defined in a layer of polycrystalline material comprising silicon; providing a first interlevel dielectric above said gate layer, patterning said first interlevel dielectric to expose predetermined contact locations in said gate layer and also predetermined contact locations in said active device regions, and defining a first metal interconnect layer which interconnects predetermined portions of said active device regions and of said gate layer to at least partially configure a predetermined circuit function; providing a second interlevel dielectric above said first metal interconnect layer, and anisotropically etching said second interlevel dielectric to expose said first metal interconnect layer at predetermined second via locations and also to expose said gate layer at other predetermined second via locations; conformally depositing an additional layer of insulating material, and anisotropically etching said additional layer of insulating material to remove it from exposed flat surfaces, whereby said exposed second via locations are narrowed at the periphery thereof by remaining portions of said additional layer of insulating material; and depositing, patterning, and etching an additional layer of conductive material, to interconnect said second via locations in a predetermined pattern; wherein said additional layer of conductive material is defined to be no wider under at least some locations where said second interlevel dielectric is etched than the minimum width of said second metal interconnect layer elsewhere.

Claim 8

A process for fabricating integrated circuits, comprising the steps of: providing a substrate having semiconductor active device regions near the surface thereof, said device regions comprising field-effect transistors comprising gates defined in a layer of polycrystalline material comprising silicon; providing a first interlevel dielectric above said gate layer, patterning said first interlevel dielectric to expose predetermined contact locations in said gate layer and also predetermined contact locations in said active device regions, and defining a first metal interconnect layer which interconnects predetermined portions of said active device regions and of said gate layer to at least partially configure a predetermined circuit function; providing a second interlevel dielectric above said first metal interconnect layer, and anisotropically etching said second interlevel dielectric to expose said first metal interconnect layer at predetermined second via locations and also to expose said gate layer at other predetermined second via locations; conformally depositing an additional layer of insulating material, and anisotropically etching said additional layer of insulating material to remove it from exposed flat surfaces, whereby said exposed second via locations are narrowed at the periphery thereof by remaining portions of said additional layer of insulating material; and depositing, patterning, and etching an additional layer of conductive material, to interconnect said second via locations in a predetermined pattern; wherein said additional layer of conductive material is defined to be no wider under at least some locations where said second interlevel dielectric is etched than the minimum width of said second metal interconnect layer elsewhere.

Claim 9

The process of claim 6, wherein said second interlevel dielectric has a top portion compositionally different from said additional layer of insulating material, and wherein said step of etching said additional layer of insulating material is controlled with respect to endpoint detection with respect to said compositionally different top portion of said second interlevel dielectric.

Claim 10

The process of claim 6, wherein said first metal interconnect layer is defined to be no wider under at least some locations where said second interlevel dielectric is etched than the minimum width of said first metal interconnect layer elsewhere.