US4649310A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Piezoelectric vibrating element
Assignee: Murata Manufacturing Co Ltd
•
Filing: 1984-12-24
•
Granted: 1987-03-10
•
Expires: 2004-12-24
Abstract
Abstract A vibrating element for the vibration under an expansion mode has a substrate made of a constant modulus alloy having a plate shape which is symmetrical along a line extending across the substrate. At least one pair of projections extends from opposite sides of the substrate symmetrically with respect to the line. A thin piezoelectric film is deposited on the substrate, and a vibration electrode film is further deposited on the piezoelectric film. The pair of projections are provided to be trimmed to adjust the vibration frequency of the vibrating element.
Inventors
- 👤 Takeshi Nakamura
- 👤 Ikuo Matsumoto
- 👤 Kenji Ando
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 19:25
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/24; H03H3/00; H03H3/007; H03H3/013; Y; Y10; Y10T; Y10T29/00; Y10T29/42
Claims Analysis
Total Claims: 37
Claim 1
Independent Claim
112 words
An expansion mode vibrating element comprising: a substrate made of a constant modulus alloy having a plate shape which is symmetrical along a line extending across the substrate; first and second sets of N projections extending from respective opposite sides of said substrate symmetrically with respect to said line, N being an integer greater than zero; a thin piezoelectric film deposited on said substrate; and a vibration electrode film deposited on said piezoelectric film, wherein the vibration frequency of said vibrating element may be adjusted by trimming said projections; wherein the ratio P/W of the length of said projections to the width of said substrate between said projections is about 0-20 percent.
Claim 2
Dependent Claim
112 words
An expansion mode vibrating element comprising: a substrate made of a constant modulus alloy having a plate shape which is symmetrical along a line extending across the substrate; first and second sets of N projections extending from respective opposite sides of said substrate symmetrically with respect to said line, N being an integer greater than zero; a thin piezoelectric film deposited on said substrate; and a vibration electrode film deposited on said piezoelectric film, wherein the vibration frequency of said vibrating element may be adjusted by trimming said projections; wherein the ratio P/W of the length of said projections to the width of said substrate between said projections is about 0-20 percent.
Claim 3
Dependent Claim
14 words
The vibrating element of claim 1, wherein said projections are integral with said substrate.
Claim 4
Dependent Claim
13 words
Apparatus as in claim 1, wherein the ratio P/W is about 0-10 percent.
Claim 5
Dependent Claim
21 words
The vibrating element of claim 2, wherein said projections are further integral with said thin piezoelectric film deposited on said substrate.
Claim 6
Independent Claim
101 words
A method for making a vibrating element which vibrates under an expansion mode, said method comprising the steps of; forming a substrate made of a constant modulus alloy having a plate shape which is symmetrical along a line extending across the substrate; forming first and second sets of N projections extending from respective opposite sides of said substrate symmetrically with respect to said line, N being an integer greater than zero; depositing a thin piezoelectric film on said substrate; depositing a vibration electrode film on said piezoelectric film; and trimming said projections to adjust the vibration frequency of said vibrating element.
Claim 7
Independent Claim
101 words
A method for making a vibrating element which vibrates under an expansion mode, said method comprising the steps of; forming a substrate made of a constant modulus alloy having a plate shape which is symmetrical along a line extending across the substrate; forming first and second sets of N projections extending from respective opposite sides of said substrate symmetrically with respect to said line, N being an integer greater than zero; depositing a thin piezoelectric film on said substrate; depositing a vibration electrode film on said piezoelectric film; and trimming said projections to adjust the vibration frequency of said vibrating element.
Claim 8
Dependent Claim
13 words
The method of claim 5, wherein said substrate is generally rectangular in shape.
Claim 9
Dependent Claim
13 words
The method of claim 6, wherein said projections are generally triangular in shape.
Claim 10
Dependent Claim
7 words
The method of claim 7, wherein N=1.
Claim 11
Dependent Claim
13 words
The method of claim 5, wherein said projections are integral with said substrate.
Claim 12
Dependent Claim
18 words
The method of claim 9, wherein said projections further are integral with and extend from said piezoelectric film.
Claim 13
Independent Claim
103 words
A method for controlling a vibration frequency of a vibrating element which vibrates under an expansion mode, said vibrating element comprising a substrate made of a constant modulus alloy having a plate shape which is symmetrical along a line extending across the substrate, a thin piezoelectric film deposited on said substrate and a vibration electrode film deposited on said piezoelectric film, said controlling method comprising the steps of: forming first and second sets of N projections extending from respective opposite sides of said substrate symmetrically with respect to said line; and trimming said projections to adjust the vibration frequency of said vibrating element.
Claim 14
Independent Claim
103 words
A method for controlling a vibration frequency of a vibrating element which vibrates under an expansion mode, said vibrating element comprising a substrate made of a constant modulus alloy having a plate shape which is symmetrical along a line extending across the substrate, a thin piezoelectric film deposited on said substrate and a vibration electrode film deposited on said piezoelectric film, said controlling method comprising the steps of: forming first and second sets of N projections extending from respective opposite sides of said substrate symmetrically with respect to said line; and trimming said projections to adjust the vibration frequency of said vibrating element.
Claim 15
Dependent Claim
13 words
The method of claim 11, wherein said substrate is generally rectangular in shape.
Claim 16
Dependent Claim
13 words
The method of claim 12, wherein said projections are generally triangular in shape.
Claim 17
Dependent Claim
7 words
The method of claim 13, wherein N=1.
Claim 18
Dependent Claim
22 words
The method of claim 11, including trimming said projections to increase the vibration frequency of said vibrating element to a desired frequency.
Claim 19
Dependent Claim
13 words
The method of claim 11, wherein said projections are integral with said substrate.
Claim 20
Dependent Claim
18 words
The method of claim 16, wherein said projections further extend from and are integral with said piezoelectric film.
Claim 21
Dependent Claim
97 words
An expansion mode vibrating element comprising: a substrate made of a constant modulus alloy having a plate shape which is symmetrical along a line extending across the substrate; first and second sets of N projections extending from respective opposite sides of said substrate symmetrically with respect to said line, N being an integer greater than zero; a thin piezoelectric film deposited on said substrate; and a vibration electrode film deposited on said piezoelectric film wherein the vibration frequency of said vibrating element may be adjusted by trimming said projections; wherein said substrate is generally rectangular in shape.
Claim 22
Dependent Claim
97 words
An expansion mode vibrating element comprising: a substrate made of a constant modulus alloy having a plate shape which is symmetrical along a line extending across the substrate; first and second sets of N projections extending from respective opposite sides of said substrate symmetrically with respect to said line, N being an integer greater than zero; a thin piezoelectric film deposited on said substrate; and a vibration electrode film deposited on said piezoelectric film wherein the vibration frequency of said vibrating element may be adjusted by trimming said projections; wherein said substrate is generally rectangular in shape.
Claim 23
Dependent Claim
14 words
The vibrating element of claim 18, wherein said projections are generally triangular in shape.
Claim 24
Dependent Claim
8 words
The vibrating element of claim 19, wherein N=1.
Claim 25
Dependent Claim
111 words
An expansion mode vibrating element comprising: a substrate made of a constant modulus alloy having a plate shape which is symmetrical along a line extending across the substrate; a thin piezoelectric film deposited on said substrate; a vibration electrode film deposited on said piezoelectric film; and first and second sets of N projections extending integrally from respective opposite sides of said substrate symmetrically with respect to said line, N being an integer greater than 0, the vibration frequency of said vibrating element being adjustable by trimming said projections; wherein the ratio P/W of the length of said projections to the width of said substrate between said projections is about 0-20 percent.
Claim 26
Dependent Claim
111 words
An expansion mode vibrating element comprising: a substrate made of a constant modulus alloy having a plate shape which is symmetrical along a line extending across the substrate; a thin piezoelectric film deposited on said substrate; a vibration electrode film deposited on said piezoelectric film; and first and second sets of N projections extending integrally from respective opposite sides of said substrate symmetrically with respect to said line, N being an integer greater than 0, the vibration frequency of said vibrating element being adjustable by trimming said projections; wherein the ratio P/W of the length of said projections to the width of said substrate between said projections is about 0-20 percent.
Claim 27
Dependent Claim
21 words
The vibrating element of claim 21, wherein the vibration frequency of said vibrating element may be increased by trimming said projections.
Claim 28
Dependent Claim
19 words
The vibrating element of claim 21 wherein said projections further extend from and are integral with said piezoelectric film.
Claim 29
Dependent Claim
13 words
Apparatus as in claim 21, wherein the ratio P/W is about 0-10 percent.
Claim 30
Independent Claim
100 words
A method for making an expansion mode vibrating element, said method comprising the steps of: forming a substrate made of a constant modulus alloy having a plate shape which is symmetrical along a line extending across the substrate; forming first and second sets of N projections extending from respective opposite sides of said substrate symmetrically with respect to said line, N being an integer greater than 0; depositing a thin piezoelectric film on said substrate; depositing a vibration electrode film on said piezoelectric film; and trimming projections to increase the vibration frequency of said vibrating element to a desired frequency.
Claim 31
Independent Claim
100 words
A method for making an expansion mode vibrating element, said method comprising the steps of: forming a substrate made of a constant modulus alloy having a plate shape which is symmetrical along a line extending across the substrate; forming first and second sets of N projections extending from respective opposite sides of said substrate symmetrically with respect to said line, N being an integer greater than 0; depositing a thin piezoelectric film on said substrate; depositing a vibration electrode film on said piezoelectric film; and trimming projections to increase the vibration frequency of said vibrating element to a desired frequency.
Claim 32
Dependent Claim
13 words
The method of claim 25, wherein said projections are integral with said substrate.
Claim 33
Dependent Claim
18 words
The method of claim 26, wherein said projections also extend from and are integral with said piezoelectric film.
Claim 34
Dependent Claim
28 words
The method of claim 25, wherein the ratio P/W of the length of said projections to the width of said substrate between said projections is about 0-20 percent.
Claim 35
Dependent Claim
13 words
The method of claim 28, wherein the ratio P/W is about 0-10 percent.
Claim 36
Dependent Claim
142 words
An expansion mode vibrating element comprising: a substrate made of a constant modulus alloy having a plate shape which is symmetrical along a line extending across the substrate; a thin piezoelectric film deposited on said substrate; a vibration electrode film deposited on said piezoelectric film; first and second sets of N projections extending from first respective opposite sides of said substrate symmetrically with respect to said line, N being an integer greater than 0, the vibration frequency of said vibrating element being adjustable by trimming said projections; a frame surrounding the substrate, having first and second arms extending within the frame to second respective opposite sides of said substrate for supporting the substrate, said second sides being distinct from said above-mentioned first sides which have said projections extending therefrom, and said substrate, said arms, and said frame being integral with one another.
Claim 37
Dependent Claim
142 words
An expansion mode vibrating element comprising: a substrate made of a constant modulus alloy having a plate shape which is symmetrical along a line extending across the substrate; a thin piezoelectric film deposited on said substrate; a vibration electrode film deposited on said piezoelectric film; first and second sets of N projections extending from first respective opposite sides of said substrate symmetrically with respect to said line, N being an integer greater than 0, the vibration frequency of said vibrating element being adjustable by trimming said projections; a frame surrounding the substrate, having first and second arms extending within the frame to second respective opposite sides of said substrate for supporting the substrate, said second sides being distinct from said above-mentioned first sides which have said projections extending therefrom, and said substrate, said arms, and said frame being integral with one another.
References Cited (Backward Citations)
US3634787A
Cited
US3488530A
Cited
US4037121A
Cited
US4156156A
Cited
US4469975A
Cited
US4433264A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-03-09 | 1990-09-08 | 1991-03-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-03-09 | 1994-09-08 | 1995-03-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-03-09 | 1998-09-08 | 1999-03-10 | $7700.00 | Window Closed / Lapsed |