US4646681A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Gaseous phase method accumulated film manufacturing apparatus
Assignee: Canon Inc
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Filing: 1985-04-25
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Granted: 1987-03-03
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Expires: 2005-04-25
Abstract
Abstract A gaseous phase method accumulated film manufacturing apparatus has one or more reaction furnace installation device on which a plurality of reaction furnaces for forming an accumulated film on a substrate by the gaseous phase method are movably installed, and one or more substrate conveying unit for conveying the substrate to the reaction furnaces.
Inventors
- 👤 Yasutomo Fujiyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 20:22
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/54
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
83 words
A manufacturing system for accumulating a film on a substrate by a gaseous phase method comprising: a plurality of processing chambers for accumulating the film on the substrate by the gaseous phase method; a conveying means for conveying the substrate to a processing chamber or for conveying the substrate having an accumulated film from a processing chamber, and a moving means for moving the processing chambers to and from the conveying means; said plurality of processing chambers being mounted on the moving means.
Claim 2
Dependent Claim
83 words
A manufacturing system for accumulating a film on a substrate by a gaseous phase method comprising: a plurality of processing chambers for accumulating the film on the substrate by the gaseous phase method; a conveying means for conveying the substrate to a processing chamber or for conveying the substrate having an accumulated film from a processing chamber, and a moving means for moving the processing chambers to and from the conveying means; said plurality of processing chambers being mounted on the moving means.
Claim 3
Dependent Claim
42 words
A manufacturing system according to claim 1, wherein the moving means rotates around an axis, and each of the processing chambers is located around said axis at a predetermined distance from said axis and at a second predetermined distance from each other.
Claim 4
Dependent Claim
17 words
A manufacturing system according to claim 2, wherein the processing chambers are removable from the moving means.
Claim 5
Dependent Claim
23 words
A manufacturing system according to claim 3, wherein the movement of the moving means is synchronized with the movement of the conveying means.
Claim 6
Dependent Claim
38 words
A manufacturing system according to claim 4, further comprising a second or a plurality of conveying means for conveying the substrate to a processing chamber or for conveying the substrate having an accumulated film from a processing chamber.
Claim 7
Dependent Claim
17 words
A manufacturing system according to claim 1, wherein the processing chambers are removable from the moving means.
Claim 8
Dependent Claim
23 words
A manufacturing system according to claim 1, wherein the movement of the moving means is synchronized with the movement of the conveying means.
Claim 9
Dependent Claim
38 words
A manufacturing system according to claim 1, further comprising a second or a plurality of conveying means for conveying the substrate to a processing chamber or for conveying the substrate having an accumulated film from a processing chamber.
Claim 10
Dependent Claim
22 words
A manufacturing system according to claim 1, wherein one of the plurality of processing chambers is different from the other processing chambers.
Claim 11
Dependent Claim
23 words
A manufacturing system according to claim 2, wherein the movement of the moving means is synchronized with the movement of the conveying means.
Claim 12
Dependent Claim
38 words
A manufacturing system according to claim 2, further comprising a second or a plurality of conveying means for conveying the substrate to a processing chamber or for conveying the substrate having an accumulated film from a processing chamber.
Claim 13
Dependent Claim
22 words
A manufacturing system according to claim 2, wherein one of the plurality of processing chambers is different from the other processing chambers.
Claim 14
Dependent Claim
38 words
A manufacturing system according to claim 3, further comprising a second or a plurality of conveying means for conveying the substrate to a processing chamber or for conveying the substrate having an accumulated film from a processing chamber.
Claim 15
Dependent Claim
22 words
A manufacturing system according to claim 3, wherein one of the plurality of processing chambers is different from the other processing chambers
Claim 16
Dependent Claim
34 words
A manufacturing system according to claim 1, wherein the processing chambers are positioned substantially in a straight line on the moving means, and the moving means moves in the direction of the straight line.
Claim 17
Dependent Claim
17 words
A manufacturing system according to claim 15, wherein the processing chambers are removable from the moving means.
Claim 18
Dependent Claim
23 words
A manufacturing system according to claim 16, wherein the movement of the moving means is synchronized with the movement of the conveying means.
Claim 19
Dependent Claim
38 words
A manufacturing system according to claim 17, further comprising a second or a plurality of conveying means for conveying the substrate to a processing chamber or for conveying the substrate having an accumulated film from a processing chamber.
Claim 20
Dependent Claim
23 words
A manufacturing system according to claim 15, wherein the movement of the moving means is synchronized with the movement of the conveying means.
Claim 21
Dependent Claim
38 words
A manufacturing system according to claim 15, further comprising a second or a plurality of conveying means for conveying the substrate to a processing chamber or for conveying the substrate having an accumulated film from a processing chamber.
Claim 22
Dependent Claim
22 words
A manufacturing system according to claim 15, wherein one of the plurality of processing chambers is different from the other processing chambers.
Claim 23
Dependent Claim
38 words
A manufacturing system according to claim 16, further comprising a second or a plurality of conveying means for conveying the substrate to a processing chamber or for conveying the substrate having an accumulated film from a processing chamber.
Claim 24
Dependent Claim
22 words
A manufacturing system according to claim 16, wherein one of the plurality of processing chambers is different from the other processing chambers.
Claim 25
Dependent Claim
96 words
A manufacturing system for accumulating a film on a substrate by a gaseous phase method, comprising: a plurality of sets of processing chambers, each set containing a plurality of processing chambers for accumulating the film on the substrate by the gaseous phase method: a conveying means for conveying the substrate to a processing chamber or for conveying the substrate having an accumulated film from a processing chamber, and a plurality of moving means for moving the processing chambers to and from the conveying means; each set of processing chambers being mounted on a separate moving means.
Claim 26
Dependent Claim
96 words
A manufacturing system for accumulating a film on a substrate by a gaseous phase method, comprising: a plurality of sets of processing chambers, each set containing a plurality of processing chambers for accumulating the film on the substrate by the gaseous phase method: a conveying means for conveying the substrate to a processing chamber or for conveying the substrate having an accumulated film from a processing chamber, and a plurality of moving means for moving the processing chambers to and from the conveying means; each set of processing chambers being mounted on a separate moving means.
Claim 27
Dependent Claim
51 words
A manufacturing system according to claim 24, wherein each moving means rotates around a separate axis, and each of the processing chambers of the set mounted on the moving means is located around said axis at a predetermined distance from said axis and at a second predetermined distance from each other.
Claim 28
Dependent Claim
38 words
A manufacturing system according to claim 24, wherein the processing chambers of each set are positioned substantially in a straight line on the respective moving means, and each moving means moves in the direction of the straight line.
Claim 29
Dependent Claim
22 words
A manufacturing system according to claim 24, wherein one of the plurality of processing chambers is different from the other processing chambers.
Claim 30
Dependent Claim
22 words
A manufacturing system according to claim 25, wherein one of the plurality of processing chambers is different from the other processing chambers.
Claim 31
Dependent Claim
22 words
A manufacturing system according to claim 26, wherein one of the plurality of processing chambers is different from the other processing chambers.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-03-02 | 1990-09-01 | 1991-03-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-03-02 | 1994-09-01 | 1995-03-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-03-02 | 1998-09-01 | 1999-03-03 | $7700.00 | Window Closed / Lapsed |