US4642565A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method to determine the crystalline properties of an interface of two materials by photovoltage phenomenon
Assignee: RCA Corp
•
Filing: 1984-10-29
•
Granted: 1987-02-10
•
Expires: 2004-10-29
Abstract
Abstract Crystalline quality of a semiconductor material near its interface with an insulator is evaluated by the photovoltage response to a light beam scanned in wavelength. The crystalline quality is determined from the photovoltage interference pattern in the region of intrinsic excitation of the material. A body of silicon-on-sapphire (SOS) is used to illustrate the method.
Inventors
- 👤 Lubomir L. Jastrzebski
- 👤 Jacek Lagowski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 09:51
CPC Classifications
H; H02; H02S; H02S50/00; H02S50/10; Y; Y02; Y02E; Y02E10/00; Y02E10/50
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
280 words
A method for determining the crystalline quality of a crystalline lattice of one material near an interface between said one material and a different material of different crystalline lattice, said one material (1) having a surface comprising an exposed surface portion opposed to said interface and an unexposed surface portion in coplanar relation with said exposed surface portion and opposed to said interface, (2) having negligible absorption in a given optical spectrum, and (3) having a known reflection coefficient at said exposed surface portion; said exposed surface portion having a semi-transparent electrode thereover and said unexposed surface portion having an ohmic contact thereto, comprising the steps of: (a) exposing said exposed surface portion to a light beam having a selected wavelength; (b) varying the intensity of said light beam to a value to be sufficient to saturate the trapping centers of said one material; (c) exposing said exposed surface portion to said light beam at said intensity and scanned sequentially with wavelengths having values within said optical spectrum whereby light reflected between said interface and said exposed surface portion oscillates in intensity between extrema as a result of interference reflections between said exposed surface portion and said interface manifesting a corresponding photovoltage signal oscillation; (d) measuring the photovoltage signals appearing between said exposed surface portion and said unexposed surface portion at each respective wavelength to obtain a series of photovoltage signals corresponding to each wavelength; (e) determining from said photovoltage signals the photovoltage extrema; and (f) determining from said photovoltage extrema the crystalline quality of said one material near said interface, the smaller the ratio of said photovoltage extrema the better the crystalline quality of said material near said interface.
Claim 2
Independent Claim
280 words
A method for determining the crystalline quality of a crystalline lattice of one material near an interface between said one material and a different material of different crystalline lattice, said one material (1) having a surface comprising an exposed surface portion opposed to said interface and an unexposed surface portion in coplanar relation with said exposed surface portion and opposed to said interface, (2) having negligible absorption in a given optical spectrum, and (3) having a known reflection coefficient at said exposed surface portion; said exposed surface portion having a semi-transparent electrode thereover and said unexposed surface portion having an ohmic contact thereto, comprising the steps of: (a) exposing said exposed surface portion to a light beam having a selected wavelength; (b) varying the intensity of said light beam to a value to be sufficient to saturate the trapping centers of said one material; (c) exposing said exposed surface portion to said light beam at said intensity and scanned sequentially with wavelengths having values within said optical spectrum whereby light reflected between said interface and said exposed surface portion oscillates in intensity between extrema as a result of interference reflections between said exposed surface portion and said interface manifesting a corresponding photovoltage signal oscillation; (d) measuring the photovoltage signals appearing between said exposed surface portion and said unexposed surface portion at each respective wavelength to obtain a series of photovoltage signals corresponding to each wavelength; (e) determining from said photovoltage signals the photovoltage extrema; and (f) determining from said photovoltage extrema the crystalline quality of said one material near said interface, the smaller the ratio of said photovoltage extrema the better the crystalline quality of said material near said interface.
Claim 3
Dependent Claim
25 words
The method of claim 1 comprising the step of selecting said one material to be essentially monocrystalline silicon and said different material to be sapphire.
Claim 4
Dependent Claim
29 words
The method according to claim 1 comprising the step of selecting the wavelength of said optical spectrum of light to be within the range of 0.5 to 1.0 micrometer.
Claim 5
Dependent Claim
27 words
The method according to claim 1 wherein the step of selecting the thickness of said one material to be on the order of 0.1 to 1.0 micrometer.
Claim 6
Dependent Claim
50 words
The method of claim 1 wherein said intensity varying step comprises sensing the light intensity of said light beam as a function of the photovoltage signal measured at said exposed surface portion, the deep trap saturation being manifested where the plot of said photovoltage versus said light intensity becomes linear.
Claim 7
Dependent Claim
54 words
The method of claim 1 wherein said photovoltage extrema is represented by the following relationship: ##EQU2## where V max and V min are the maximum and minimum photovoltage, p is an exponent that is proportional to the intensity of light and Δ is a parameter indicative of the crystalline quality of said one material.
Claim 8
Dependent Claim
25 words
The method of claim 6 wherein the value of p is selected to be substantially unity by saturating the deep traps of said one material.
Claim 9
Dependent Claim
23 words
The method of claim 1 wherein the ratio of the magnitude of the extrema increases as the thickness of said one material decreases.
Claim 10
Dependent Claim
28 words
The method of claim 1 wherein the larger the ratio of the magnitude of the extrema the poorer the crystalline quality of said one material near said interface.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-02-09 | 1990-08-11 | 1991-02-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-02-09 | 1994-08-11 | 1995-02-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-02-09 | 1998-08-11 | 1999-02-10 | $7700.00 | Window Closed / Lapsed |