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US4641961A Expired / Lapsed US ⏱️ 0.0 years remaining

Apparatus for measuring the optical characteristics of an optical system to be examined

Assignee: Nikon Corp
•
Filing: 1983-08-01
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Granted: 1987-02-10
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Expires: 2003-08-01
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Abstract

Abstract In an apparatus for measuring the optical characteristics of an optical system to be examined a light source determines a reference optical axis and generates a light beam that is passed through the optical system to be examined along the reference optical axis. A mask partly transmits the light beam therethrough and has a pattern comprising at least one straight line disposed off the reference optical axis in the light beam, the straight line of the pattern extending in a predetermined direction in a plane substantially orthogonal to the reference optical axis. A photosensitive detector receives the light beam passed through the optical system to be examined and the mask. The detector is fixedly disposed relative to the mask and has a substantial length in a direction substantially orthogonal to the reference optical axis and the straight line of the pattern. The detector produces an electrical signal indicative of the position of the pattern of the mask projected onto the detector in the direction of the length of the detector. A rotator provides relative rotation about the reference optical axis between the light beam passed through the optical system to be examined and the mask. A signal processor processes the electrical signal and finds the refractive characteristic of the optical system to be examined. -

Inventors

  • 👤 Kenji Yamada

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 22:15
CPC Classifications
G; G01; G01M; G01M11/00; G01M11/02; G01M11/0228; G01M11/0235

Claims Analysis

Total Claims: 32
Claim 1
Independent Claim 263 words
An apparatus for measuring the optical characteristics of an optical system to be examined, comprising: (a) beam supply means for determining a reference optical axis and generating a light beam passed through said optical system to be examined along said reference optical axis; (b) mask means for partly transmitting said light beam therethrough, said mask means having a pattern comprising at least one straight line disposed off said reference optical axis in said light beam, the straight line of said pattern extending in a predetermined direction in a plane substantially orthogonal to said reference optical axis; (c) photosensitive detector means for receiving the light beam passed through said optical system to be examined and said mask means, said detector means being fixedly disposed relative to said mask means and having a substantial length in a direction substantially orthogonal to said pattern, said detector means producing an electrical signal indicative of the position of the pattern of said mask means projected onto said detector means in the direction of the length of said detector means; (d) rotating means for providing relative rotation about said reference optical axis between said light beam passed through said optical system to be examined and said mask means; (e) means for processing said electrical signal and finding the refractive characteristic of said optical system to be examined; and (f) optical means provided between said mask means and said detector means for making said mask means and said detector means conjugate in a plane parallel to the direction of the straight line of said pattern and said reference optical axis.
Claim 2
Independent Claim 263 words
An apparatus for measuring the optical characteristics of an optical system to be examined, comprising: (a) beam supply means for determining a reference optical axis and generating a light beam passed through said optical system to be examined along said reference optical axis; (b) mask means for partly transmitting said light beam therethrough, said mask means having a pattern comprising at least one straight line disposed off said reference optical axis in said light beam, the straight line of said pattern extending in a predetermined direction in a plane substantially orthogonal to said reference optical axis; (c) photosensitive detector means for receiving the light beam passed through said optical system to be examined and said mask means, said detector means being fixedly disposed relative to said mask means and having a substantial length in a direction substantially orthogonal to said pattern, said detector means producing an electrical signal indicative of the position of the pattern of said mask means projected onto said detector means in the direction of the length of said detector means; (d) rotating means for providing relative rotation about said reference optical axis between said light beam passed through said optical system to be examined and said mask means; (e) means for processing said electrical signal and finding the refractive characteristic of said optical system to be examined; and (f) optical means provided between said mask means and said detector means for making said mask means and said detector means conjugate in a plane parallel to the direction of the straight line of said pattern and said reference optical axis.
Claim 3
Dependent Claim 21 words
An apparatus according to claim 1, wherein said optical means includes a cylindrical lens having a positive power in said plane.
Claim 4
Independent Claim 336 words
An apparatus for measuring the optical characteristics of an optical system to be examined, comprising: (a) beam supply means for determining a reference optical axis and generating a light beam passed through said optical system to be examined along said reference optical axis; (b) mask means for partly transmitting said light beam passed through said optical system to be examined, said mask means having a pattern comprising first and second straight lines which are parallel to each other and are disposed at opposite sides of said reference optical axis in said light beam, said first and second straight lines extending in a predetermined direction in a plane substantially orthogonal to said reference optical axis; (c) photosensitive detector means for receiving the light beam passed through said optical system to be examined and said mask means, said detector means being fixedly disposed relative to said mask means and having a substantial length in a direction substantially orthogonal to said reference optical axis and said predetermined direction, said detector means producing an electrical signal indicative of the respective positions of images of said first and second straight lines projected onto said detector means in the direction of the length of said detector means; (d) rotating means for providing relative rotation about said reference optical axis between said light beam passed through said optical system to be examined and said mask means; and (e) means for processing said electrical signal and finding the refractive characteristic of said optical system to be examined, wherein, if y 1 and y 2 represent coordinate positions of said images of said first and second straight lines on said detector means, said processing means determines the lens power of two main meridian directions of said optical system to be examined from the maximum value and minimum value of (y 1 -y 2 ) and determines the prism power of said optical system to be examined from the maximum value of (y 1 +y 2 )/2, respectively, during the relative rotation by said rotating means.
Claim 5
Independent Claim 336 words
An apparatus for measuring the optical characteristics of an optical system to be examined, comprising: (a) beam supply means for determining a reference optical axis and generating a light beam passed through said optical system to be examined along said reference optical axis; (b) mask means for partly transmitting said light beam passed through said optical system to be examined, said mask means having a pattern comprising first and second straight lines which are parallel to each other and are disposed at opposite sides of said reference optical axis in said light beam, said first and second straight lines extending in a predetermined direction in a plane substantially orthogonal to said reference optical axis; (c) photosensitive detector means for receiving the light beam passed through said optical system to be examined and said mask means, said detector means being fixedly disposed relative to said mask means and having a substantial length in a direction substantially orthogonal to said reference optical axis and said predetermined direction, said detector means producing an electrical signal indicative of the respective positions of images of said first and second straight lines projected onto said detector means in the direction of the length of said detector means; (d) rotating means for providing relative rotation about said reference optical axis between said light beam passed through said optical system to be examined and said mask means; and (e) means for processing said electrical signal and finding the refractive characteristic of said optical system to be examined, wherein, if y 1 and y 2 represent coordinate positions of said images of said first and second straight lines on said detector means, said processing means determines the lens power of two main meridian directions of said optical system to be examined from the maximum value and minimum value of (y 1 -y 2 ) and determines the prism power of said optical system to be examined from the maximum value of (y 1 +y 2 )/2, respectively, during the relative rotation by said rotating means.
Claim 6
Dependent Claim 81 words
An apparatus according to claim 3, wherein said processing means detects the degree of the relative rotation by said rotating means and determines the cylindrical axis of said optical system to be examined from the degree at which (y 1 -y 2 ) reaches one of the maximum and the minimum and determines the prism axis of said optical system to be examined from the degree at which (y 1 +y 2 )/2 reaches the maximum, respectively, during said relative rotation.
Claim 7
Dependent Claim 25 words
An apparatus according to claim 3, wherein said rotating means provides relative rotation of at least 180° between said light beam and said mask means.
Claim 8
Dependent Claim 21 words
An apparatus according to claim 3, wherein said first and second straight lines are disposed symmetrically about said reference optical axis.
Claim 9
Dependent Claim 28 words
An apparatus according to claim 6, wherein said mask means has a pattern further including a third straight line disposed adjacent and parallel to said first straight line.
Claim 10
Dependent Claim 35 words
An apparatus according to claim 3, wherein said mask means is formed by a combination of a light-transmitting area and a light-intercepting area formed in the same plane substantially orthogonal to said reference optical axis.
Claim 11
Dependent Claim 74 words
An apparatus according to claim 3, wherein said detector means is disposed in intersecting relationship with said reference optical axis and wherein said apparatus further comprises a projection lens disposed between said mask means and said detector means for causing the light beam passed through said mask means to be imaged at the point of intersection with said reference optical axis on said detector means when said optical system to be examined is absent.
Claim 12
Dependent Claim 110 words
An apparatus accord to claim 9, wherein said optical system to be examined is disposed between said beam supply means and said mask means and wherein said apparatus further comprises a relay lens having a positive power between said optical system to be examined and said mask means, said optical system to be examined and said mask means are disposed at positions substantially conjugate with respect to said relay lens, and said projection lens is disposed at a position where the rearward focus of said relay lens and the point of intersection with said reference optical axis on said detection means are substantially conjugate with respect to said projection lens.
Claim 13
Dependent Claim 64 words
An apparatus according to claim 10, wherein said rotating means includes prism means disposed near the rearward focus of said relay lens and causing said light beam to enter thereinto and reflecting it a plurality of times therein and thereafter causing it to emerge therefrom, and rotated about said reference optical axis to rotate said emerging light beam relative to the entering light beam.
Claim 14
Dependent Claim 51 words
An apparatus according to claim 3, further comprising optical means provided between said mask means and said detector means for making said mask means and said detector means conjugate in a plane parallel to the direction of said first and second straight lines of said pattern and said reference optical axis.
Claim 15
Dependent Claim 21 words
An apparatus according to claim 12, wherein said optical means includes a cylindrical lens having a positive power in said plane.
Claim 16
Independent Claim 360 words
An apparatus for measuring the optical characteristics of an optical system to be examined, comprising: (a) beam supply means for determining a reference optical axis and generating a light beam passed through said optical system to be examined along said reference optical axis; (b) mask means for partly transmitting said light beam passed through said optical system to be examined, said mask means having a pattern comprising a straight line disposed off said reference optical axis in said light beam, the straight line of said pattern extending in a predetermined direction in a plane substantially orthogonal to said reference optical axis; (c) photosensitive detector means for receiving the light beam passed through said optical system to be examined and said mask means, said detector means having a substantial length in a direction substantially orthogonal to said reference optical axis and the straight line of said pattern, said detector means producing an electrical signal indicative of the position of said straight line projected onto said detector means in the direction of the length of said detector means, said mask means and said detector means having first and second relative rotation positions displaced by 180° about said reference optical axis; (d) rotating means for providing relative rotation about said reference optical axis between said light beam passed through said optical system to be examined and said mask means, the projection image of said straight line being formed a coordinate position y 1 on said detector means at said first relative rotation position, and the projection image of said straight line being formed at a coordinate position y 2 on said detector means at said second relative rotation position; and (e) means for processing said electrical signal and finding the refractive characteristic of said optical system to be examined, said processing means determining the lens power of two main meridian directions of said optical system to be examined from the maximum value and the minimum value of (y 1 -y 2 ) and determining the prism power of said optical system to be examined from the maximum value of (y 1 -y 2 )/2, respectively, during said relative rotation by said rotating means.
Claim 17
Independent Claim 360 words
An apparatus for measuring the optical characteristics of an optical system to be examined, comprising: (a) beam supply means for determining a reference optical axis and generating a light beam passed through said optical system to be examined along said reference optical axis; (b) mask means for partly transmitting said light beam passed through said optical system to be examined, said mask means having a pattern comprising a straight line disposed off said reference optical axis in said light beam, the straight line of said pattern extending in a predetermined direction in a plane substantially orthogonal to said reference optical axis; (c) photosensitive detector means for receiving the light beam passed through said optical system to be examined and said mask means, said detector means having a substantial length in a direction substantially orthogonal to said reference optical axis and the straight line of said pattern, said detector means producing an electrical signal indicative of the position of said straight line projected onto said detector means in the direction of the length of said detector means, said mask means and said detector means having first and second relative rotation positions displaced by 180° about said reference optical axis; (d) rotating means for providing relative rotation about said reference optical axis between said light beam passed through said optical system to be examined and said mask means, the projection image of said straight line being formed a coordinate position y 1 on said detector means at said first relative rotation position, and the projection image of said straight line being formed at a coordinate position y 2 on said detector means at said second relative rotation position; and (e) means for processing said electrical signal and finding the refractive characteristic of said optical system to be examined, said processing means determining the lens power of two main meridian directions of said optical system to be examined from the maximum value and the minimum value of (y 1 -y 2 ) and determining the prism power of said optical system to be examined from the maximum value of (y 1 -y 2 )/2, respectively, during said relative rotation by said rotating means.
Claim 18
Dependent Claim 81 words
An apparatus according to claim 14, wherein said processing means detects the degree of the relative rotation by said rotating means and determines the cylindrical axis of said optical system to be examined from the degree at which (y 1 -y 2 ) reaches one of the maximum and the minimum and determines the prism axis of said optical system to be examined from the degree at which (y 1 +y 2 )/2 reaches the maximum, respectively, during said relative rotation.
Claim 19
Dependent Claim 25 words
An apparatus according to claim 14, wherein said rotating means provides relative rotation of at least 360° between said light beam and said mask means.
Claim 20
Dependent Claim 35 words
An apparatus according to claim 14, wherein said mask means is formed by a combination of a light-transmitting area and a light-intercepting area formed in the same plane substantially orthogonal to said reference optical axis.
Claim 21
Dependent Claim 74 words
An apparatus according to claim 14, wherein said detector means is disposed in intersecting relationship with said reference optical axis and wherein said apparatus further comprises a projection lens disposed between said mask means and said detector means for causing the light beam passed through said mask means to be imaged at the point of intersection with said reference optical axis on said detector means when said optical system to be examined is absent.
Claim 22
Dependent Claim 110 words
An apparatus according to claim 18, wherein said optical system to be examined is disposed between said beam supply means and said mask means and wherein said apparatus further comprises a relay lens having a positive power between said optical system to be examined and said mask means, said optical system to be examined and said mask means are disposed at positions substantially conjugate with respect to said relay lens, and said projection lens is disposed at a position where the rearward focus of said relay lens and the point of intersection with said reference optical axis on said detection means are substantially conjugate with respect to said projection lens.
Claim 23
Dependent Claim 64 words
An apparatus according to claim 19, wherein said rotating means includes prism means disposed near the rearward focus of said relay lens and causing said light beam to enter thereinto and reflecting it a plurality of times therein and thereafter causing it to emerge therefrom, and rotated about said reference optical axis to rotate said emerging light beam relative to the entering light beam.
Claim 24
Dependent Claim 48 words
An apparatus according to claim 14, further comprising optical means provided between said mask means and said detector means for making said mask means and said detector means conjugate in a plane parallel to the direction of the straight line of said pattern and said reference optical axis.
Claim 25
Dependent Claim 21 words
An apparatus according to claim 21, wherein said optical means includes a cylindrical lens having a positive power in said plane.
Claim 26
Independent Claim 197 words
An apparatus for measuring the optical characteristics of an optical system to be inspected, comprising: (a) a collimating optical system having an optical axis and a predetermined focal point and capable of converting a light beam diverging from said focal point into a parallel beam; (b) light generating means for selectively generating light from either one of at least two positions on the optical axis of said collimating optical system; (c) mask means positioned opposite to said light source means with respect to said collimating optical system, wherein said mask means comprises a pattern composed of light transmitting and opaque areas, said pattern having at least one straight line disposed off the optical axis of said collimating optical system; (d) means for placing said optical system to be inspected on the optical axis of said collimating optical system in such a manner as to guide light from said light generating means through said collimating optical system to said mask means; and (e) detection means with a photoreceptor plane used for detecting the intensity distribution on said photoreceptor plane, said detection means receiving the light beam passed through said optical system to be inspected and said mask means.
Claim 27
Independent Claim 197 words
An apparatus for measuring the optical characteristics of an optical system to be inspected, comprising: (a) a collimating optical system having an optical axis and a predetermined focal point and capable of converting a light beam diverging from said focal point into a parallel beam; (b) light generating means for selectively generating light from either one of at least two positions on the optical axis of said collimating optical system; (c) mask means positioned opposite to said light source means with respect to said collimating optical system, wherein said mask means comprises a pattern composed of light transmitting and opaque areas, said pattern having at least one straight line disposed off the optical axis of said collimating optical system; (d) means for placing said optical system to be inspected on the optical axis of said collimating optical system in such a manner as to guide light from said light generating means through said collimating optical system to said mask means; and (e) detection means with a photoreceptor plane used for detecting the intensity distribution on said photoreceptor plane, said detection means receiving the light beam passed through said optical system to be inspected and said mask means.
Claim 28
Dependent Claim 32 words
An apparatus according to claim 23, wherein said two positions are at opposite sides of said focal point and said light-generating means comprises a light source at each of said positions, respectively.
Claim 29
Dependent Claim 19 words
An apparatus according to claim 24, wherein said light-generating means comprises means for driving said two light sources selectively.
Claim 30
Dependent Claim 31 words
An apparatus according to claim 23, wherein said light-generating means comprises a first light source positioned at said focal point and a second light source positioned away from said focal point.
Claim 31
Dependent Claim 76 words
An apparatus according to claim 23, wherein said photoreceptor plane is fixedly disposed relative to said mask means and has a substantial length in a direction substantially orthogonal to said axis of said collimating optical system and the straight line of said pattern, said detection means producing an electrical signal indicative of the position of the pattern of said mask means projected onto said photoreceptor plane in the direction of the length of said photoreceptor plane.
Claim 32
Dependent Claim 57 words
An apparatus according to claim 27, further comprising rotating means for providing relative rotation about said axis of said collimating optical system between said light beam passed through said optical system to be inspected and said mask means; and means for processing said electrical signal and finding the refractive characteristic of said optical system to be inspected.

References Cited (Backward Citations)

US2640392A Cited
US4410268A Cited
EP0059480A1 Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1990-02-09 1990-08-11 1991-02-10 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1994-02-09 1994-08-11 1995-02-10 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1998-02-09 1998-08-11 1999-02-10 $7700.00 Window Closed / Lapsed

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