US4628991A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer scale integrated circuit testing chuck
Assignee: Intel Corp
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Filing: 1984-11-26
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Granted: 1986-12-16
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Expires: 2004-11-26
Abstract
Abstract A testing chuck for providing a thermally controlled mounting for wafer scale integrated circuits includes a body having a flat upper surface, upon which the integrated circuit is mounted, cooled or heated by a fluid flowing through a number of channels formed in the body. The channels have entrance and exit ends fluidly connected to first entrance and exit plenums. Second entrance and exit plenums are connected to the first entrance and exit plenums by a number of entrance and exit distribution conduits. Fluid is pumped into the second entrance plenum, through the entrance distribution conduits, through the first entrance plenum and into the entrance ends of the channels. After passing through the channels, the fluid flows through the first exit plenum, exit distribution conduits and second exit plenum. The entrance and exit plenums are curved in the direction of fluid flow to reduce stagnant regions within the plenums to aid heat transfer and draining of the chuck. The use of two plenums coupled by appropriately sized and positioned distribution conduits at both ends of the channels ensures that the proper amount of fluid flows through each channel.
Inventors
- 👤 Wen-Ting Hsiao
- 👤 Hubertus A. Everling
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 14:46
CPC Classifications
B; B23; B23Q; B23Q11/00; B23Q11/12; B23Q11/126; G; G01; G01R; G01R31/00; G01R31/28; G01R31/2851; G01R31/2886; G01R31/2891
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
167 words
A heat sink for cooling a semiconductor device mounted thereto comprising: a heat sink body having a flat upper surface upon which the semiconductor device is mounted; said body defining a plurality of straight channels therein, the channels oriented parallel to the upper surface and having entrance and exit ends; entrance and exit distribution networks fluidly coupled to the entrance and exit ends, said entrance and exit distribution networks arranged and adapted to achieve a desired flow of a fluid through the channels, said entrance distribution network comprising: a first entrance plenum formed in said heat sink body and fluidly coupled to said entrance ends of said channels for distribution of the fluid to said channels; a second entrance plenum formed in said heat sink body; and a plurality of entrance distribution conduits fluidly coupling said first entrance plenum with said second entrance plenum; and first means for directing the fluid to said second entrance plenum; second means for directing the fluid from said exit distribution network.
Claim 2
Dependent Claim
167 words
A heat sink for cooling a semiconductor device mounted thereto comprising: a heat sink body having a flat upper surface upon which the semiconductor device is mounted; said body defining a plurality of straight channels therein, the channels oriented parallel to the upper surface and having entrance and exit ends; entrance and exit distribution networks fluidly coupled to the entrance and exit ends, said entrance and exit distribution networks arranged and adapted to achieve a desired flow of a fluid through the channels, said entrance distribution network comprising: a first entrance plenum formed in said heat sink body and fluidly coupled to said entrance ends of said channels for distribution of the fluid to said channels; a second entrance plenum formed in said heat sink body; and a plurality of entrance distribution conduits fluidly coupling said first entrance plenum with said second entrance plenum; and first means for directing the fluid to said second entrance plenum; second means for directing the fluid from said exit distribution network.
Claim 3
Dependent Claim
45 words
The heat sink of claim 1 wherein said exit distribution network includes: a first exit plenum fluidly coupled to said channels exit ends; a second exit plenum; and a plurality of exit distribution conduits fluidly coupling said first exit plenum with said second exit plenum.
Claim 4
Dependent Claim
32 words
The heat sink of claim 2 wherein said first and second entrance and exit plenums are arcuately curved in the direction of fluid flow to substantially eliminate stagnant regions within said plenums.
Claim 5
Dependent Claim
67 words
The heat sink of claim 2 wherein said heat sink body further comprises: a cover defining said flat upper surface; a distribution plate underlying said cover, said distribution plate and said cover defining said channels and said first entrance and exit plenums; and wherein said entrance and exit distribution conduits fluidly connect a lower surface of said distribution plate to said first entrance and exit plenums respectively.
Claim 6
Dependent Claim
69 words
The heat sink of claim 4 wherein said cover includes: a generally planar first member having spaced apart fingers substantially defining said channels on one side and a mounting surface on the opposite side; a generally planar shim member mounted to said mounting surface; and said shim member having a high thermal conductivity relative to said cover and distribution plate so said heat sink is useful during burn-in testing.
Claim 7
Dependent Claim
21 words
The heat sink of claim 5 wherein said shim member is copper and said cover and distribution plate are stainless steel.
Claim 8
Dependent Claim
45 words
The heat sink of claim 4 wherein said heat sink body further comprises a base defining said first and second directing means, and wherein an upper surface of said base and the lower surface of said distribution plate define said second entrance and exit plenums.
Claim 9
Dependent Claim
18 words
The heat sink of claim 1 wherein said channels underlie a substantial portion of said flat upper surface.
Claim 10
Dependent Claim
20 words
The heat sink of claim 1 wherein said entrance distribution conduits are positioned at unequal intervals relative to one another.
Claim 11
Dependent Claim
16 words
The heat sink of claim 1 wherein said second entrance plenum underlies said entrance distribution conduits.
Claim 12
Dependent Claim
21 words
The heat sink of claim 1 wherein at least a portion of said first directing means underlies said second entrance plenum.
Claim 13
Dependent Claim
13 words
The heat sink of claim 1 wherein said heat sink body is copper.
Claim 14
Dependent Claim
214 words
A wafer scale integrated circuit testing cooling chuck for providing a thermally controlled mount for the integrated circuit during testing, the chuck comprising: a cover defining a flat upper surface upon which the integrated circuit is mounted; a distribution plate underlying said cover, said distribution plate and said cover defining a plurality of channels, said channels having entrance and exit ends; said distribution plate partially defining first entrance and exit plenums underlying the entrance and exit ends of the channels; a base underlying said distribution plate, an upper surface of said base and a lower surface of said distribution plate defining a second entrance plenum and a second exit plenum, said second entrance and exit plenums being disposed directly below said first entrance and exit plenums; entrance distribution conduits formed through said distribution plate at unequal intervals and fluidly connecting said first and second entrance plenums; exit distribution conduits formed through said distribution plate at unequal intervals and fluidly connecting said first and second exit conduits; said first and second entrance and exit plenums being arcuately configured in the direction of flow of a fluid to substantially eliminate stagnant regions within said plenums; means for directing the fluid to said second entrance plenum; and means for directing the fluid from said second exit plenum.
Claim 15
Dependent Claim
214 words
A wafer scale integrated circuit testing cooling chuck for providing a thermally controlled mount for the integrated circuit during testing, the chuck comprising: a cover defining a flat upper surface upon which the integrated circuit is mounted; a distribution plate underlying said cover, said distribution plate and said cover defining a plurality of channels, said channels having entrance and exit ends; said distribution plate partially defining first entrance and exit plenums underlying the entrance and exit ends of the channels; a base underlying said distribution plate, an upper surface of said base and a lower surface of said distribution plate defining a second entrance plenum and a second exit plenum, said second entrance and exit plenums being disposed directly below said first entrance and exit plenums; entrance distribution conduits formed through said distribution plate at unequal intervals and fluidly connecting said first and second entrance plenums; exit distribution conduits formed through said distribution plate at unequal intervals and fluidly connecting said first and second exit conduits; said first and second entrance and exit plenums being arcuately configured in the direction of flow of a fluid to substantially eliminate stagnant regions within said plenums; means for directing the fluid to said second entrance plenum; and means for directing the fluid from said second exit plenum.
References Cited (Backward Citations)
DE28239C
Cited
NL91449C
Cited
US416244A
Cited
US1307812A
Cited
CA484273A
Cited
DE147478C
Cited
US2699325A
Cited
US3361195A
Cited
US3768551A
Cited
US3708223A
Cited
US3828606A
Cited
US4282924A
Cited
US4390997A
Cited
US4345643A
Cited
US4386505A
Cited
US4512391A
Cited
US4491173A
Cited
US4489570A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-12-15 | 1990-06-16 | 1990-12-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-12-15 | 1994-06-16 | 1994-12-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-12-15 | 1998-06-16 | 1998-12-16 | $7700.00 | Window Closed / Lapsed |