US4618261A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Optical gap measuring
Assignee: Massachusetts Institute of Technology
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Filing: 1984-01-16
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Granted: 1986-10-21
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Expires: 2004-01-16
Abstract
Abstract A lens or fiberoptic cable focuses energy from a collimated helium neon laser beam upon a point on a mask. Some of the focused energy is reflected from the mask upon a photodetector array in an image plane, and some of this energy is reflected from a substrate closely adjacent to the mask after passing through the mask upon the photodetector array to produce an interference pattern that is sensed and characterized by a spatial frequency representative of the distance between the mask and substrate.
Inventors
- 👤 Dale C. Flanders
- 👤 Theodore M. Lyszczarz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 08:38
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7003; G03F9/7023; G03F9/7026; G01; G01B; G01B11/00; G01B11/14; G03F9/7049
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
106 words
Gap measuring apparatus for indicating the gap between a mask and substrate comprising, said mask, said substrate, a source of collimated optical energy, means for focusing said optical energy upon said mask and directing some of said optical energy through said mask upon said substrate, imaging means for receiving said optical energy reflected from said mask and from said substrate through said mask, some of the focused energy being reflected from said mask and some from said substrate after passing through said mask to form an interference pattern on said imaging means of spatial frequency representative of the gap distance between said substrate and said mask.
Claim 2
Dependent Claim
106 words
Gap measuring apparatus for indicating the gap between a mask and substrate comprising, said mask, said substrate, a source of collimated optical energy, means for focusing said optical energy upon said mask and directing some of said optical energy through said mask upon said substrate, imaging means for receiving said optical energy reflected from said mask and from said substrate through said mask, some of the focused energy being reflected from said mask and some from said substrate after passing through said mask to form an interference pattern on said imaging means of spatial frequency representative of the gap distance between said substrate and said mask.
Claim 3
Dependent Claim
32 words
Gap measuring apparatus in accordance with claim 1 wherein said source of a collimated beam is a laser with the collimated beam axis generally parallel to the plane of said imaging means.
Claim 4
Dependent Claim
16 words
Gap measuring apparatus in accordance with claim 1 wherein said gap is less than 500 microns.
Claim 5
Dependent Claim
16 words
Gap measuring apparatus in accordance with claim 2 wherein said gap is less than 500 microns.
Claim 6
Independent Claim
123 words
A method of providing an indication of the distance between a mask and a substrate which method includes the steps of, focusing a collimated beam of optical energy upon said mask and directing some of said optical energy through said mask upon said substrate to reflect some of the focused energy from said mask and some of the focused energy from said substrate after transmission through said mask to produce in an image plane an interference pattern between the energy reflected from said mask and the energy reflected from said substrate through said mask representative of the gap distance between said substrate and said mask, and sensing the interference pattern produced in said image plane to obtain an indication of said gap distance.
Claim 7
Independent Claim
123 words
A method of providing an indication of the distance between a mask and a substrate which method includes the steps of, focusing a collimated beam of optical energy upon said mask and directing some of said optical energy through said mask upon said substrate to reflect some of the focused energy from said mask and some of the focused energy from said substrate after transmission through said mask to produce in an image plane an interference pattern between the energy reflected from said mask and the energy reflected from said substrate through said mask representative of the gap distance between said substrate and said mask, and sensing the interference pattern produced in said image plane to obtain an indication of said gap distance.
Claim 8
Dependent Claim
33 words
Gap measuring apparatus in accordance with claim 2 wherein said source of a collimated beam further comprises optical fiber means adjacent to said mask for coupling energy from said laser to said mask.
Claim 9
Dependent Claim
43 words
Gap measuring apparatus in accordance with claim 6 wherein said optical fiber means comprises a single mode optical fiber having a lower index portion separating high index portions and having an end section circumferentially surrounded by absorber means for attenuating unwanted cladding modes.
Claim 10
Dependent Claim
35 words
Gap measuring apparatus in accordance with claim 7 wherein the end of said optical fiber means adjacent said mask is formed with a flat end face perpendicular to the axis of said optical fiber means.
Claim 11
Dependent Claim
47 words
Gap measuring apparatus in accordance with claim 1 wherein said imaging means comprises photoelectric transducing means for providing a video signal representative of said interference pattern on said imaging means, and processing means responsive to said video signal for providing a signal representative of said spatial frequency.
Claim 12
Dependent Claim
62 words
Gap measuring apparatus in accordance with claim 9 wherein said processing means comprises, a source of a set of correlating signals each representative of a spatial frequency within an expected range, means for crosscorrelating said correlating signals with said video signal to provide a correlation signal having a peak when crosscorrelated with a correlating signal in that set of that spatial frequency.
Claim 13
Dependent Claim
76 words
Gap measuring apparatus in accordance with claim 10 wherein said set of correlating signals includes a set of pairs of correlating signals in time quadrature, and said correlating means includes sine and cosine channels for correlating said video signal with respective ones of said correlating signals in each pair to produce sine and cosine correlated signals, and means for combining said sine and cosine correlated signals to provide an output signal representative of the correlation magnitude.
Claim 14
Dependent Claim
77 words
Gap measuring apparatus in accordance with claim 11 wherein each of said correlating channels comprises, multiplying means for multiplying said video signal with a respective one of said correlating signals in a pair, integrating means for integrating the output signal provided by said multiplying means, and squaring means for squaring the output signal provided by said integrating means, and said correlating means further comprises square rooting means for square rooting the signal provided by said combining means.
Claim 15
Dependent Claim
42 words
Gap measuring apparatus in accordance with claim 12 and further comprising, means for sensing the ratio of the signals provided by said integrating means for providing a signal representative of the relative phase of the signals in said sine and cosine channels.
References Cited (Backward Citations)
US4072423A
Cited
US4352565A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-10-20 | 1990-04-21 | 1990-10-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-10-20 | 1994-04-21 | 1994-10-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-10-20 | 1998-04-21 | 1998-10-21 | $7700.00 | Window Closed / Lapsed |