US4617469A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Exposure apparatus with detecting means insertable into an exposure path
Assignee: Canon Inc
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Filing: 1983-11-16
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Granted: 1986-10-14
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Expires: 2003-11-16
Abstract
Abstract An exposure apparatus for aligning an original, having at least one alignment mark thereon, and radiation sensitive member, having at least one alignment mark thereon and adapted to receive the image of the original, with each other includes a first detecting device including a sensor retractable from the optical path of a light for illuminating the original, the sensor being adapted to sense the original and radiation sensitive member to detect a relative displacement (degree of misalignment) between the original and radiation sensitive member when the sensor is in the optical path; a second detecting device including a sensor set out of the optical path and adapted to detect the position of one of the original and radiation sensitive member in the absolute coordinates of the apparatus; and a driving mechanism for moving one of the original and radiation sensitive member in response to the output of the second detecting device to correct the above mentioned displacement.
Inventors
- 👤 Kazuo Takahashi
- 👤 Hiroshi Sato
- 👤 Masao Kosugi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 01:22
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; H; H10; H10P; H10P95/00
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
161 words
An alignment apparatus for aligning an original and a photosensitive member, said apparatus comprising: means for exposing the photosensitive member to an image of the original through an exposure optical path extending between the original and the photosensitive member; first detecting means mounted for insertion into and retraction from the exposure optical path, said first detecting means being capable of detecting positional deviation between the original and the photosensitive member when inserted in the exposure optical path; second detecting means disposed out of the exposure optical path to detect a change in the position of at least one of the original and the photosensitive member and for producing an output representing said change in position; and means for correcting positional deviation between the original and the photosensitive member in accordance with the positional deviation detected by said first detecting means, said correcting means confirming the correction of the positional deviation on the basis of the output of said second detecting means.
Claim 2
Dependent Claim
161 words
An alignment apparatus for aligning an original and a photosensitive member, said apparatus comprising: means for exposing the photosensitive member to an image of the original through an exposure optical path extending between the original and the photosensitive member; first detecting means mounted for insertion into and retraction from the exposure optical path, said first detecting means being capable of detecting positional deviation between the original and the photosensitive member when inserted in the exposure optical path; second detecting means disposed out of the exposure optical path to detect a change in the position of at least one of the original and the photosensitive member and for producing an output representing said change in position; and means for correcting positional deviation between the original and the photosensitive member in accordance with the positional deviation detected by said first detecting means, said correcting means confirming the correction of the positional deviation on the basis of the output of said second detecting means.
Claim 3
Dependent Claim
19 words
An apparatus according to claim 1, wherein said exposure means projects images of the original on the photosensitive member.
Claim 4
Dependent Claim
34 words
An apparatus according to claim 2, wherein said exposure means includes an image projection optical system for projecting a plurality of the images of the originals onto the photosensitive member at a reduced magnification.
Claim 5
Dependent Claim
26 words
An apparatus according to claim 1, wherein said first detecting means is retracted from the exposure optical path when said correcting means corrects the positional deviation.
Claim 6
Independent Claim
23 words
An apparatus according to any one of claims 1 to 4 wherein said correcting means corrects the positional deviation by moving the original.
Claim 7
Dependent Claim
31 words
An apparatus according to claim 1, wherein said second detecting means includes an observation optical system for observing a mark formed on the original and a mark formed on the apparatus.
Claim 8
Dependent Claim
58 words
An apparatus according to claim 6, wherein said first detecting means includes an observation optical system for observing a first mark formed on the original and a mark formed on the wafer, and said second detecting means includes an observation optical system for observing a second mark formed on the original and a mark formed on the apparatus.
Claim 9
Dependent Claim
29 words
An apparatus according to claim 6, wherein said second detecting means is mounted for insertion from a set position outside the exposure optical path into the exposure optical path.
Claim 10
Dependent Claim
19 words
An apparatus according to claim 1, wherein said correcting means corrects the positional deviation by moving the photosensitive member.
Claim 11
Dependent Claim
22 words
An apparatus according to claim 9, wherein said second detecting means includes at least one of a scale and a laser interferometer.
Claim 12
Dependent Claim
157 words
An alignment for aligning an original on a photosensitive member, said method comprising the steps of: first detecting a positional deviation between the original and the photosensitive member with first detecting means disposed in an exposure optical path through which the photosensitive member is exposed to an image of the original and extending between the original and photosensitive member; moving said first detecting means out of the exposure path after the positional deviation is detected; second detecting a change in the position of at least one of the original and the photosensitive member with a second detecting means disposed out of the exposure path; correcting for the deviation detected by said first detecting means by moving at least one of the original and the photosensitive member while confirming the position thereof with said second detecting step; and exposing the photosensitive member to an image on the original through the exposure path after the positional deviation is corrected.
Claim 13
Dependent Claim
157 words
An alignment for aligning an original on a photosensitive member, said method comprising the steps of: first detecting a positional deviation between the original and the photosensitive member with first detecting means disposed in an exposure optical path through which the photosensitive member is exposed to an image of the original and extending between the original and photosensitive member; moving said first detecting means out of the exposure path after the positional deviation is detected; second detecting a change in the position of at least one of the original and the photosensitive member with a second detecting means disposed out of the exposure path; correcting for the deviation detected by said first detecting means by moving at least one of the original and the photosensitive member while confirming the position thereof with said second detecting step; and exposing the photosensitive member to an image on the original through the exposure path after the positional deviation is corrected.
Claim 14
Dependent Claim
24 words
A method according to claim 11, further comprising the step of moving the photosensitive member relative to the original after completion of the exposure.
Claim 15
Dependent Claim
25 words
A method according to claim 12, wherein said exposing step comprises projecting the image of the original on the photosensitive member through the exposure path.
Claim 16
Dependent Claim
27 words
A method according to claim 11, wherein said moving step comprises retracting said first detecting means from the exposure path while the positional deviation is being corrected.
Claim 17
Dependent Claim
29 words
A method according to claim 11, wherein said first detecting step is performed by detecting a mark formed on the original and a mark formed on the photosensitive member.
Claim 18
Independent Claim
18 words
A method according to any one of claims 11 to 15, wherein correcting step comprises moving the original.
Claim 19
Dependent Claim
37 words
A method according to claim 16, wherein said second detecting step is performed on the basis of a mark formed on the original and a mark formed on an apparatus for performing the alignment of said method.
Claim 20
Dependent Claim
17 words
A method according to claim 11, wherein said correcting step is preformed by moving the photosensitive member.
Claim 21
Dependent Claim
24 words
A method according to claim 18, wherein said second detecting step is preformed using at least one of a scale and a laser interferometer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-10-13 | 1990-04-14 | 1990-10-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-10-13 | 1994-04-14 | 1994-10-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-10-13 | 1998-04-14 | 1998-10-14 | $7700.00 | Window Closed / Lapsed |