US4615908A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for the manufacture of plasma-polymer multilayer capacitors
Assignee: Siemens AG
•
Filing: 1985-09-18
•
Granted: 1986-10-07
•
Expires: 2005-09-18
Abstract
Abstract A method for the manufacture of electrical plasma-polymer multilayer capacitors wherein alternate layers of thin metal conductors and dielectric layers produced by radiation polymerization are deposited on a substrate, after which the portions of the metal layers to which electrical contact is to be made are etched, preferably by sputter etching, to remove oxides therefrom. Then, contact layers are applied to the opposite end faces of the substrate to provide electrical connections for the portions of the metal layers which have been etched, the contact layers consisting of the sequence (1) an aluminum layer, (2) a nickel layer, and (3) a palladium layer.
Inventors
- 👤 Reinhard Behn
- 👤 Rudolf Wittmann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 00:50
CPC Classifications
H; H01; H01G; H01G4/00; H01G4/002; H01G4/228; H01G4/232; H01G4/2325
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
93 words
A method for the manufacture of electrical plasmapolymer multilayer capacitors which includes the steps of: depositing alternate layers of metal conductors and dielectric layers produced by radiation polymerization on a substrate, etching the portions of said metal layers to which electrical contact is to be made to remove oxide layers therefrom, and applying contact layers to opposite end faces of said substrate to provide electrical connections for said portions of said metal layer, said contact layers consisting of the sequence: (1) an aluminum layer, (2) a nickel layer, and (3) a palladium layer.
Claim 2
Independent Claim
93 words
A method for the manufacture of electrical plasmapolymer multilayer capacitors which includes the steps of: depositing alternate layers of metal conductors and dielectric layers produced by radiation polymerization on a substrate, etching the portions of said metal layers to which electrical contact is to be made to remove oxide layers therefrom, and applying contact layers to opposite end faces of said substrate to provide electrical connections for said portions of said metal layer, said contact layers consisting of the sequence: (1) an aluminum layer, (2) a nickel layer, and (3) a palladium layer.
Claim 3
Dependent Claim
14 words
A method according to claim 1 in which said etching consists of sputter etching.
Claim 4
Dependent Claim
14 words
A method according to claim 1 wherein said aluminum layer is applied by sputtering.
Claim 5
Dependent Claim
15 words
A method according to claim 1 wherein said aluminum layer is applied by vapor deposition.
Claim 6
Dependent Claim
39 words
A method according to claim 1 wherein said aluminum layer and said nickel layer are each deposited to a thickness of at least 0.3 micron and said palladium layer is deposited to a thickness of at least 0.09 micron.
Claim 7
Dependent Claim
24 words
A method according to claim 5 wherein the total thickness of said aluminum, nickel and palladium layers is not in excess of 1 micron.
Claim 8
Dependent Claim
14 words
A method according to claim 6 wherein said total thickness is about 0.7 micron.
Claim 9
Dependent Claim
22 words
A method according to claim 1 wherein said aluminum layer contains from 1 to 10 weight percent of copper, magnesium, or silicon.
References Cited (Backward Citations)
US3476531A
Cited
US3757177A
Cited
DE2359432A1
Cited
DE2513509A1
Cited
US3988651A
Cited
GB2036087A
Cited
EP0041679A2
Cited
US4482931A
Cited
GB2106714A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-10-06 | 1990-04-07 | 1990-10-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-10-06 | 1994-04-07 | 1994-10-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-10-06 | 1998-04-07 | 1998-10-07 | $7700.00 | Window Closed / Lapsed |