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US4611745A Expired / Lapsed US ⏱️ 0.0 years remaining

Method for preparing highly heat-conductive substrate and copper wiring sheet usable in the same

Assignee: Toshiba Corp
•
Filing: 1985-01-29
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Granted: 1986-09-16
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Expires: 2005-01-29
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Abstract

Abstract A method for preparing a highly heat conductive substrate which comprises interposing an active layer with a thickness of 0.5 to 10 μm comprising silver (Ag) and an active metal selected from the group consisting of titanium, zirconium and hafnium, and also copper (Cu) optionally, between an aluminium nitride (AlN) substrate and a copper member; and joining said aluminium nitride (AlN) substrate and said copper (Cu) member with each other by heating. A copper wiring sheet comprising the above active layer is also usable in the method.

Inventors

  • 👤 Masako Nakahashi
  • 👤 Makoto Shirokane
  • 👤 Tatsuo Yamazaki
  • 👤 Hisashi Yoshino
  • 👤 Akio Hori
  • 👤 Hiromitsu Takeda

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 03:30
CPC Classifications
C; C04; C04B; C04B35/00; C04B35/622; C04B35/64; C04B35/645; B; B23; B23K; B23K35/00; B23K35/22; B23K35/24; B23K35/26; B23K35/268; B32; B32B; B32B15/00; B32B15/01; B32B15/018; C04B37/00; C04B37/02; C04B37/023; C04B37/026; C22; C22C; C22C11/00; C22C11/06; C22C14/00; C22C5/00; C22C5/06; C22C9/00; H; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K3/00; H05K3/38; H10; H10W; H10W40/00; H10W40/01; H10W40/03; H10W40/037; H10W40/20; H10W40/25; H10W40/255; H10W70/00; H10W70/01; H10W70/02; H10W70/60; H10W70/67; H10W70/68; H10W70/6875; H10W72/00; H10W72/30; H10W99/00; B32B15/02; B32B15/20; B32B2250/00; B32B2250/44; B32B2255/00; B32B2255/20; B32B2255/205; B32B2307/00; B32B2307/30; B32B2307/302; B32B2307/304; B32B2307/70; B32B2307/732; B32B2457/00; B32B2457/14; B32B3/00; B32B3/10; B32B9/00; B32B9/005; B32B9/04; B32B9/041; C04B2235/00; C04B2235/65; C04B2235/658; C04B2235/6581; C04B2237/00; C04B2237/02; C04B2237/12; C04B2237/122; C04B2237/125; C04B2237/126; C04B2237/127; C04B2237/30; C04B2237/32; C04B2237/36; C04B2237/366; C04B2237/40; C04B2237/407; C04B2237/50; C04B2237/62; C04B2237/70; C04B2237/708; C04B2237/72; C04B2237/76; C04B2237/86

Claims Analysis

Total Claims: 13
Claim 1
Independent Claim 63 words
A method for preparing a highly heat conductive substrate which comprises interposing an active layer with a thickness of 0.5 to 10 μm comprising silver and an active metal selected from the group consisting of titanium, zirconium and hafnium, between an aluminium nitride substrate and a copper member; and joining said aluminium nitride substrate and said copper member with each other by heating.
Claim 2
Independent Claim 63 words
A method for preparing a highly heat conductive substrate which comprises interposing an active layer with a thickness of 0.5 to 10 μm comprising silver and an active metal selected from the group consisting of titanium, zirconium and hafnium, between an aluminium nitride substrate and a copper member; and joining said aluminium nitride substrate and said copper member with each other by heating.
Claim 3
Dependent Claim 37 words
The method according to claim 1, wherein said active layer comprises a silver layer with a thickness of 0.2 to 9 μm, and a layer of said active metal with a thickness of 0.1 to 5 μm.
Claim 4
Dependent Claim 13 words
The method according to claim 2, wherein said active metal layer comprises titanium.
Claim 5
Dependent Claim 51 words
The method according to claim 1, wherein a Cu wiring sheet having said active layer provided on the surface of said copper member is joined to said aluminuim nitride substrate in such a manner so that the active layer on the copper member may be in contact with the AlN substrate.
Claim 6
Dependent Claim 37 words
The method according to claim 4, wherein said active layer comprises a silver layer with a thickness of 0.2 to 9 μm, and a layer of said active metal with a thickness of 0.1 to 5 μm.
Claim 7
Dependent Claim 13 words
The method according to claim 5, wherein said active metal layer comprises titanium.
Claim 8
Dependent Claim 13 words
The method according to claim 1, wherein said active metal further comprises copper.
Claim 9
Dependent Claim 20 words
The method according to claim 7, wherein said active metal comprises a copper layer having a thickness of ≦9 μm.
Claim 10
Dependent Claim 23 words
The method according to claim 1, wherein said interposing step comprises sputtering said silver and said active metal onto said aluminum nitride substrate.
Claim 11
Dependent Claim 24 words
The method according to claim 1, wherein said interposing step comprises vacuum evaporating said silver and said active metal onto said aluminum nitride substrate.
Claim 12
Dependent Claim 22 words
The method according to claim 1, wherein said interposing step comprises sputtering said silver and said active metal onto said copper member.
Claim 13
Dependent Claim 23 words
The method according to claim 1, wherein said interposing step comprises vacuum evaporating said silver and said active metal onto said copper member.

References Cited (Backward Citations)

US3609471A Cited
DE2534777A1 Cited
JPS5696784A Cited
JPS56163093A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1989-09-15 1990-03-17 1990-09-16 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1993-09-15 1994-03-17 1994-09-16 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1997-09-15 1998-03-17 1998-09-16 $7700.00 Window Closed / Lapsed

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