US4611467A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for throttling gas flow to a cryopump
Assignee: Azenta Inc
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Filing: 1985-06-10
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Granted: 1986-09-16
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Expires: 2005-06-10
Abstract
Abstract Orifices in a cooled plate throttle gases entering a cryopump. Selected orifices are closed by removable closures such as spring clips to allow the throttling to be varied.
Inventors
- 👤 John F. Peterson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 15:56
CPC Classifications
F; F04; F04B; F04B37/00; F04B37/06; F04B37/08; Y; Y10; Y10S; Y10S417/00; Y10S417/901
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
78 words
A cryopump comprising a cold first stage and a colder second stage, a second stage cryopanel, a radiation shield surrounding the second stage and a first stage orifice plate closing the radiation shield, the orifice plate having a plurality or orifices therein for allowing restricted flow of gas into the radiation shield to the second stage cryopanel, at least one of the orifices being closed by a removable closure secured to the orifice plate at the closed orifice.
Claim 2
Dependent Claim
78 words
A cryopump comprising a cold first stage and a colder second stage, a second stage cryopanel, a radiation shield surrounding the second stage and a first stage orifice plate closing the radiation shield, the orifice plate having a plurality or orifices therein for allowing restricted flow of gas into the radiation shield to the second stage cryopanel, at least one of the orifices being closed by a removable closure secured to the orifice plate at the closed orifice.
Claim 3
Dependent Claim
14 words
A cryopump as claimed in claim 1 wherein the closure is a spring clip.
Claim 4
Dependent Claim
56 words
A cryopump as claimed in claim 2 wherein the orifices are circular and the closure comprises a circular plate having bent spring legs extending generally normal thereto which legs press outwardly against the edge of a circular orifice to secure the closure plate against the orifice plate after the spring legs are forced into the orifice.
Claim 5
Dependent Claim
27 words
A cryopump as claimed in claim 1 wherein a plurality of orifices are closed by closures independently secured to the orifice plate at the respective closed orifices.
Claim 6
Independent Claim
62 words
A method of regulating flow of gas into a cryopump comprising providing an orifice plate at the inlet to the cryopump, the orifice plate having a plurality of orifices therein, selectively closing one of more orifices in the orifice plate by means of removable closures individually secured to the orifice plate, and thereafter cooling the cryopump, including the orifice plate and closures.
Claim 7
Independent Claim
62 words
A method of regulating flow of gas into a cryopump comprising providing an orifice plate at the inlet to the cryopump, the orifice plate having a plurality of orifices therein, selectively closing one of more orifices in the orifice plate by means of removable closures individually secured to the orifice plate, and thereafter cooling the cryopump, including the orifice plate and closures.
Claim 8
Dependent Claim
13 words
A method as claimed in claim 5 wherein the closures are spring clips.
Claim 9
Dependent Claim
56 words
A method as claimed in claim 6 wherein the orifices are circular and each closure comprises a circular plate having bent spring legs extending generally normal thereto, which legs press outwardly against the edge of a circular orifice to secure the closure plate against the orifice plate after the spring legs are formed into the orifice.
References Cited (Backward Citations)
US4285710A
Cited
US4449373A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-09-15 | 1990-03-17 | 1990-09-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-09-15 | 1994-03-17 | 1994-09-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-09-15 | 1998-03-17 | 1998-09-16 | $7700.00 | Window Closed / Lapsed |