US4610771A
Expired / Lapsed
US
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Sputtered films of metal alloy oxides and method of preparation thereof
Assignee: PPG Industries Ohio Inc
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Filing: 1984-10-29
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Granted: 1986-09-09
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Expires: 2004-10-29
Abstract
Abstract A metal alloy oxide film and sputtering method for its production are disclosed, as well as a high transmittance, low emissivity coated product employing said metal alloy oxide film as an antireflective film in combination with a metallic film such as silver.
Inventors
- 👤 F. Howard Gillery
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 07:34
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/34; C03C17/36; C03C17/3602; C03C17/3613; C03C17/3618; C03C17/3644; C03C17/3652; C03C17/3657; C03C17/366; C03C17/3681; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/14; C23C14/18; G; G02; G02B; G02B1/00; G02B1/10; G02B1/11; G02B1/113; G02B1/115; G02B1/116; G02B5/00; G02B5/20; G02B5/208; C03C2217/00; C03C2217/70; C03C2217/78
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
74 words
A high transmittance, low emissivity article comprising: a. a transparent nonmetallic substrate; b. a first transparent film comprising an oxide reaction product of a metal alloy comprising zinc and tin deposited on a surface of said substrate; c. a transparent metallic film deposited on said first metal alloy oxide film; and d. a second transparent film comprising an oxide reaction product of a metal alloy comprising zinc and tin deposited on said metallic film.
Claim 2
Dependent Claim
74 words
A high transmittance, low emissivity article comprising: a. a transparent nonmetallic substrate; b. a first transparent film comprising an oxide reaction product of a metal alloy comprising zinc and tin deposited on a surface of said substrate; c. a transparent metallic film deposited on said first metal alloy oxide film; and d. a second transparent film comprising an oxide reaction product of a metal alloy comprising zinc and tin deposited on said metallic film.
Claim 3
Dependent Claim
11 words
An article according to claim 1, wherein the substrate is glass.
Claim 4
Dependent Claim
12 words
An article according to claim 2, wherein the metallic film is silver.
Claim 5
Dependent Claim
16 words
An article according to claim 3, wherein the metal alloy consists essentially of zinc and tin.
Claim 6
Dependent Claim
19 words
An article according to claim 4, wherein the metal alloy comprises from about 10 to about 90 percent zinc.
Claim 7
Dependent Claim
17 words
An article according to claim 5, wherein the metal alloy comprises about 30 to 60 percent zinc.
Claim 8
Dependent Claim
17 words
An article according to claim 6, wherein the metal alloy comprises about 50 to 54 percent zinc.
Claim 9
Dependent Claim
22 words
An article according to claim 4, wherein the transparent film comprising an oxide reaction product of a metal alloy comprises zinc stannate.
Claim 10
Dependent Claim
32 words
An article according to claim 1, wherein a transparent metal-contining film is deposited between the transparent metallic film and the second trnsparent film comprising an oxide reaction product of a metal alloy.
Claim 11
Dependent Claim
19 words
An article according to claim 9, wherein the transparent metal-containing film comprises a metal alloy of zinc and tin.
Claim 12
Independent Claim
72 words
A method for depositing a film comprising an oxide of a metal alloy comprising the steps of: a. forming a cathode target comprising a metal alloy of zinc and tin; b. placing a substrate to be coated in an evacuated chamber with said cathode target; and c. sputtering said metal alloy cathode target in a reactive atmosphere comprising oxygen thereby depositing a metal alloy oxide film on a surface of said substrate.
Claim 13
Independent Claim
72 words
A method for depositing a film comprising an oxide of a metal alloy comprising the steps of: a. forming a cathode target comprising a metal alloy of zinc and tin; b. placing a substrate to be coated in an evacuated chamber with said cathode target; and c. sputtering said metal alloy cathode target in a reactive atmosphere comprising oxygen thereby depositing a metal alloy oxide film on a surface of said substrate.
Claim 14
Dependent Claim
12 words
A method according to claim 11, wherein said sputtering is magnetically enhanced.
Claim 15
Dependent Claim
11 words
A method according to claim 12, wherein said substrate is glass.
Claim 16
Dependent Claim
16 words
A method according to claim 13, wherein said metal alloy consists essentially of zinc and tin.
Claim 17
Dependent Claim
12 words
A method according to claim 14, wherein said film comprises zinc stannate.
Claim 18
Independent Claim
111 words
A method for making a multiple layer high transmittance, low emissivity coated product comprising the steps of: a. placing a transparent, nonmetallic substrate in a sputtering chamber; b. sputtering a cathode target comprising an alloy of zinc and tin in a reactive atmosphere comprising oxygen to deposit a transparent metal alloy oxide film on a surface of said substrate; c. sputtering a silver cathode target, in an inert atmosphere to deposit a transparent silver film on said metal alloy oxide film; and d. sputtering a cathode target comprising an alloy of zinc and tin in a reactive atmosphere comprising oxygen to deposit a metal alloy oxide film on said silver film.
Claim 19
Independent Claim
111 words
A method for making a multiple layer high transmittance, low emissivity coated product comprising the steps of: a. placing a transparent, nonmetallic substrate in a sputtering chamber; b. sputtering a cathode target comprising an alloy of zinc and tin in a reactive atmosphere comprising oxygen to deposit a transparent metal alloy oxide film on a surface of said substrate; c. sputtering a silver cathode target, in an inert atmosphere to deposit a transparent silver film on said metal alloy oxide film; and d. sputtering a cathode target comprising an alloy of zinc and tin in a reactive atmosphere comprising oxygen to deposit a metal alloy oxide film on said silver film.
Claim 20
Dependent Claim
11 words
The method according to claim 16, wherein the substrate is glass.
Claim 21
Dependent Claim
16 words
The method according to claim 17, wherein said metal alloy consists essentially of zinc and tin.
Claim 22
Dependent Claim
15 words
The method according to claim 18, wherein said metal alloy oxide film comprises zinc stannate.
Claim 23
Dependent Claim
28 words
The method according to claim 16, which further comprises the step of depositing a transparent metal alloy film between said silver film and said metal alloy oxide film.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-09-08 | 1990-03-10 | 1990-09-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-09-08 | 1994-03-10 | 1994-09-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-09-08 | 1998-03-10 | 1998-09-09 | $7700.00 | Window Closed / Lapsed |