US4609259A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for producing micro Fresnel lens
Assignee: Pioneer Corp
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Filing: 1984-11-09
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Granted: 1986-09-02
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Expires: 2004-11-09
Abstract
Abstract A process for producing a micro Fresnel lens comprises the following steps: moving either a substrate coated with a resist layer for providing the micro Fresnel lens or a source of actinic radiation such as electron beam for exposing the resist layer relative to each other in a fixed direction; scanning linearly the resist coat with the actinic radiation in a direction perpendicular to the direction of the relative movement; during the scanning operation, performing exposure to the actinic radiation or interrupting or overlapping the application of the actinic radiation so as to form a latent image in an area corresponding to the grooved surface of the micro Fresnel lens within a predetermined width; repeating the above procedures in a direction perpendicular to that of the relative movement of the substrate and the source of actinic radiation; and developing the exposed resist layer to provide a micro Fresnel lens having the desired grooved surface.
Inventors
- 👤 Takashi Suemitsu
- 👤 Shinichi Suzuki
- 👤 Takashi Niriki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 00:53
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0005; G03F7/001; G02; G02B; G02B5/00; G02B5/18; G02B5/1876; G02B5/188; G02B5/1885
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
155 words
A process for producing a micro Fresnel lens having a grooved surface from a substrate coated with a resist layer comprising the following steps: moving a substrate coated with a resist layer in a first direction relative to a source of actinic radiation: scanning said actinic radiation linearly in a direction perpendicular to said first direction on said resist coat within a first predetermined width while interrupting and overlapping application of said actinic radiation to form a latent image of a portion of a micro Fresnel lens within said first predetermined width; indexing said substrate with respect to said source of actinic radiation to scan a second portion of said substrate adjacent said first predetermined width in the form of a second predetermined width; repeating said scanning and indexing steps until the entire latent image of said lens is formed; and developing the exposed resist layer to form the grooved surface of said Fresnel lens.
Claim 2
Dependent Claim
155 words
A process for producing a micro Fresnel lens having a grooved surface from a substrate coated with a resist layer comprising the following steps: moving a substrate coated with a resist layer in a first direction relative to a source of actinic radiation: scanning said actinic radiation linearly in a direction perpendicular to said first direction on said resist coat within a first predetermined width while interrupting and overlapping application of said actinic radiation to form a latent image of a portion of a micro Fresnel lens within said first predetermined width; indexing said substrate with respect to said source of actinic radiation to scan a second portion of said substrate adjacent said first predetermined width in the form of a second predetermined width; repeating said scanning and indexing steps until the entire latent image of said lens is formed; and developing the exposed resist layer to form the grooved surface of said Fresnel lens.
Claim 3
Dependent Claim
12 words
The process of claim 1, wherein said actinic radiation comprises electron beam.
Claim 4
Dependent Claim
141 words
A process for producing a micro Fresnel lens having a grooved surface from a substrate coated with a resist layer comprising the following steps: moving a substrate coated with a resist layer in a fixed direction relative to a source of actinic radiation; scanning linearly the resist coat with the actinic radiation in a direction perpendicular to the direction of the movement of the substrate; during said scanning, exposing the coated substrate to the actinic radiation, interrupting, and overlapping the application of said actinic radiation so as to form a latent image in an area corresponding to the grooved surface of the micro Fresnel lens within a predetermined width; repeating the above procedures in a direction perpendicular to that of the movement of said substrate; and developing the exposed resist layer to provide a micro Fresnel lens having the grooved surface.
Claim 5
Dependent Claim
141 words
A process for producing a micro Fresnel lens having a grooved surface from a substrate coated with a resist layer comprising the following steps: moving a substrate coated with a resist layer in a fixed direction relative to a source of actinic radiation; scanning linearly the resist coat with the actinic radiation in a direction perpendicular to the direction of the movement of the substrate; during said scanning, exposing the coated substrate to the actinic radiation, interrupting, and overlapping the application of said actinic radiation so as to form a latent image in an area corresponding to the grooved surface of the micro Fresnel lens within a predetermined width; repeating the above procedures in a direction perpendicular to that of the movement of said substrate; and developing the exposed resist layer to provide a micro Fresnel lens having the grooved surface.
Claim 6
Dependent Claim
158 words
A process for producing a micro Fresnel lens having a grooved surface from a substrate coated with a resist layer comprising the following steps: moving, in a fixed direction, a source of actinic radiation for exposing a resist layer relative to a substrate coated with said resist layer for providing the micro Fresnel lens; scanning linearly the resist coat with the actinic radiation in a direction perpendicular to the direction of the movement of said source of actinic radiation; during said scanning, exposing the coated substrate to the actinic radiation, interrupting and overlapping the application of said actinic radiation so as to form a latent image in an area corresponding to the grooved surface of the micro Fresnel lens within a predetermined width; repeating the above procedures in a direction perpendicular to that of the movement of said source of actinic radiation; and developing the exposed resist layer to provide a micro Fresnel lens having the grooved surface.
Claim 7
Dependent Claim
158 words
A process for producing a micro Fresnel lens having a grooved surface from a substrate coated with a resist layer comprising the following steps: moving, in a fixed direction, a source of actinic radiation for exposing a resist layer relative to a substrate coated with said resist layer for providing the micro Fresnel lens; scanning linearly the resist coat with the actinic radiation in a direction perpendicular to the direction of the movement of said source of actinic radiation; during said scanning, exposing the coated substrate to the actinic radiation, interrupting and overlapping the application of said actinic radiation so as to form a latent image in an area corresponding to the grooved surface of the micro Fresnel lens within a predetermined width; repeating the above procedures in a direction perpendicular to that of the movement of said source of actinic radiation; and developing the exposed resist layer to provide a micro Fresnel lens having the grooved surface.
References Cited (Backward Citations)
US3948660A
Cited
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