US4607491A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cooling trap for vacuum
Assignee: Edwards Japan Ltd
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Filing: 1985-01-24
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Granted: 1986-08-26
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Expires: 2005-01-24
Abstract
Abstract A vacuum cooling trap for use in a vacuum chamber comprising: a laminated structure comprised of a pair of plates bonded together in face-to-face contacting relation, the plates being composed of metal of high thermal conductivity, and the plates having aligned confronting conduit portions which jointly define a conduit within the laminated structure for circulating a cooling medium through the laminated structure during use of the vacuum cooling trap.
Inventors
- 👤 Hajime Ishimaru
- 👤 Masao Miyamoto
- 👤 Shojiro Komaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 15:36
CPC Classifications
B; B01; B01D; B01D8/00; Y; Y10; Y10S; Y10S417/00; Y10S417/901
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
69 words
A vacuum cooling trap for use in a vacuum chamber comprising: a laminated structure comprised of a pair of plates bonded together in face-to-face contacting relation, the plates being composed of metal of high thermal conductivity, and the plates having aligned confronting conduit portions which jointly define a conduit within the laminated structure for circulating a cooling medium through the laminated structure during use of the vacuum cooling trap.
Claim 2
Dependent Claim
69 words
A vacuum cooling trap for use in a vacuum chamber comprising: a laminated structure comprised of a pair of plates bonded together in face-to-face contacting relation, the plates being composed of metal of high thermal conductivity, and the plates having aligned confronting conduit portions which jointly define a conduit within the laminated structure for circulating a cooling medium through the laminated structure during use of the vacuum cooling trap.
Claim 3
Dependent Claim
18 words
A vacuum cooling trap according to claim 1; wherein the laminated structure comprises a pair of press-bonded plates.
Claim 4
Dependent Claim
20 words
A vacuum cooling trap according to claim 2; wherein the pair of press-bonded plates comprises a pair of pressure-welded plates.
Claim 5
Dependent Claim
29 words
A vacuum cooling trap according to claim 3; wherein the laminated structure has a set of through-holes extending therethrough at locations where the two plates are in face-to-face contact.
Claim 6
Dependent Claim
16 words
A vacuum cooling trap according to claim 3; wherein the laminated structure has an annular configuration.
Claim 7
Dependent Claim
23 words
A vacuum cooling trap according to claim 3; wherein the conduit portions of the plates jointly define a plurality of separate continuous conduits.
Claim 8
Dependent Claim
16 words
A vacuum cooling trap according to claim 3; wherein the two plates are composed of aluminum.
Claim 9
Dependent Claim
24 words
A vacuum cooling trap according to claim 3; wherein the conduit portions of the plates have a serpentine extent to define a serpentine conduit.
Claim 10
Dependent Claim
19 words
A vacuum cooling trap according to claim 3; wherein the conduit portions of the plates comprise press-formed flow channels.
Claim 11
Dependent Claim
29 words
A vacuum cooling trap according to claim 1; wherein the laminated structure has a set of through-holes extending therethrough at locations where the two plates are in face-to-face contact.
Claim 12
Dependent Claim
16 words
A vacuum cooling trap according to claim 1; wherein the laminated structure has an annular configuration.
Claim 13
Dependent Claim
23 words
A vacuum cooling trap according to claim 1; wherein the conduit portions of the plates jointly define a plurality of separate continuous conduits.
Claim 14
Dependent Claim
16 words
A vacuum cooling trap according to claim 1; wherein the two plates are composed of aluminum.
Claim 15
Dependent Claim
24 words
A vacuum cooling trap according to claim 1; wherein the conduit portions of the plates have a serpentine extent to define a serpentine conduit.
Claim 16
Dependent Claim
88 words
In combination: a vacuum chamber; a vacuum pump connected to the vacuum chamber to exhaust gas therefrom and create a vacuum therein; and a vacuum cooling trap disposed within the vacuum chamber, the vacuum cooling trap comprising a laminated structure comprised of a pair of plates bonded together in face-to-face contacting relation, the plates being composed of metal of high thermal conductivity, and the plates having aligned confronting conduit portions which jointly define a conduit within the laminated structure for circulating a cooling medium through the laminated structure.
Claim 17
Dependent Claim
88 words
In combination: a vacuum chamber; a vacuum pump connected to the vacuum chamber to exhaust gas therefrom and create a vacuum therein; and a vacuum cooling trap disposed within the vacuum chamber, the vacuum cooling trap comprising a laminated structure comprised of a pair of plates bonded together in face-to-face contacting relation, the plates being composed of metal of high thermal conductivity, and the plates having aligned confronting conduit portions which jointly define a conduit within the laminated structure for circulating a cooling medium through the laminated structure.
Claim 18
Dependent Claim
16 words
A combination according to claim 15; wherein the laminated structure comprises a pair of press-bonded plates.
Claim 19
Dependent Claim
29 words
A vacuum cooling trap according to claim 15; wherein the laminated structure has a set of through-holes extending therethrough at locations where the two plates are in face-to-face contact.
Claim 20
Dependent Claim
16 words
A vacuum cooling trap according to claim 15; wherein the two plates are composed of aluminum.
Claim 21
Dependent Claim
24 words
A vacuum cooling trap according to claim 15; wherein the conduit portions of the plates have a serpentine extent to define a serpentine conduit.
Claim 22
Dependent Claim
19 words
A vacuum cooling trap according to claim 15; wherein the conduit portions of the plates comprise press-formed flow channels.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-08-25 | 1990-02-24 | 1990-08-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-08-25 | 1994-02-24 | 1994-08-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-08-25 | 1998-02-24 | 1998-08-26 | $7700.00 | Window Closed / Lapsed |