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US4604594A Expired / Lapsed US ⏱️ 0.0 years remaining

Surface wave filter having photoresist damping material thereon and method for manufacturing the same

Assignee: Siemens AG
•
Filing: 1983-09-15
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Granted: 1986-08-05
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Expires: 2003-09-15
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Abstract

Abstract A surface wave filter with a wafer-shaped substrate formed of monocrystalline piezoelectric material having a surface, input and output transducers disposed on the surface of the substrate, a coupler for coupling the transducers being spaced apart from the transducers on the surface of the substrate defining zones therebetween, and electric conductor runs being connected to the transducers on the surface of the substrate and having ends, includes a damping layer formed of photoresist material with a plastic base covering substantially the entire surface of the substrate except for a region bounded by the transducers, the coupler, the ends of the electric conductor runs and the zones between the transducers and the coupler, and a method for manufacturing the filter.

Inventors

  • 👤 Heinrich Angerer
  • 👤 Badri Sinha

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 16:24
CPC Classifications
H; H03; H03H; H03H3/00; H03H3/007; H03H3/08; H03H9/00; H03H9/02; H03H9/02535; H03H9/02818; H03H9/02842; Y; Y10; Y10T; Y10T29/00; Y10T29/42

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 122 words
In a surface wave filter with a wafer-shaped substrate formed of monocrystalline piezoelectric material having a surface, input and output transducers disposed on the surface of the substrate, a coupler for coupling the transducers, said coupler being spaced apart from the transducers on the surface of the substrate, and electric conductor leads being connected to the transducers on the surface of the substrate and having respective electrodes, the improvement comprising a damping layer formed of photoresist material having a plastic base covering substantially the entire surface of the perimeter of the substrate except for a region bounded by the perimeter of the transducers, the coupler, the respective electrodes of the electric conductor leads and the zones between the transducers and the coupler.
Claim 2
Dependent Claim 122 words
In a surface wave filter with a wafer-shaped substrate formed of monocrystalline piezoelectric material having a surface, input and output transducers disposed on the surface of the substrate, a coupler for coupling the transducers, said coupler being spaced apart from the transducers on the surface of the substrate, and electric conductor leads being connected to the transducers on the surface of the substrate and having respective electrodes, the improvement comprising a damping layer formed of photoresist material having a plastic base covering substantially the entire surface of the perimeter of the substrate except for a region bounded by the perimeter of the transducers, the coupler, the respective electrodes of the electric conductor leads and the zones between the transducers and the coupler.
Claim 3
Dependent Claim 95 words
In a surface wave filter with a wafer-shaped substrate formed of monocrystalline piezoelectric material having a surface, input and output transducers disposed on the surface of the substrate and defining zones therebetween, and electric conductor leads being connected to the transducers on the surface of the substrate and having respective electrodes, the improvement comprising a damping layer formed of photoresist material having a plastic base covering substantially the entire surface of the substrate except for a region bounded by the transducers, the respective electrodes of the electric conductor leads and the zones between the transducers.
Claim 4
Dependent Claim 95 words
In a surface wave filter with a wafer-shaped substrate formed of monocrystalline piezoelectric material having a surface, input and output transducers disposed on the surface of the substrate and defining zones therebetween, and electric conductor leads being connected to the transducers on the surface of the substrate and having respective electrodes, the improvement comprising a damping layer formed of photoresist material having a plastic base covering substantially the entire surface of the substrate except for a region bounded by the transducers, the respective electrodes of the electric conductor leads and the zones between the transducers.
Claim 5
Dependent Claim 18 words
Surface wave filter according to claim 1, wherein said damping layer is formed of a positive photoresist material.
Claim 6
Dependent Claim 18 words
Surface wave filter according to claim 2, wherein said damping layer is formed of a positive photoresist material.
Claim 7
Dependent Claim 18 words
Surface wave filter according to claim 1, wherein said damping layer is formed of a negative photoresist material.
Claim 8
Dependent Claim 18 words
Surface wave filter according to claim 2, wherein said damping layer is formed of a negative photoresist material.
Claim 9
Dependent Claim 15 words
Surface wave filter according to claim 1, wherein the substrate is formed of lithium niobate.
Claim 10
Dependent Claim 15 words
Surface wave filter according to claim 2, wherein the substrate is formed of lithium niobate.
Claim 11
Dependent Claim 94 words
Method for manufacturing a surface wave filter including a wafer-shaped substrate having a surface, input and output transducers disposed on the surface of the substrate and electric conductor leads being connected to the transducers on the surface of the substrate and having respective electrodes, said method comprised of: photolithographically applying a damping layer formed of photoresist material having a plastic base over substantially the entire surface of the substrate except for a region bounded by the perimeter of the transducers, the respective electrodes of the electric conductor leads and the zones between the transducers.
Claim 12
Dependent Claim 94 words
Method for manufacturing a surface wave filter including a wafer-shaped substrate having a surface, input and output transducers disposed on the surface of the substrate and electric conductor leads being connected to the transducers on the surface of the substrate and having respective electrodes, said method comprised of: photolithographically applying a damping layer formed of photoresist material having a plastic base over substantially the entire surface of the substrate except for a region bounded by the perimeter of the transducers, the respective electrodes of the electric conductor leads and the zones between the transducers.
Claim 13
Dependent Claim 19 words
Method according to claim 9, which comprises providing the damping layer in the form of a negative photoresist material.
Claim 14
Dependent Claim 19 words
Method according to claim 9, which comprises providing the damping layer in the form of a positive photoresist material.

References Cited (Backward Citations)

US4139791A Cited
US4354129A Cited
JPS55158724A Cited
US4426595A Cited
US4470026A Cited
US4486724A Cited
US4511866A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1989-08-04 1990-02-03 1990-08-05 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1993-08-04 1994-02-03 1994-08-05 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1997-08-04 1998-02-03 1998-08-05 $7700.00 Window Closed / Lapsed

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