US4600282A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Alignment apparatus
Assignee: Canon Inc
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Filing: 1984-11-05
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Granted: 1986-07-15
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Expires: 2004-11-05
Abstract
Abstract An alignment apparatus for positioning on a wafer an image of a mask formed by a projection optical system. The apparatus includes a first detecting system for detecting the distance between an imaging plane of the optical system and the wafer, a driving mechanism for moving the wafer in the direction of the optical axis of the optical system and a second detecting system for detecting the amount of movement of the wafer. The driving mechanism is controlled while the distance detected by the first detecting system is compared with the amount of movement detected by the second detecting system, whereby the wafer is correctly and accurately positioned on the imaging plane of the optical system.
Inventors
- 👤 Mitsugu Yamamura
- 👤 Minoru Yomoda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 01:04
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7088; G03F7/00; G03F7/70; G03F7/70691; G03F9/7003; G03F9/7023; G03F9/7026; G03F9/7049; G03F9/7053; G03F9/7057
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
149 words
An apparatus for aligning an object with an imaging plane of an optical system, comprising: a first detecting means for detecting the position of the object with respect to the imaging plane of the optical system; displacement means for changing the positional relation of the object relative to the imaging plane of the optical system; a second detecting means for detecting the amount of change in the positional relation of the object relative to the imaging plane of the optical system by said displacement means; and control means for controlling said displacement means on the basis of the results of detection by said first and second detecting means, said control means comparing sequentially the results of detection by said first and second detecting means with each other and controlling said displacement means so that the results of detection by said first and second detecting means co-ordinate with each other.
Claim 2
Independent Claim
149 words
An apparatus for aligning an object with an imaging plane of an optical system, comprising: a first detecting means for detecting the position of the object with respect to the imaging plane of the optical system; displacement means for changing the positional relation of the object relative to the imaging plane of the optical system; a second detecting means for detecting the amount of change in the positional relation of the object relative to the imaging plane of the optical system by said displacement means; and control means for controlling said displacement means on the basis of the results of detection by said first and second detecting means, said control means comparing sequentially the results of detection by said first and second detecting means with each other and controlling said displacement means so that the results of detection by said first and second detecting means co-ordinate with each other.
Claim 3
Dependent Claim
18 words
An apparatus according to claim 1, wherein said second detecting means includes an eddy current type position detector.
Claim 4
Dependent Claim
14 words
An apparatus according to claim 2, wherein said displacement means includes an electrostrictive element.
Claim 5
Dependent Claim
14 words
An apparatus according to claim 3, wherein said first detecting means includes an air-microsensor.
Claim 6
Dependent Claim
78 words
An apparatus according to claim 4, wherein said control means includes a processing means for generating a signal corresponding to the difference between the result of detection by said first detecting means and that detected by said second detecting means, comparing means for binarizing a sawtooth wave signal on the basis of the signal produced by said processing means, and switching means for controlling charging/discharging of said electrostrictive element in accordance with an output from said comparing means.
Claim 7
Dependent Claim
50 words
An alignment apparatus comprising: an electrostrictive element; detecting means for detecting the amount of change in said electrostrictive element; and control means for controlling charging/discharging of said electrostrictive element on the basis of the difference between the amount of change detected by said detecting means and a predetermined set amount.
Claim 8
Dependent Claim
50 words
An alignment apparatus comprising: an electrostrictive element; detecting means for detecting the amount of change in said electrostrictive element; and control means for controlling charging/discharging of said electrostrictive element on the basis of the difference between the amount of change detected by said detecting means and a predetermined set amount.
Claim 9
Dependent Claim
52 words
An apparatus according to claim 6, wherein said control means includes a first circuit at a lower voltage for obtaining the difference between the amount of change detected by said detecting means and the predetermined set amount, and a second circuit at a higher voltage for executing charging/discharging of said electrostrictive element.
Claim 10
Dependent Claim
25 words
An apparatus according to claim 7, wherein said control means includes a photo-coupler for transmitting an output of said first circuit to said second circuit.
Claim 11
Dependent Claim
57 words
An apparatus according to claim 8, wherein said first circuit includes an operational amplifier for generating a signal corresponding to the difference between the amount of change detected by said detecting means and the predetermined set amount, and a comparator for binarizing a sawtooth wave signal on the basis of the signal produced by said operational amplifier.
Claim 12
Dependent Claim
30 words
An apparatus according to claim 9, wherein said second circuit includes a plurality of transistors which are adapted to be controlled on the basis of the output from said photo-coupler.
Claim 13
Dependent Claim
46 words
An apparatus according to claim 6, wherein said control means includes a pulse generating circuit for producing a pulse signal for controlling charging/discharging of said electrostrictive element, and a duty changing circuit for changing the duty in the pulse signal produced by said pulse generating circuit.
Claim 14
Independent Claim
161 words
An apparatus for aligning a flat object with an imaging plane of an optical system, comprising: a plurality of first detecting means, each of said first detecting means detecting the position of the object with respect to the imaging plane of the optical system; a plurality of displacement means, each of said displacement means changing the positional relation of an associated portion of the object relative to the imaging plane of the optical system; a plurality of second detecting means, each of said second detecting means detecting the amount of change in the positional relation between an associated portion of the object relative to the imaging plane of the optical system by an associated one of said displacement means, independently from the change by the remaining displacement means; and control means for controlling each of said plural displacement means individually on the basis of the result of detection by an associated one of pairs of said first and second detecting means.
Claim 15
Independent Claim
161 words
An apparatus for aligning a flat object with an imaging plane of an optical system, comprising: a plurality of first detecting means, each of said first detecting means detecting the position of the object with respect to the imaging plane of the optical system; a plurality of displacement means, each of said displacement means changing the positional relation of an associated portion of the object relative to the imaging plane of the optical system; a plurality of second detecting means, each of said second detecting means detecting the amount of change in the positional relation between an associated portion of the object relative to the imaging plane of the optical system by an associated one of said displacement means, independently from the change by the remaining displacement means; and control means for controlling each of said plural displacement means individually on the basis of the result of detection by an associated one of pairs of said first and second detecting means.
Claim 16
Dependent Claim
29 words
An apparatus according to claim 12, wherein the apparatus includes the same number of said plural first detecting means, said plural second detecting means and said plural displacement means.
Claim 17
Dependent Claim
27 words
An apparatus according to claim 13, wherein each of said second detecting means detects directly the amount of change by an associated one of said displacement means.
Claim 18
Dependent Claim
16 words
An apparatus according to claim 14, wherein each of said displacement means includes an electrostrictive element.
Claim 19
Dependent Claim
20 words
An apparatus according to claim 15, wherein each of said second detecting means includes an eddy current type position detector.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-07-14 | 1990-01-13 | 1990-07-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-07-14 | 1994-01-13 | 1994-07-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-07-14 | 1998-01-13 | 1998-07-15 | $7700.00 | Window Closed / Lapsed |