US4599247A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor processing facility for providing enhanced oxidation rate
Assignee: Texas Instruments Inc
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Filing: 1985-01-04
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Granted: 1986-07-08
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Expires: 2005-01-04
Abstract
Abstract The disclosure relates to a method of growing thermal oxide on silicon wherein the oxide is grown at an increased rate, at reduced temperature or a combination thereof. This is accomplished by operating in an hermetic quartz tube capable of withstanding high pressure with steam or oxygen at super atmospheric pressure.
Inventors
- 👤 Kenneth E. Bean
- 👤 Robert H. Havemann
- 👤 Andrew Lane
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 13:01
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6302; H10P14/6304; H10P14/6306; H10P14/6308; H10P14/6309; C; C23; C23C; C23C8/00; C23C8/06; C23C8/08; C23C8/10; H10P14/6322
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
130 words
A method of thermally oxidizing a silicon member comprising: (a) providing an hermetic quartz tube capable of withstanding pressures therein of from 1 to about 20 atmospheres, as the only pressurized vessel, (b) placing a semiconductor member in said tube; (c) out-gassing and sealing said tube; (d) heating the interior of said tube to a predetermined temperature above the boiling point of steam therein at a predetermined super atmospheric pressure while maintaining the exterior of said tube at atmospheric pressure; (e) placing steam in said tube at said super atmospheric pressure after said boiling point temperature has been reached; (f) maintaining said predetermined pressure and predetermined temperature in said tube for a predetermined time period; (g) cooling the interior of said tube; and (h) lowering the pressure in said tube.
Claim 2
Independent Claim
130 words
A method of thermally oxidizing a silicon member comprising: (a) providing an hermetic quartz tube capable of withstanding pressures therein of from 1 to about 20 atmospheres, as the only pressurized vessel, (b) placing a semiconductor member in said tube; (c) out-gassing and sealing said tube; (d) heating the interior of said tube to a predetermined temperature above the boiling point of steam therein at a predetermined super atmospheric pressure while maintaining the exterior of said tube at atmospheric pressure; (e) placing steam in said tube at said super atmospheric pressure after said boiling point temperature has been reached; (f) maintaining said predetermined pressure and predetermined temperature in said tube for a predetermined time period; (g) cooling the interior of said tube; and (h) lowering the pressure in said tube.
Claim 3
Dependent Claim
20 words
A method as set forth in claim 1 wherein step (e) comprises the step of injecting steam into said tube.
Claim 4
Dependent Claim
20 words
A method as set forth in claim 1 wherein step (e) comprises the step of dripping water into said tube.
Claim 5
Dependent Claim
24 words
A method as set forth in claim 1 wherein step (e) comprises the step of injecting hydrogen gas and oxygen gas into said tube.
Claim 6
Dependent Claim
23 words
A method as set forth in claim 1 wherein said predetermined pressure is in the range of about 3 to about 10 atmospheres.
Claim 7
Dependent Claim
23 words
A method as set forth in claim 2 wherein said predetermined pressure is in the range of about 3 to about 10 atmospheres.
Claim 8
Dependent Claim
23 words
A method as set forth in claim 3 wherein said predetermined pressure is in the range of about 3 to about 10 atmospheres.
Claim 9
Dependent Claim
23 words
A method as set forth in claim 4 wherein said predetermined pressure is in the range of about 3 to about 10 atmospheres.
Claim 10
Dependent Claim
24 words
A method as set forth in claim 1 wherein said predetermined temperature is about 1000° C.-30° times the pressure in atmosphere in said tube.
Claim 11
Dependent Claim
24 words
A method as set forth in claim 2 wherein said predetermined temperature is about 1000° C.-30° times the pressure in atmosphere in said tube.
Claim 12
Dependent Claim
24 words
A method as set forth in claim 3 wherein said predetermined temperature is about 1000° C.-30° times the pressure in atmosphere in said tube.
Claim 13
Dependent Claim
24 words
A method as set forth in claim 4 wherein said predetermined temperature is about 1000° C.-30° times the pressure in atmosphere in said tube.
Claim 14
Dependent Claim
24 words
A method as set forth in claim 5 wherein said predetermined temperature is about 1000° C.-30° times the pressure in atmosphere in said tube.
Claim 15
Dependent Claim
24 words
A method as set forth in claim 6 wherein said predetermined temperature is about 1000° C.-30° times the pressure in atmosphere in said tube.
Claim 16
Dependent Claim
24 words
A method as set forth in claim 7 wherein said predetermined temperature is about 1000° C.-30° times the pressure in atmosphere in said tube.
Claim 17
Dependent Claim
24 words
A method as set forth in claim 8 wherein said predetermined temperature is about 1000° C.-30° times the pressure in atmosphere in said tube.
Claim 18
Dependent Claim
26 words
A method as set forth in claim 1 wherein said quartz tube is designed to support said internal pressure with a safety factor of ten times.
Claim 19
Dependent Claim
19 words
A method as set forth in claim 1 further including providing an all quartz system within said quartz tube.
Claim 20
Dependent Claim
33 words
A method as set forth in claim 1 further including providing a system within said tube all formed from material taken from the class consisting of quartz, silicon carbide, silicon and combinations thereof.
References Cited (Backward Citations)
US4268538A
Cited
US4232057A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-07-07 | 1990-01-06 | 1990-07-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-07-07 | 1994-01-06 | 1994-07-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-07-07 | 1998-01-06 | 1998-07-08 | $7700.00 | Window Closed / Lapsed |