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US4598587A Expired / Lapsed US ⏱️ 0.0 years remaining

Surface acoustic wave accelerometer

Assignee: Nortel Networks Ltd
•
Filing: 1984-07-16
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Granted: 1986-07-08
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Expires: 2004-07-16
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Abstract

Abstract An accelerometer comprises a quartz beam 1 having on its upper and lower faces surface acoustic wave devices 2, 3 and 2', 3'. The beam is centrally mounted on quartz spacers 4, 5 which have metallized contacts for the lower SAW device. The spacers are carried on a quartz substrate 6 which is supported on a header 7 forming the base of a dual-in-line package. Mass-loading 8 is provided on each end of the beam 1.

Inventors

  • 👤 Douglas F. G. Dwyer
  • 👤 David E. Bower

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 13:56
CPC Classifications
G; G01; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/097; G01P15/0975

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 99 words
A surface acoustic wave accelerometer including a respective surface acoustic wave device on each of two opposing surfaces of a resilient beam, wherein the beam has a portion central of its length by which it is mounted to a substrate with one beam surface facing the substrate, to provide a balanced structure, and wherein each surface acoustic wave device has a respective pair of transducers, the transducers of each pair being disposed on opposite sides of said beam central portion whereby surface acoustic waves produced by said devices propagate between the respective transducers and across said beam central portion.
Claim 2
Dependent Claim 99 words
A surface acoustic wave accelerometer including a respective surface acoustic wave device on each of two opposing surfaces of a resilient beam, wherein the beam has a portion central of its length by which it is mounted to a substrate with one beam surface facing the substrate, to provide a balanced structure, and wherein each surface acoustic wave device has a respective pair of transducers, the transducers of each pair being disposed on opposite sides of said beam central portion whereby surface acoustic waves produced by said devices propagate between the respective transducers and across said beam central portion.
Claim 3
Dependent Claim 50 words
An accelerometer according to claim 1 wherein the beam is mounted to the substrate via fixed spacers, the fixed spacers carrying electrical contacts which provide electrical connection for the surface acoustic wave device on said one beam surface, the beam being bonded to the fixed spacers by electrically conductive adhesive.
Claim 4
Dependent Claim 14 words
An accelerometer according to claim 2 wherein the beam and the spacers are quartz.
Claim 5
Dependent Claim 30 words
An accelerometer according to claim 3 wherein the substrate is of quartz and the spacers are affixed to the quartz substrate which is intermediate the spacers and a mechanical support.
Claim 6
Dependent Claim 33 words
An acceleromenter according to claim 4 wherein between the quartz substrate and each end of the beam there is a respective gap, which gaps are dimensioned to effect air damping of the beam.
Claim 7
Dependent Claim 21 words
An accelerometer according to claim 1 including mass loading on each surface of the beam adjacent each end of the beam.
Claim 8
Dependent Claim 14 words
An accelerometer according to claim 2 wherein the surface acoustic wave devices are resonators.
Claim 9
Independent Claim 144 words
A method of mounting a surface acoustic wave accelerometer, the surface acoustic wave accelerometer including a respective surface acoustic wave device on each of the opposing surfaces of a resilient device, each surface acoustic wave device having a pair of transducers, the transducers of each pair being disposed on opposite sides of a portion of the beam central of its length whereby surface acoustic waves produced by said devices propagate between the respective transducers and across said beam central portion, the method including the step of affixing the central portion of the beam to a substrate, with one beam surface facing the substrate via fixed spacers whereby a balanced beam structure is formed, there being a gap between said fixed spacers whereby to provide unimpeded propagation for surface acoustic wave between the transducers of the surface acoustic wave device on said one beam surface.
Claim 10
Independent Claim 144 words
A method of mounting a surface acoustic wave accelerometer, the surface acoustic wave accelerometer including a respective surface acoustic wave device on each of the opposing surfaces of a resilient device, each surface acoustic wave device having a pair of transducers, the transducers of each pair being disposed on opposite sides of a portion of the beam central of its length whereby surface acoustic waves produced by said devices propagate between the respective transducers and across said beam central portion, the method including the step of affixing the central portion of the beam to a substrate, with one beam surface facing the substrate via fixed spacers whereby a balanced beam structure is formed, there being a gap between said fixed spacers whereby to provide unimpeded propagation for surface acoustic wave between the transducers of the surface acoustic wave device on said one beam surface.
Claim 11
Dependent Claim 36 words
A method according to claim 8 including dimensioning a respective air gap between each end of the beam and the substrate to provide a measure of air damping when the beam flexes under the acceleration forces.

References Cited (Backward Citations)

US4306456A Cited
GB2117115A Cited
US4515016A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1989-07-07 1990-01-06 1990-07-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1993-07-07 1994-01-06 1994-07-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1997-07-07 1998-01-06 1998-07-08 $7700.00 Window Closed / Lapsed

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