US4596030A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for generating a source of plasma with high radiation intensity in the X-ray region
Assignee: Carl Zeiss AG
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Filing: 1984-09-07
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Granted: 1986-06-17
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Expires: 2004-09-07
Abstract
Abstract A virtually punctiform plasma source of high-intensity radiation in the X-ray region is produced at the open downstream end of a gas-filled discharge space defined by and between concentric cylindrical inner and outer electrodes. At the closed upstream end, the electrodes which define this discharge space are directly connected to a low-inductance high-power switch which serves for momentarily connecting the electrodes to a source of stored electric energy. At the closed end of the discharge space, the inner electrode is concentrically surrounded by an insulator which has a high coefficient of secondary-electron emission. In closely opposed adjacency to the insulator region of the inner electrode is an annular emission electrode which is at the potential of the outer electrode, the emission electrode being positioned at close radial offset from the insulator, and the offset being less than the mean free path in the gas of the discharge space. A gas discharge is produced in the discharge space at a well-defined distance downstream from the emitter electrode, and the discharge in a homogeneous plasma layer, which moves toward the open downstream end of the discharge space and there forms a plasma focus of extremely high particle density and small diameter, which focus provides the plasma source of X-radiation.
Inventors
- 👤 Gerd Herziger
- 👤 Willi Neff
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 00:25
CPC Classifications
H; H05; H05G; H05G2/00; H05G2/001; H05G2/003; H05H; H05H1/00; H05H1/24; H05H1/52; Y; Y02; Y02E; Y02E30/00; Y02E30/10
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
243 words
A device for producing a plasma source of highintensity radiation in the X-ray region, comprising a cylindrical inner electrode which at one end is surrounded annularly by an insulator and which, together with an outer electrode which surrounds it concentrically at a distance away D, forms a discharge space filled with gas of low pressure which is open toward the other end of the inner electrode, and a switch for momentarily connecting the ends of the electrodes located on the closed side of the discharge space with an electrical energy storage, characterized by the combination of the following features: (a) on the closed end of the discharge space, a field emission electrode (4) which is at the potential of the outer electrode (2) surrounds the insulator (3) concentrically at a distance d between the electrode point and the insulator surface, which distance d is smaller than the mean free path of the electrons in the gas of the discharge space; (b) the material and the nature of the surface of the insulator (3) are so selected that said surface has a high coefficient η of secondary-electron emission (η≈3); and (c) a high-power switch of low inductance is connected to the energy storage (16) and serves to switch high power flows (about 10 8 W/cm 2 ) with high rise rates (about 10 17 W/cm 2 .s) is directly connected to the electrodes (1, 2) of the discharge space, on the closed ends thereof.
Claim 2
Independent Claim
243 words
A device for producing a plasma source of highintensity radiation in the X-ray region, comprising a cylindrical inner electrode which at one end is surrounded annularly by an insulator and which, together with an outer electrode which surrounds it concentrically at a distance away D, forms a discharge space filled with gas of low pressure which is open toward the other end of the inner electrode, and a switch for momentarily connecting the ends of the electrodes located on the closed side of the discharge space with an electrical energy storage, characterized by the combination of the following features: (a) on the closed end of the discharge space, a field emission electrode (4) which is at the potential of the outer electrode (2) surrounds the insulator (3) concentrically at a distance d between the electrode point and the insulator surface, which distance d is smaller than the mean free path of the electrons in the gas of the discharge space; (b) the material and the nature of the surface of the insulator (3) are so selected that said surface has a high coefficient η of secondary-electron emission (η≈3); and (c) a high-power switch of low inductance is connected to the energy storage (16) and serves to switch high power flows (about 10 8 W/cm 2 ) with high rise rates (about 10 17 W/cm 2 .s) is directly connected to the electrodes (1, 2) of the discharge space, on the closed ends thereof.
Claim 3
Dependent Claim
23 words
A device according to claim 1, characterized by the fact that the field-emission electrode is developed as an annular knife edge (4, 20).
Claim 4
Dependent Claim
20 words
A device according to claim 1, characterized by the fact that the field-emission electrode consists of equally spaced points (25).
Claim 5
Dependent Claim
54 words
A device according to claim 1, characterized by the fact that the diameter of the insulator (28) in its rear region facing the field-emission electrode (30) increases linearly in such a manner that the surface of the insulator in this region forms an obtuse angle with the axis (31) of the inner electrode (1).
Claim 6
Dependent Claim
52 words
A device according to claim 1, characterized by the fact that the insulator (3, 28) which surrounds the inner electrode (1) is so recessed in said electrode that its outer diameter, at least over a part of the length L of the insulator corresponds to the diameter of the inner electrode (1).
Claim 7
Dependent Claim
47 words
A device according to claim 4, characterized by the fact that the total length L of the insulator satisfies the relationship L=u·t, wherein u is the desired velocity of the plasma layer in the discharge space and wherein t measured in nanoseconds is between 200 and 500.
Claim 8
Dependent Claim
62 words
A device according to claim 1, characterized by the fact that the distance D of the outer electrode (2) from the insulator in the region of the front end of the insulator (3, 28) satisfies the relationship p·D<U.sub.Zmin in which p is the pressure of the gas in the discharge space and U Zmin is the minimum ignition voltage of this gas.
Claim 9
Dependent Claim
40 words
A device according to claim 7, characterized by the fact that the distance D of the outer electrode (29) satisfies said relationship over the entire length of the insulator (28) and widens in the front region of the outer electrode.
Claim 10
Dependent Claim
41 words
A device according to claim 7, characterized by the fact that the outer electrode (32) is so curved inward in the region of the front end of the insulator that the distance D satisfies the said relationship indicated in this region.
Claim 11
Dependent Claim
24 words
A device according to claim 1, characterized by the fact that the switch is developed as a triggered low-induction multi-channel spark gap (FIG. 1).
Claim 12
Dependent Claim
49 words
A device according to claim 10, characterized by the fact that the trigger electrodes (12) are at spaced equal distances on a support ring (11) and are arranged, together with the associated electrodes of the spark gap (8, 9) within a gas-filled or liquid-filled space (13) of small volume.
Claim 13
Dependent Claim
24 words
A device according to claim 11, characterized by the fact that an additional energy storage (14) is connected directly to the trigger electrodes (12).
Claim 14
Dependent Claim
40 words
A device according to claim 1, characterized by the fact that the space between inner and outer electrodes (1, 2) is filled with pure hydrogen or with gases of higher atomic number Z or with a mixture of said gases.
Claim 15
Dependent Claim
28 words
A device according to claim 1, characterized by the fact that the diameter R of the inner electrode (1) is selected in accordance with the gaseous mixture used.
Claim 16
Dependent Claim
15 words
A device according to claim 1, characterized by its use as source of coherent X-radiation.
Claim 17
Dependent Claim
16 words
A device according to claim 1, characterized by its use as source of incoherent polychromatic X-radiation.
Claim 18
Dependent Claim
21 words
A device according to claim 15 or claim 16, characterized by its use as source of radiation in an X-ray microscope.
Claim 19
Dependent Claim
20 words
A device according to claim 15 or claim 16, characterized by its use as source of radiation in lithography apparatus.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-06-16 | 1989-12-16 | 1990-06-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-06-16 | 1993-12-16 | 1994-06-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-06-16 | 1997-12-16 | 1998-06-17 | $7700.00 | Window Closed / Lapsed |