System for generating soft X rays

Claim 3

A system as set forth in claim 1 further comprising a vacuum chamber with said high current discharge occurring in said vacuum chamber.

Claim 4

A system as set forth in claim 2 further comprising a window for transmitting X rays to an object to be irradiated, said window and said transmission line partially defining said vacuum chamber.

Claim 5

A system as set forth in claim 3 further comprising means for collecting debris and removing undesirable components which are by-products of said X ray generation.

Claim 6

A system as set forth in claim 1 wherein said valve apparatus comprises: a solenoid including a coil and a reciprocating plunger having a retracted position and an extended position, the position of which is controlled by the state of energization of said coil; and a valve assembly for operation by said plunger, said assembly comprising: a housing defining a chamber having a gas inlet port and a gas exit port with a valve seat surrounding said exit port; a bearing defining an aperture; and a valve closure member having a head disposed in said chamber for selective engagement with said valve seat to block said exit port, and further including a valve stem projecting from said head and through said aperture, said valve closure member being movable between a closed position wherein said head engages said seat and an open position wherein said head is spaced from said seat; and means for biasing said valve closure member to its closed position, said valve stem carrying abutment means having an impact surface facing said head, said valve apparatus further comprising an actuator attached to said plunger with said actuator extending past said abutment means and terminating in a distal end having a hammer surface facing said impact surface and disposed in interfering relationship therewith, said hammer surface being spaced from said impact surface when said coil is deenergized by a distance less than the travel of said plunger, whereby energization of said coil causes fast opening of said valve by hard impact.

Claim 7

A system as set forth in claim 2 wherein said transmission line comprises: a first conductor electrically connecting one side of a load constituted by a burst of gas and one side of said power supply; a second conductor disposed adjacent to, but spaced from, said first conductor and electrically connecting the other side of the load and the other side of said power supply; an insulator extending between said conductors and partially defining said vacuum chamber; means disposed between said load and said insulator for receiving debris in non-gaseous form; and means disposed between said load and said insulator for ejecting debris in gaseous form from between said conductors.

Claim 8

A system as set forth in claim 4 wherein said means for collecting and removing comprises: a baffle for directing diffusing hot gases away from said window; and means for absorbing ultraviolet light from the beam of X rays passing through said window from said X ray source.