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US4588946A Expired / Lapsed US ⏱️ 0.0 years remaining

Method for measuring current at a p-n junction

Assignee: Nokia Bell Labs
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Filing: 1983-12-30
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Granted: 1986-05-13
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Expires: 2003-12-30
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Abstract

Abstract A method of mapping the current distribution of a p-n junction is described. The method uses measurements of the electron beam induced current.

Inventors

  • 👤 Paul S. Lin

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 17:19
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/26; G01R31/265; G01R31/2653

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 61 words
A method of measuring the current distribution at a p-n junction within a semiconductor device comprising the steps of: scanning a beam of radiation across the p-n junction; measuring the current produced by the absorption of said beam of radiation, I; determining the electrostatic potential difference across the junction; and using the Shockley relation to determine the device current density, J.
Claim 2
Independent Claim 61 words
A method of measuring the current distribution at a p-n junction within a semiconductor device comprising the steps of: scanning a beam of radiation across the p-n junction; measuring the current produced by the absorption of said beam of radiation, I; determining the electrostatic potential difference across the junction; and using the Shockley relation to determine the device current density, J.
Claim 3
Dependent Claim 15 words
A method as recited in claim 1 in which said p-n junction is forward biased.
Claim 4
Dependent Claim 17 words
A method as recited in claim 1 in which said beam of radiation comprises an electron beam.
Claim 5
Dependent Claim 24 words
A method as recited in claim 3 in which said device comprises a laser diode and said method further comprises ascertaining the leakage current.
Claim 6
Dependent Claim 15 words
A method as recited in claim 4 in which said p-n junction is forward biased.

References Cited (Backward Citations)

No citation records indexed.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1989-05-12 1989-11-11 1990-05-13 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1993-05-12 1993-11-11 1994-05-13 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1997-05-12 1997-11-11 1998-05-13 $7700.00 Window Closed / Lapsed

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