Apparatus for separating condensable gas

Claim 3

The apparatus of claim 1, wherein said porous glass membrane is hydrophilic.

Claim 4

The apparatus of claim 1, wherein said condensable gas is an inorganic substance.

Claim 5

The apparatus of claim 3 wherein said inorganic substance is water vapor.

Claim 6

The apparatus of claim 1, wherein said condensable gas is an organic substance.

Claim 7

The apparatus of claim 1, wherein said porous glass membrane is formed of glass plasma-etched in an atmosphere containing a fluorine-containing compound.

Claim 8

The apparatus of claim 1, wherein the pore radius of the micropores in said remaining portion is at least 12 Å.

Claim 9

The apparatus of claim 1, wherein said layer is extended to a depth of up to about 1000 Å and the pore radius of the micropores in said layer is 6 Å.

Claim 10

A membrane for separating condensable gas, comprising a hollow fiber porous glass membrane having been prepared from sodium borosilicate glass or potassium borosilicate glass, both having compositions that upon heat-treatment separate into a soft phase which leaches in a high-temperature acid solution and a hard phase which does not leach in said acid solution, said soft phase having been leached with a high-temperature acid solution, and said membrane being anisotropic and having a layer of a predetermined depth extending from one surface of said hollow fiber to a remaining portion of said membrane, said layer having a multiplicity of micropores with a pore radius of up to 20 Å communicating in the thickness direction of said hollow fiber, the pore radius of the micropores in said layer being less than a pore of the micropores in said remaining portion of said membrane.

Claim 11

A membrane for separating condensable gas, comprising a hollow fiber porous glass membrane having been prepared from sodium borosilicate glass or potassium borosilicate glass, both having compositions that upon heat-treatment separate into a soft phase which leaches in a high-temperature acid solution and a hard phase which does not leach in said acid solution, said soft phase having been leached with a high-temperature acid solution, and said membrane being anisotropic and having a layer of a predetermined depth extending from one surface of said hollow fiber to a remaining portion of said membrane, said layer having a multiplicity of micropores with a pore radius of up to 20 Å communicating in the thickness direction of said hollow fiber, the pore radius of the micropores in said layer being less than a pore of the micropores in said remaining portion of said membrane.

Claim 12

The membrane of claim 9, wherein said porous glass membrane is hydrophilic.

Claim 13

The membrane of claim 9, wherein the pore radius of the micropores in said remaining portion is at least 12 Å.

Claim 14

The membrane of claim 9, wherein said layer is extended to a depth of up to about 1000 Å and the pore radius of the micropores in said layer is 6 Å.

Claim 15

A process for separating condensable gas comprising: (a) contacting a first surface of a hollow fiber porous glass membrane for separating condensable gas with a condensable gas-containing gas mixture, said membrane having been prepared from sodium borosilicate glass or potassium borosilicate glass, both having compositions that upon heat-treatment separate into a soft phase which leaches in high-temperature acid solution and a hard phase which does not leach in said acid solution, said soft phase having been leached with a high temperature acid solution, and said membrane being anisotropic and having a layer of a predetermined depth extending from one surface of said hollow fiber to a remaining portion of said membrane, said layer having a multiplicity of micropores with a pore radius of up to 20 Å communicating in the thickness direction of said hollow fiber, the pore radius of the micropores in said layer being less than a pore radius of the micropores in said remaining portion of said membrane; and (b) selectively passing said condensable gas through said porous glass membrane.

Claim 16

A process for separating condensable gas comprising: (a) contacting a first surface of a hollow fiber porous glass membrane for separating condensable gas with a condensable gas-containing gas mixture, said membrane having been prepared from sodium borosilicate glass or potassium borosilicate glass, both having compositions that upon heat-treatment separate into a soft phase which leaches in high-temperature acid solution and a hard phase which does not leach in said acid solution, said soft phase having been leached with a high temperature acid solution, and said membrane being anisotropic and having a layer of a predetermined depth extending from one surface of said hollow fiber to a remaining portion of said membrane, said layer having a multiplicity of micropores with a pore radius of up to 20 Å communicating in the thickness direction of said hollow fiber, the pore radius of the micropores in said layer being less than a pore radius of the micropores in said remaining portion of said membrane; and (b) selectively passing said condensable gas through said porous glass membrane.

Claim 17

The process of claim 13, wherein said porous glass membrane is hydrophilic.

Claim 18

The process of claim 13, wherein a second surface of said membrane is contacted with a gas having a concentration of said condensable gas lower than that on said first surface to selectively pass said condensable gas through said membrane.

Claim 19

The process of claim 13, wherein the pressure on a second surface of said membrane is reduced to selectively pass said condensable gas through said membrane.

Claim 20

The process of claim 13, wherein said condensable gas is an inorganic substance.

Claim 21

The process of claim 17, wherein said inorganic substance is water vapor.

Claim 22

The process of claim 13, wherein said condensable gas is an organic substance.