US4583840A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Exposure apparatus
Assignee: Canon Inc
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Filing: 1983-11-18
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Granted: 1986-04-22
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Expires: 2003-11-18
Abstract
Abstract An exposure apparatus includes an original stage for holding an original, a stage holding and moving a radiation sensitive member, a projection optical system for projecting the image of the original onto the radiation sensitive member, a device for illuminating the original, and a device for supplying heat to the projection optical system to maintain the imaging position of the projection optical system when no exposure operation is effected.
Inventors
- 👤 Syuichi Yabu
- 👤 Hiroshi Sato
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 20:34
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70733; G03F7/7075; G03F7/708; G03F7/70858; G03F7/70883; G03F7/70891; H; H10; H10P; H10P95/00
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
84 words
An exposure apparatus comprising: first holder means for holding an original; second holder means for holding a radiation sensitive member; a projection system for projecting an image of said original onto said radiation sensitive member; illumination means for illuminating said original with an illumination energy to expose said radiation sensitive member to the image of said original through said projection system; and means for supplying heat, during the time of no image exposure being effected, to said projection system to maintain its imaging position.
Claim 2
Dependent Claim
84 words
An exposure apparatus comprising: first holder means for holding an original; second holder means for holding a radiation sensitive member; a projection system for projecting an image of said original onto said radiation sensitive member; illumination means for illuminating said original with an illumination energy to expose said radiation sensitive member to the image of said original through said projection system; and means for supplying heat, during the time of no image exposure being effected, to said projection system to maintain its imaging position.
Claim 3
Dependent Claim
28 words
An exposure apparatus as defined in claim 1 wherein said supplying means irradiates said projection system with an illumination energy to which said radiation sensitive member is sensitive.
Claim 4
Dependent Claim
17 words
An exposure apparatus as defined in claim 2 wherein said supplying means irradiates the illumination energy intermittently.
Claim 5
Dependent Claim
43 words
An exposure apparatus as defined in claim 1 wherein said supplying means includes a shutter for blocking the illumination energy and control means for controlling said shutter with respect to its opening and closing during the time of no image exposure being effected.
Claim 6
Dependent Claim
28 words
An exposure apparatus as defined in claim 1 wherein said supplying means irradiates said projection system with an illumination energy to which said radiation sensitive member is insensitive.
Claim 7
Dependent Claim
41 words
An exposure apparatus as defined in claim 5 wherein said supplying means includes means for selecting one of the illumination energy to which said radiation sensitive member is sensitive and the illumination energy to which said radiation sensitive member is insensitive.
Claim 8
Dependent Claim
22 words
An exposure apparatus as defined in claim 6 wherein said selecting means includes filters different from each other in transmissive wavelength range.
Claim 9
Dependent Claim
73 words
An exposure apparatus comprising: a mask stage for holding a mask; a wafer stage for holding and steppingly moving a wafer; a projection optical system for projecting the image of said mask onto said wafer; illumination means for illuminating said mask; and means for operating said illumination means to maintain an imaging position of said projection optical system for a period from a first stepped exposure process to a second stepped exposure process.
Claim 10
Dependent Claim
73 words
An exposure apparatus comprising: a mask stage for holding a mask; a wafer stage for holding and steppingly moving a wafer; a projection optical system for projecting the image of said mask onto said wafer; illumination means for illuminating said mask; and means for operating said illumination means to maintain an imaging position of said projection optical system for a period from a first stepped exposure process to a second stepped exposure process.
Claim 11
Dependent Claim
34 words
An exposure apparatus as defined in claim 8 wherein said operating means operates said illumination means when the wafer is not positioned within the region in which the image of said mask is formed.
Claim 12
Dependent Claim
17 words
An exposure apparatus as defined in claim 8 wherein said operating means operates said illumination means intermittently.
Claim 13
Dependent Claim
30 words
An exposure apparatus as defined in claim 8 wherein said operating means irradiates said projection optical system with the light, from said illumination means, to which said wafer is sensitive.
Claim 14
Dependent Claim
30 words
An exposure apparatus as defined in claim 8 wherein said operating means irradiates said projection optical system with the light, from said illumination means, to which said wafer is insensitive.
Claim 15
Dependent Claim
27 words
An exposure apparatus as defined in claim 12 wherein said illumination means includes filters different from each other in transmissive wavelength range, said filters being selectively used.
Claim 16
Dependent Claim
17 words
An exposure apparatus as defined in claim 8 wherein said projection optical system is a reduction-projection lens.
Claim 17
Dependent Claim
76 words
An exposure apparatus, comprising: means for projecting an image of a first object on to a second object; means for illuminating the first object so that the image of the first object is transferred onto the second object through said projecting means; and means for supplying heat, during the time that no image transfer is being effected, to said projecting means to prevent any change in an imaging position thereof at the time of image transfer.
Claim 18
Dependent Claim
76 words
An exposure apparatus, comprising: means for projecting an image of a first object on to a second object; means for illuminating the first object so that the image of the first object is transferred onto the second object through said projecting means; and means for supplying heat, during the time that no image transfer is being effected, to said projecting means to prevent any change in an imaging position thereof at the time of image transfer.
Claim 19
Dependent Claim
27 words
An apparatus according to claim 15, wherein said heat supplying means supplies the heat to said projecting means during the time of replacement of the second object.
Claim 20
Dependent Claim
33 words
An apparatus according to claim 16, wherein said illuminating means is operative to illuminate the first object after each stepwise movement of the second object relative to the image of the first object.
Claim 21
Dependent Claim
56 words
An apparatus according to claim 17, wherein said heat supplying means is operative to supply, during the replacement of the second object, heat to said projecting means by an amount which is substantially equal, per a unit of time, to that of the heat supplied to said projecting means by the illumination of the first object.
Claim 22
Dependent Claim
22 words
An apparatus according to claim 18, wherein said heat supplying means supplies the heat to said projecting means through said illuminating means.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-04-21 | 1989-10-21 | 1990-04-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-04-21 | 1993-10-21 | 1994-04-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-04-21 | 1997-10-21 | 1998-04-22 | $7700.00 | Window Closed / Lapsed |