US4581315A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photoresistive compositions
Assignee: TRUSTEES OF UNIVERSITY OF PENNSYLVANIA A NON-PROFIT CORP OF
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Filing: 1983-12-14
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Granted: 1986-04-08
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Expires: 2003-12-14
Abstract
Abstract Photographic and Photolithographic systems are provided which utilize diacetylenic materials as components thereof. Such materials, which include at least two acetylenic bonds in conjugation with one another, provide a combination of both high sensitivity and high resolving power, thus resulting in superior photographic and photolithographic properties. In accordance with a preferred embodiment of the invention, a substrate is coated with at least one layer of a polymerizable composition comprising a diacetylenic species, said layer being organized into a plurality of domains having a substantially regular array of the diacetylenic species. In other embodiments, covalent bonding of the diacetylenic layer to the substrate is accomplished through the use of suitably constituted silane species, thus to provide a highly beneficial adhesion of substrate and photo- or photolithographic layer.
Inventors
- 👤 Anthony F. Garito
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 15:13
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/18; B05D1/20; B05D1/202; B82; B82Y; B82Y20/00; B82Y30/00; B82Y40/00; C; C07; C07C; C07C205/00; C07C205/27; C07C205/35; C07C205/36; C07C205/37; C07C57/00; C07C57/18; C07C57/52; C08; C08F; C08F138/00; G; G02; G02F; G02F1/00; G02F1/0009; G02F1/0018; G02F1/35; G02F1/355; G02F1/361; G02F1/3615; G02F1/3618; G03; G03F; G03F7/00; G03F7/004; G03F7/025; G02F1/3515; G02F1/37; G02F1/377; G02F3/00; Y; Y10; Y10S; Y10S430/00; Y10S430/136
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
105 words
A process comprising: coating a substrate with at least one substantially continuous layer of a polymerizable composition comprising at least one material having at least two acetylenic bonds, at least two of said bonds being in conjugation with one another to form a plurality of domains, each of said domains having average dimensions less than 10,000 Angstroms and having a substantially regular array of said composition, so that said layer is imagewise polymerizable with improved resolving power upon the application of radiation to selected portions thereof; and irradiating selected portions of said layer for a time sufficient to cause substantial polymerization of said selected portions.
Claim 2
Dependent Claim
105 words
A process comprising: coating a substrate with at least one substantially continuous layer of a polymerizable composition comprising at least one material having at least two acetylenic bonds, at least two of said bonds being in conjugation with one another to form a plurality of domains, each of said domains having average dimensions less than 10,000 Angstroms and having a substantially regular array of said composition, so that said layer is imagewise polymerizable with improved resolving power upon the application of radiation to selected portions thereof; and irradiating selected portions of said layer for a time sufficient to cause substantial polymerization of said selected portions.
Claim 3
Dependent Claim
14 words
The process of claim 1 wherein said coating is produced by the Langmuir-Blodgett technique.
Claim 4
Dependent Claim
13 words
The process of claim 2 wherein said coating comprises a plurality of layers.
Claim 5
Dependent Claim
14 words
The process of claim 1 wherein said layer is bonded to said substrate covalently.
Claim 6
Dependent Claim
12 words
The process of claim 4 wherein said covalent bonding includes siloxyl linkages.
Claim 7
Dependent Claim
29 words
The process of claim 1 wherein said material has the formula: R.sub.1 --C.tbd.C--C.tbd.C--R.sub.2 where R 1 is a hydrophobic chemical moiety and R 2 is a hydrophilic chemical moiety.
Claim 8
Dependent Claim
119 words
The process of claim 1 wherein said material has the formula: R.sub.3 --C.tbd.C--C.tbd.C--R.sub.4 where R 3 comprises a hydrocarbyl moiety having from 1 to about 30 carbon atoms and R 4 is represented by the formula: --R.sub.5 --(A).sub.n where R 5 is a hydrocarbyl group having from 1 to about 30 carbon atoms, n is an integer from 1 to about 6 and A is selected from the group consisting of COOH, COOR 6 , CONH 2 , CONHR 6 , CON(R 6 ) 2 , OH, SH, NH 2 , NHR 6 , N(R 6 ) 2 , silyl, sulfate, sulfonate, phosphate and siloxyl where R 6 is a hydrocarbyl having from 1 to about 10 carbon atoms.
Claim 9
Dependent Claim
11 words
The process of claim 1 wherein said material is optically active.
Claim 10
Dependent Claim
20 words
The process of claim 1 wherein said material comprises three acetylenic bonds, said bonds being in conjugation with one another.
Claim 11
Dependent Claim
14 words
The process of claim 1 wherein said layer further comprises a second polymerizable composition.
Claim 12
Dependent Claim
24 words
The process of claim 1 wherein said composition further comprises an amount sufficient to reduce thermal polymerization of a dimer of a nitroso compound.
Claim 13
Dependent Claim
12 words
The process of claim 1 wherein said material has been substantially fluorinated.
Claim 14
Dependent Claim
24 words
The process of claim 1 further comprising the step of heating said layer after said coating step to form a plurality of domains therein.
Claim 15
Dependent Claim
16 words
The process of claim 1 wherein said domains have average dimensions less than about 2,000 Å.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-04-07 | 1989-10-07 | 1990-04-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-04-07 | 1993-10-07 | 1994-04-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-04-07 | 1997-10-07 | 1998-04-08 | $7700.00 | Window Closed / Lapsed |