US4581103A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of etching semiconductor material
Assignee: Spheral Solar Power Inc
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Filing: 1984-09-04
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Granted: 1986-04-08
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Expires: 2004-09-04
Abstract
Abstract The disclosure relates to a method of etching semiconductor material wherein the material is secured in an oxide coated aluminum foil which acts as an etchant mask. The portion of the material extending from one side of the foil can then be etched with a semiconductor material etchant with the remainder of the material being masked from the etchant by the foil.
Inventors
- 👤 Jules D. Levine
- 👤 Millard J. Jensen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 13:17
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/93; H10F77/933; H10F77/935; H10F10/00; H10F10/10; H10F10/14; H10F71/00; H10F71/121; H10F77/10; H10F77/14; H10F77/147; H10P; H10P50/00; H10P50/69; H10P50/691; H10P50/692; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/547; Y02P; Y02P70/00; Y02P70/50
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
49 words
A method of etching a semiconductor material comprising the steps of: (a) providing said semiconductor material; (b) masking the portion of said material not to be etched with oxide coated aluminum; and (c) etching said material with an etchant for said material which is relatively inert to said oxide.
Claim 2
Independent Claim
49 words
A method of etching a semiconductor material comprising the steps of: (a) providing said semiconductor material; (b) masking the portion of said material not to be etched with oxide coated aluminum; and (c) etching said material with an etchant for said material which is relatively inert to said oxide.
Claim 3
Dependent Claim
14 words
A method as set forth in claim 1 wherein said oxide is aluminum oxide.
Claim 4
Dependent Claim
25 words
A method as set forth in claim 1 wherein said aluminum is a foil and said material extends outwardly on both sides of said foil.
Claim 5
Dependent Claim
25 words
A method as set forth in claim 2 wherein said aluminum is a foil and said material extends outwardly on both sides of said foil.
Claim 6
Dependent Claim
13 words
A method as set forth in claim 1 wherein said material is silicon.
Claim 7
Dependent Claim
13 words
A method as set forth in claim 2 wherein said material is silicon.
Claim 8
Dependent Claim
13 words
A method as set forth in claim 3 wherein said material is silicon.
Claim 9
Dependent Claim
13 words
A method as set forth in claim 4 wherein said material is silicon.
Claim 10
Dependent Claim
25 words
A method as set forth in claim 1 wherein said step of etching is provided using an etchant composed of HF,HNO 3 and acetic acid.
Claim 11
Dependent Claim
25 words
A method as set forth in claim 2 wherein said step of etching is provided using an etchant composed of HF,HNO 3 and acetic acid.
Claim 12
Dependent Claim
24 words
A method as set forth in claim 3 wherein said step of etching is provided using an etchant composed of HF,HN03 and acetic acid.
Claim 13
Dependent Claim
25 words
A method as set forth in claim 4 wherein said step of etching is provided using an etchant composed of HF,HNO 3 and acetic acid.
Claim 14
Dependent Claim
25 words
A method as set forth in claim 5 wherein said step of etching is provided using an etchant composed of HF,HNO 3 and acetic acid.
Claim 15
Dependent Claim
25 words
A method as set forth in claim 6 wherein said step of etching is provided using an etchant composed of HF,HNO 3 and acetic acid.
Claim 16
Dependent Claim
25 words
A method as set forth in claim 7 wherein said step of etching is provided using an etchant composed of HF,HNO 3 and acetic acid.
Claim 17
Dependent Claim
25 words
A method as set forth in claim 8 wherein said step of etching is provided using an etchant composed of HF,HNO 3 and acetic acid.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-04-07 | 1989-10-07 | 1990-04-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-04-07 | 1993-10-07 | 1994-04-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-04-07 | 1997-10-07 | 1998-04-08 | $7700.00 | Window Closed / Lapsed |