Piezoelectric micromotion actuator

Claim 2

A micromotion actuator for transmitting in a substantially tilt free linear fashion a translation induced electrically comprising (a) a piezoelectric type transducer which expands and contracts in response to variations in an electric signal, (b) a cylindrical flexure tube in which said transducer is mounted, (c) means for coupling said transducer to said flexure tube for linearly translating at least one end of said flexure tube in a tilt-free translation on the order of at least a fraction of a wavelength of light essentially solely in a direction parallel to the longitudinal axis of said flexure tube when said transducer expands or contracts in response to variations in said electric signal while decoupling tilted or sideways motion of said transducer, and (d) means for coupling an element to be moved to at least said flexure tube one end for enabling linear displacement of said element on the order of at least a fraction of a wavelength of light in response to said tilt-free translation of said flexure tube one end; whereby accurate linear displacement of said element may be provided in response to said variations in said electric signal.

Claim 3

The actuator in claim 1 wherein said coupling means comprises means for preventing any non-parallel end motion for said transducer to be transmitted to said flexure tube in the form of a moment.

Claim 4

The actuator in claim 2 wherein said non-parallel end motion preventing means comprises pairs of hardened male and female cones, one of each pair being attached to said transducer and the other of each pair being attached to said cylindrical flexure tube so that the points of the two cones attached to said flexure tube lie on the axis of said cylindrical flexure tube.

Claim 5

The actuator in claim 2 wherein said non-parallel end motion preventing means comprises pairs of hardened male and female cones, one of each pair being attached to said transducer and the other of each pair being attached to said cylindrical flexure tube and by clamping friction means, so that the points of the two cones attached to said cylindrical flexure tube lie on the axis of said cylindrical flexure tube.

Claim 6

A micromotion actuator for transmitting in a substantially tilt-free linear fashion a translation induced electrically comprising (a) a transducer which expands and contracts in response to variations in an electric signal, (b) a cylindrical flexure tube in which said transducer is mounted, (c) means for coupling said transducer to said flexure tube such that the transducer motion acts on the flexure tube substantially completely in a direction parallel to the axis of said tube, said coupling means comprising pairs of hardened male and female cones, one of each pair being attached to said transducer and the other of each pair being attached to said cylindrical flexure tube so that the points of the two cones attached to said flexure tube lie on the axis of said cylindrical flexure tube and (d) means for mounting an element to be moved on said flexure tube.

Claim 7

A micromotion actuator for transmitting in a substantially tilt-free linear fashion a translation induced electrically comprising (a) a transducer which expands and contracts in response to variations in an electric signal, (b) a cylindrical flexure tube in which said transducer is mounted, (c) means for coupling said transducer to said flexure tube such that the transducer motion acts on the flexure tube substantially completely in a direction parallel to the axis of said tube, said coupling means comprising pairs of hardened male and female cones, one of each pair being attached to said transducer and the other of each pair being attached to said cylindrical flexure tube so that the points of the two cones attached to said flexure tube lie on the axis of said cylindrical flexure tube and (d) means for mounting an element to be moved on said flexure tube.

Claim 8

A micromotion actuator for transmitting in a substantially tilt-free linear fashion a translation induced electrically comprising (a) a transducer which expands and contracts in response to variations in an electric signal, (b) a cylindrical flexure tube in which said transducer is mounted, (c) means for coupling said transducer to said flexure tube such that the transducer motion acts on the flexure tube substantially completely in a direction parallel to the axis of said tube, said coupling means comprising pairs of hardened male and female cones, one of each pair being attached to said transducer and the other of each pair being attached to said cylindrical flexure tube and by clamping friction means, so that the points of the two cones attached to said cylindrical flexure tube lie on the axis of said cylindrical flexure tube and (d) means for mounting an element to be moved on said flexure tube.

Claim 9

A micromotion actuator for transmitting in a substantially tilt-free linear fashion a translation induced electrically comprising (a) a transducer which expands and contracts in response to variations in an electric signal, (b) a cylindrical flexure tube in which said transducer is mounted, (c) means for coupling said transducer to said flexure tube such that the transducer motion acts on the flexure tube substantially completely in a direction parallel to the axis of said tube, said coupling means comprising pairs of hardened male and female cones, one of each pair being attached to said transducer and the other of each pair being attached to said cylindrical flexure tube and by clamping friction means, so that the points of the two cones attached to said cylindrical flexure tube lie on the axis of said cylindrical flexure tube and (d) means for mounting an element to be moved on said flexure tube.

Claim 10

In a phase measuring interferometer having an interferometer cavity in which one element is translated relative to another element along their common optical axis for providing shifts in an interference pattern; the improvement comprising a micromotion actuator for enabling linear tilt-free translation of said one element, said actuator comprising (a) a piezoelectric type transducer which expands and contracts in response to variations in an electric signal, (b) a cylindrical flexure tube in which said transducer is mounted, (c) means for coupling said transducer to said flexure tube for linearly translating at least one end of said flexure tube on the order of at least a fraction of a wavelength of light essentially solely in a direction parallel to the longitudinal axis of said flexure tube when said transducer expands or contracts in response to variations in said electric signal while decoupling tilted or sideways motion of said transducer, and (d) means for coupling said one element to at least said flexure tube one end for enabling linear displacement of said element on the order of at least a fraction of a wavelength of light in response to said tilt-free translation of said flexure tube one end; whereby accurate linear displacement of said element may be provided in response to said variations in said electric signal.

Claim 11

In a phase measuring interferometer having an interferometer cavity in which one element is translated relative to another element along their common optical axis for providing shifts in an interference pattern; the improvement comprising a micromotion actuator for enabling linear tilt-free translation of said one element, said actuator comprising (a) a piezoelectric type transducer which expands and contracts in response to variations in an electric signal, (b) a cylindrical flexure tube in which said transducer is mounted, (c) means for coupling said transducer to said flexure tube for linearly translating at least one end of said flexure tube on the order of at least a fraction of a wavelength of light essentially solely in a direction parallel to the longitudinal axis of said flexure tube when said transducer expands or contracts in response to variations in said electric signal while decoupling tilted or sideways motion of said transducer, and (d) means for coupling said one element to at least said flexure tube one end for enabling linear displacement of said element on the order of at least a fraction of a wavelength of light in response to said tilt-free translation of said flexure tube one end; whereby accurate linear displacement of said element may be provided in response to said variations in said electric signal.

Claim 12

The interferometer in claim 7 wherein said coupling means comprises means for preventing any non-parallel end motion for said transducer to be transmitted to said flexure tube in the form of a moment.

Claim 13

The interferometer in claim 8 wherein said non-parallel end motion preventing means comprises pairs of hardened male and female cones, one of each pair being attached to said transducer and the other of each pair being attached to said cylindrical flexure tube so that the points of the two cones attached to said flexure tube lie on the axis of said cylindrical flexure tube.

Claim 14

The interferometer in claim 8 wherein said non-parallel end motion preventing means comprises pairs of hardened male and female cones, one of each pair being attached to said transducer and the other of each pair being attached to said cylindrical flexure tube and by clamping friction means, so that the points of the two cones attached to said cylindrical flexure tube lie on the axis of said cylindrical flexure tube.

Claim 15

The interferometer in claim 7 wherein said coupling means comprises pairs of hardened male and female cones, one of each pair being attached to said transducer and the other of each pair being attached to said cylindrical flexure tube so that the points of the two cones attached to said flexure tube lie on the axis of said cylindrical flexure tube.

Claim 16

The interferometer in claim 7 wherein said coupling means comprises pairs of hardened male and female cones, one of each pair being attached to said transducer and the other of each pair being attached to said cylindrical flexure tube and by clamping friction means, so that the points or the two cones attached to said cylindrical flexure tube lie on the axis of said cylindrical flexure tube.