US4575248A
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US
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Wavefront sensor employing novel D.C. shearing interferometer
Assignee: Goodrich Corp
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Filing: 1984-06-18
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Granted: 1986-03-11
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Expires: 2004-06-18
Abstract
Abstract A wavefront sensor employs a novel DC shearing interferometer which produces four interferograms which are 90° phase shifted with respect to each other. The incoming wavefront is replicated into two beams, a portion of each being reflected off of a beamsplitter and the remaining portion being transmitted therethrough, at first and second portions of the beamsplitter. After leaving the beamsplitter the transmitted and reflected beams are reflected back 180° by a pair of retroreflectors, and directed at third and fourth portions of the beamsplitter. The retroreflectors are adjusted to produce four shearing interferograms and a quarter wave plate is positioned in the path of one of the beams to cause the four interferograms to have a 90° phase shifted relationship with respect to each other. The interferograms are thereafter projected upon intensified self scanning diode arrays, which digitize the interference patterns for convenient processing by means of a four-bin algorithm, which in turn generates estimated phase data indicative of the shape of the wavefront in a given direction. The process may be duplicated to produce second measurements in an orthogonal direction, which enables the mapping of the wavefront in both X and Y. In contrast with A.C. shearing interferometers, the wavefront shapes of very brief plused beams of light may be measured.
Inventors
- 👤 Bruce A. Horwitz
- 👤 Alan J. MacGovern
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 18:41
CPC Classifications
G; G01; G01J; G01J9/00; G01J9/02; G01J9/0215
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
239 words
Method of measuring the shape of an incoming wavefront of light comprising the steps of: a. providing first and second retroreflector means together with a beamsplitter; b. replicating said incoming wavefront into a first and second beam; c. directing said first and second beams at first and second portions respectively of said beamsplitter; d. redirecting first portions of said first and second beams reflected off of said beamsplitter at third and fourth portions of said beamsplitter respectively via said first retroreflector means; e. redirecting second portions of said first and second beams transmitted through said beamsplitter at said third and fourth portion respectively of said beamsplitter via said second retroreflector means, for producing interference between said first and second beams at said third and fourth portions of said beamsplitter; f. introducing a phase shift between said first and second beams before said first and second beams are directed at said third and fourth portion of said beamsplitter; g. adjusting the relative positions between said first and second beams to produce shearing interferograms at said third and fourth portions of said beamsplitter; h. examining first and second shearing interferograms produced by combining said first and second beams at one side of said beamsplitter at said third and fourth portions thereof; and i. examining third and fourth shearing interferograms produced by combining said first and second beams at the other side of said beamsplitter at said third and fourth portions thereof.
Claim 2
Dependent Claim
239 words
Method of measuring the shape of an incoming wavefront of light comprising the steps of: a. providing first and second retroreflector means together with a beamsplitter; b. replicating said incoming wavefront into a first and second beam; c. directing said first and second beams at first and second portions respectively of said beamsplitter; d. redirecting first portions of said first and second beams reflected off of said beamsplitter at third and fourth portions of said beamsplitter respectively via said first retroreflector means; e. redirecting second portions of said first and second beams transmitted through said beamsplitter at said third and fourth portion respectively of said beamsplitter via said second retroreflector means, for producing interference between said first and second beams at said third and fourth portions of said beamsplitter; f. introducing a phase shift between said first and second beams before said first and second beams are directed at said third and fourth portion of said beamsplitter; g. adjusting the relative positions between said first and second beams to produce shearing interferograms at said third and fourth portions of said beamsplitter; h. examining first and second shearing interferograms produced by combining said first and second beams at one side of said beamsplitter at said third and fourth portions thereof; and i. examining third and fourth shearing interferograms produced by combining said first and second beams at the other side of said beamsplitter at said third and fourth portions thereof.
Claim 3
Dependent Claim
31 words
The method of claim 1, including phase shifting said first and second beams 90° with respect to each other before being directed at said third and fourth portions of said beamsplitter.
Claim 4
Dependent Claim
29 words
The method of claim 2, wherein said phase shifting is produced by introducing a quarter wave delay plate in the path of one of said first and second beams.
Claim 5
Dependent Claim
17 words
The method of claim 3 wherein said plate is positioned in the path of said second beam.
Claim 6
Dependent Claim
36 words
The method of claim 1 wherein said step g. of adjusting the relative positions of said first and second beams comprises laterally shifting the position of one of said retroreflector means with respect to the other.
Claim 7
Dependent Claim
36 words
The method of claim 2 wherein said step g. of adjusting the relative positions of said first and second beams comprises laterally shifting the position of one of said retroreflector means with respect to the other.
Claim 8
Dependent Claim
38 words
The method of claim 1 wherein each of said first and second beams is reversed 180° in direction by said first and second retroreflector means for directing each beam at said third and fourth portion of said beamsplitter.
Claim 9
Dependent Claim
38 words
The method of claim 2 wherein each of said first and second beams is reversed 180° in direction by said first and second retroreflector means for directing each beam at said third and fourth portion of said beamsplitter.
Claim 10
Dependent Claim
38 words
The method of claim 5 wherein each of said first and second beams is reversed 180° in direction by said first and second retroreflector means for directing each beam at said third and fourth portion of said beamsplitter.
Claim 11
Dependent Claim
38 words
The method of claim 6 wherein each of said first and second beams is reversed 180° in direction by said first and second retroreflector means for directing each beam at said third and fourth portion of said beamsplitter.
Claim 12
Dependent Claim
30 words
The method of claim 1 wherein about 50% of the light of said first and second beams is transmitted through said beamsplitter and 50% is reflected off of said beamsplitter.
Claim 13
Dependent Claim
30 words
The method of claim 2 wherein about 50% of the light of said first and second beams is transmitted through said beamsplitter and 50% is reflected off of said beamsplitter.
Claim 14
Dependent Claim
30 words
The method of claim 5 wherein about 50% of the light of said first and second beams is transmitted through said beamsplitter and 50% is reflected off of said beamsplitter.
Claim 15
Dependent Claim
30 words
The method of claim 6 wherein about 50% of the light of said first and second beams is transmitted through said beamsplitter and 50% is reflected off of said beamsplitter.
Claim 16
Independent Claim
122 words
The method of any of claims 1 through 14 wherein said steps of examining said first, second, third and fourth shearing interferograms includes recording the intensity values of the images thereof for each spatial wavefront location; and applying a four-bin algorithm to the data produced by the preceeding step to obtain the estimated relative interferogram phase φ o across said wavefront for each spatial wavefront location, said algorithm taking the form of φ o =arc tan [(S1-S3) divided by (S2-S4)] where φ o equals said estimated relative interferogram phase at each wavefront location; S1 , S2, S3, S4, represent four recorded interferogram sinusoidal signals S=A+B sin (φ+φ o ); φ being 0°, 90°, 180° and 270° for each of said interferograms respectively.
Claim 17
Dependent Claim
248 words
Interferometric apparatus for measuring the shape of an incoming wavefront of light comprising: a. first and second retroreflector means together with a beamsplitter; b. means for replicating said incoming wavefront into a first and second beam; c. means for directing said first and second beams at first and second portions respectively of said beamsplitter; d. first retroreflector means for redirecting first portions of said first and second beams reflected off of said beamsplitter at third and fourth portions of said beamsplitter respectively; e. second retroreflector means for redirecting second portions of said first and second beams transmitted through said beamsplitter at said third and fourth portion respectively of said beamsplitter for producing interference between said first and second beams at said third and fourth portions of said beamsplitter; f. phase shifting means for introducing a phase shift between said first and second beams before said first and second beams are directed at said third and fourth portion of said beamsplitter; g. means for adjusting the relative positions between said first and second beams to produce shearing interferograms at said third and fourth portions of said beamsplitter; h. means for examining first and second shearing interferograms produced by combining said first and second beams at one side of said beamsplitter at said third and fourth portions thereof; and i. means for examining third and fourth shearing interferograms produced by combining said first and second beams at the other side of said beamsplitter at said third and fourth portions thereof.
Claim 18
Dependent Claim
248 words
Interferometric apparatus for measuring the shape of an incoming wavefront of light comprising: a. first and second retroreflector means together with a beamsplitter; b. means for replicating said incoming wavefront into a first and second beam; c. means for directing said first and second beams at first and second portions respectively of said beamsplitter; d. first retroreflector means for redirecting first portions of said first and second beams reflected off of said beamsplitter at third and fourth portions of said beamsplitter respectively; e. second retroreflector means for redirecting second portions of said first and second beams transmitted through said beamsplitter at said third and fourth portion respectively of said beamsplitter for producing interference between said first and second beams at said third and fourth portions of said beamsplitter; f. phase shifting means for introducing a phase shift between said first and second beams before said first and second beams are directed at said third and fourth portion of said beamsplitter; g. means for adjusting the relative positions between said first and second beams to produce shearing interferograms at said third and fourth portions of said beamsplitter; h. means for examining first and second shearing interferograms produced by combining said first and second beams at one side of said beamsplitter at said third and fourth portions thereof; and i. means for examining third and fourth shearing interferograms produced by combining said first and second beams at the other side of said beamsplitter at said third and fourth portions thereof.
Claim 19
Dependent Claim
37 words
The apparatus of claim 16 wherein said phase shifting means shifts the phase of said first and second beams 90° with respect to each other before being directed at said third and fourth portions of said beamsplitter.
Claim 20
Dependent Claim
16 words
The apparatus of claim 17 wherein said phase shifting means is a quarter wave delay plate.
Claim 21
Dependent Claim
17 words
The apparatus of claim 18 wherein said plate is positioned in the path of said second beam.
Claim 22
Dependent Claim
37 words
The apparatus of claim 16 wherein said means for adjusting the relative positions of said first and second beams comprises means for laterally shifting the position of one of said retroreflector means with respect to the other.
Claim 23
Dependent Claim
37 words
The apparatus of claim 17 wherein said means for adjusting the relative positions of said first and second beams comprises means for laterally shifting the position of one of said retroreflector means with respect to the other.
Claim 24
Dependent Claim
32 words
The apparatus of claim 16 wherein said first and second retroreflector means reverse said first and second beams 180° for directing each beam at said third and fourth portion of said beamsplitter.
Claim 25
Dependent Claim
32 words
The apparatus of claim 17 wherein said first and second retroreflector means reverse said first and second beams 180° for directing each beam at said third and fourth portion of said beamsplitter.
Claim 26
Dependent Claim
32 words
The apparatus of claim 20 wherein said first and second retroreflector means reverse said first and second beams 180° for directing each beam at said third and fourth portion of said beamsplitter.
Claim 27
Dependent Claim
32 words
The apparatus of claim 21 wherein said first and second retroreflector means reverse said first and second beams 180° for directing each beam at said third and fourth portion of said beamsplitter.
Claim 28
Dependent Claim
20 words
The apparatus of claim 25 wherein said beamsplitter transmits about 50% of the light directed thereat and reflects about 50%.
Claim 29
Independent Claim
122 words
The apparatus of any of claims 16 through 26 wherein said means for examining said first, second, third and fourth shearing interferograms includes means for electronically recording the intensity values of the images thereof for each spacial wavefront location; and processor means for applying a four-bin algorithm to said intensity values to obtain the estimated relative interferogram phase across said wavefront for each spacial wavefront location, said algorithm taking the form of φ o =arc tan [(S1-S3) divided by (S2-S4)] where φ o equals said estimated relative interferogram phase at each wavefront location; S1 , S2, S3, S4, representing four recorded interferogram sinusoidal signals S=A+B sin (φ+φ o ); φ being 0°, 90°, 180° and 270° for each of said interferograms respectively.
References Cited (Backward Citations)
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Cited
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Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-03-10 | 1989-09-09 | 1990-03-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-03-10 | 1993-09-09 | 1994-03-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-03-10 | 1997-09-09 | 1998-03-11 | $7700.00 | Window Closed / Lapsed |