US4572846A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of hermetically sealing electronic packages
Assignee: General Dynamics Mission Systems Inc
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Filing: 1983-11-18
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Granted: 1986-02-25
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Expires: 2003-11-18
Abstract
Abstract Electronic packages and the like, particularly finished packages with leaky welds, are hermetically sealed by vapor deposition of a polymer film through a sealable port. A high quality film is obtained by slow deposition of a monomer vapor which subsequently polymerizes. The process is not destructive due to the lack of high temperatures and curing agents. Extremely low permeability for common molecules and for water vapor is achieved by utilizing C-type para-xylylene as the polymer material.
Inventors
- 👤 Robert M. Foss
- 👤 Gerald R. Severson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 12:33
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/60
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
48 words
A method of hermetically sealing an electronic package comprising the steps of: providing a sealable port in said package; introducing a monomer vapor into said package through said port; and condensing said monomer vapor at least on an interior of said package, whereby a polymer film is formed.
Claim 2
Independent Claim
48 words
A method of hermetically sealing an electronic package comprising the steps of: providing a sealable port in said package; introducing a monomer vapor into said package through said port; and condensing said monomer vapor at least on an interior of said package, whereby a polymer film is formed.
Claim 3
Dependent Claim
23 words
A method according to claim 1 further comprising the step of: protecting an outside of said package from condensation of said monomer vapor.
Claim 4
Dependent Claim
12 words
A method according to claim 1 wherein said monomer vapor is para-xylylene.
Claim 5
Independent Claim
75 words
A method of hermetically sealing an electronic package comprising the steps of: providing a sealable port in said package; disposing said package in a deposition chamber at a predetermined reduced pressure; vaporizing a dimer material; pyrolyzing said vaporized dimer to form a monomer vapor; introducing said monomer vapor into said deposition chamber; condensing said monomer vapor at least on an interior of said package, whereby a polymer film is formed; and sealing said sealable port.
Claim 6
Independent Claim
75 words
A method of hermetically sealing an electronic package comprising the steps of: providing a sealable port in said package; disposing said package in a deposition chamber at a predetermined reduced pressure; vaporizing a dimer material; pyrolyzing said vaporized dimer to form a monomer vapor; introducing said monomer vapor into said deposition chamber; condensing said monomer vapor at least on an interior of said package, whereby a polymer film is formed; and sealing said sealable port.
Claim 7
Dependent Claim
40 words
A method according to claim 4 further comprising the step of: enclosing said package, exclusive of said sealable port, in an envelope to prohibit condensation of said vapor on an outside of said package, said envelope including pressure equalization means.
Claim 8
Dependent Claim
32 words
A method according to claim 4 wherein said predetermined reduced pressure is chosen so that a rate at which said dimer material is consumed is substantially less than 1 gram per minute.
Claim 9
Dependent Claim
13 words
A method according to claim 4 wherein said dimer material is parylene powder.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-02-24 | 1989-08-26 | 1990-02-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-02-24 | 1993-08-26 | 1994-02-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-02-24 | 1997-08-26 | 1998-02-25 | $7700.00 | Window Closed / Lapsed |