US4571850A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Centrifugal wafer processor
Assignee: Verteq Inc
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Filing: 1984-05-17
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Granted: 1986-02-25
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Expires: 2004-05-17
Abstract
Abstract In a rinser/dryer for carriers of semiconductor wafers, a rotatable frame containing the carrier is directly mounted to, and cantilevered from the drive motor. A container encloses the rotatable frame and carrier. A gas pressurized labyrinth seal separates the inside of the container from the drive motor to prevent contamination. A raised portion in the labyrinth seal, with gas inlets on each side of the raised portion, forms a pressure barrier inhibiting the passage of moisture and contaminates across the barrier.
Inventors
- 👤 James R. Hunt
- 👤 Russell P. Balent
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 20:19
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; F; F26; F26B; F26B25/00; F26B25/008; F26B5/00; F26B5/08
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
128 words
An apparatus for processing carriers of semi-conductor wafers and glass photomask plates, comprising: a rotatable frame configured to releasably hold a carrier; a motor connected to the rotatable frame in a direct drive manner to rotate the frame; a container enclosing the rotatable frame, the container having an aperture through which the rotatable frame is connected with the drive motor, the container not contacting the rotatable frame or the drive motor; means for providing a positive pressure gas seal between the container and the connection between the rotatable frame and the drive motor, the gas seal providing a positive pressure which prevents contaminants from passing through the seal into the inside of the container, the gas seal further providing a positive pressure to the inside of the container.
Claim 2
Independent Claim
128 words
An apparatus for processing carriers of semi-conductor wafers and glass photomask plates, comprising: a rotatable frame configured to releasably hold a carrier; a motor connected to the rotatable frame in a direct drive manner to rotate the frame; a container enclosing the rotatable frame, the container having an aperture through which the rotatable frame is connected with the drive motor, the container not contacting the rotatable frame or the drive motor; means for providing a positive pressure gas seal between the container and the connection between the rotatable frame and the drive motor, the gas seal providing a positive pressure which prevents contaminants from passing through the seal into the inside of the container, the gas seal further providing a positive pressure to the inside of the container.
Claim 3
Dependent Claim
48 words
An apparatus as defined in claim 1, further comprising: means forming a partial obstruction in the gas seal reducing the cross-sectional area of the seal so as to create a pressure barrier at the reduced cross section, the pressure barrier inhibiting the passage of contaminants across the barrier.
Claim 4
Dependent Claim
97 words
An apparatus as defined in claim 1 wherein the gas seal further comprises: mean forming two substantially unidirectional gas paths, one path communicating with and positively pressurizing the interior of the container, the second path positively pressurizing and preventing the entrance of contaminants along the aperture through which the rotatable frame connects to the drive motor; and means forming a pressure barrier formed by an obstruction reducing the path cross-sectional area, the barrier being located between the first and second paths and allowing communication with both paths, the barrier inhibiting the passage of contaminates across the barrier.
Claim 5
Independent Claim
39 words
An apparatus as defined in claims 1 or 3, further comprising: means forming a recess communicating with the gas seal and with the inside of the container in such a manner that condensed liquid can leave the gas seal.
Claim 6
Independent Claim
17 words
An apparatus as defined in claims 1 or 3 wherein the gas seal comprises a labyrinth seal.
Claim 7
Dependent Claim
59 words
An apparatus as defined in claim 1 wherein said means providing the gas seal comprises: a seal plate on the container and intermediate the container and the rotatable frame, the seal plate forming a gas seal between the plate and the rotatable frame, the seal plate containing gas passages through which positive pressure is provided to the gas seal.
Claim 8
Independent Claim
139 words
An apparatus for processing carriers of semi-conductor wafers and glass photomask plates, comprising: rotatable frame means for releasably holding a carrier; a support structure; a container enclosing the rotatable frame means, the container having a first aperture for inserting and removing the carrier, and a second aperture, the container being mounted to the support structure; a drive motor mounted to the support structure; connecting means for connecting the rotatable frame to the drive motor through the second aperture in the container so the rotatable frame means is directly driven by the drive motor; gas seal means between the container and the connecting means, for maintaining a positive gas pressure to pressurize the inside of the container and to prevent contaminants from passing through the seal means; gas pressurization means for providing positive gas pressure to the gas seal means.
Claim 9
Independent Claim
139 words
An apparatus for processing carriers of semi-conductor wafers and glass photomask plates, comprising: rotatable frame means for releasably holding a carrier; a support structure; a container enclosing the rotatable frame means, the container having a first aperture for inserting and removing the carrier, and a second aperture, the container being mounted to the support structure; a drive motor mounted to the support structure; connecting means for connecting the rotatable frame to the drive motor through the second aperture in the container so the rotatable frame means is directly driven by the drive motor; gas seal means between the container and the connecting means, for maintaining a positive gas pressure to pressurize the inside of the container and to prevent contaminants from passing through the seal means; gas pressurization means for providing positive gas pressure to the gas seal means.
Claim 10
Dependent Claim
38 words
An apparatus as defined in claim 7, further comprising: recess means in the container, communicating with the gas seal means and with the inside of the container, for allowing the escape of moisture from the gas seal means.
Claim 11
Dependent Claim
30 words
An apparatus as defined in claim 7, further comprising: vent means for allowing the escape of gas from the inside of the container while inhibiting moisture from entering the container.
Claim 12
Dependent Claim
38 words
An apparatus as defined in claim 7, wherein the gas seal means comprises: a labyrinth seal which communicates with the inside of the container and with the outside of the container adjacent the second aperture in the container.
Claim 13
Dependent Claim
46 words
An apparatus as defined in claim 7, wherein the gas seal means further comprises: pressure barrier means for inhibiting passage of contaminates across the barrier means, the barrier means restricting the cross-sectional area of the laybrinth seal to provide a pressure barrier at the restricted cross-section.
Claim 14
Dependent Claim
53 words
An apparatus as defined in claim 7, wherein the gas pressurization means comprises: gas passages communicating with the labyrinth seal means on each side of the barrier means, positive gas pressure being provided through the passages to further maintain the pressure barrier and to encourage the flow of gas away from the barrier.
Claim 15
Independent Claim
267 words
An apparatus for processing carriers of semi-conductor wafers and glass photomask plates, comprising: a rotatable frame for releasably holding a carrier, the frame configured to support the carrier during rotation such that the center line of rotation does not coincide with the center line of the wafers held in the carrier, the rotatable frame including a front and rear endpiece; a support structure; a drive motor mounted to the support structure, the motor having a drive shaft connected to the rear endpiece of the rotatable frame so as to directly drive the frame; a container enclosing the rotatable frame, the container including a sealable aperture through which the carrier can be removably inserted into the frame; a seal plate containing a second aperture through which the drive shaft connects to the rear end piece of the rotatable frame, the seal plate of the container being adjacent to, but separated by a space from, the rotatable frame and the connection between the rear endpiece of the rotatable frame and the motor; means forming a positive pressure gas seal in said space, the seal communicating with the second aperture in the seal plate to prevent contaminants from entering the seal, the gas seal further communicating with the inside of the container to provide a positive pressure to the inside of the container so as to prevent contaminants from entering the container; means forming a positive gas pressurization system connected to plural gas apertures in the back plate of the container, the gas apertures communicating with the gas seal so as to provide a positive pressure to the gas seal.
Claim 16
Independent Claim
267 words
An apparatus for processing carriers of semi-conductor wafers and glass photomask plates, comprising: a rotatable frame for releasably holding a carrier, the frame configured to support the carrier during rotation such that the center line of rotation does not coincide with the center line of the wafers held in the carrier, the rotatable frame including a front and rear endpiece; a support structure; a drive motor mounted to the support structure, the motor having a drive shaft connected to the rear endpiece of the rotatable frame so as to directly drive the frame; a container enclosing the rotatable frame, the container including a sealable aperture through which the carrier can be removably inserted into the frame; a seal plate containing a second aperture through which the drive shaft connects to the rear end piece of the rotatable frame, the seal plate of the container being adjacent to, but separated by a space from, the rotatable frame and the connection between the rear endpiece of the rotatable frame and the motor; means forming a positive pressure gas seal in said space, the seal communicating with the second aperture in the seal plate to prevent contaminants from entering the seal, the gas seal further communicating with the inside of the container to provide a positive pressure to the inside of the container so as to prevent contaminants from entering the container; means forming a positive gas pressurization system connected to plural gas apertures in the back plate of the container, the gas apertures communicating with the gas seal so as to provide a positive pressure to the gas seal.
Claim 17
Dependent Claim
65 words
An apparatus as defined in claim 13, further comprising: a hub having a recess for receiving and connecting to the drive shaft, the hub having a radially extending flange located on the inside of the container, which flange is connected to the rear endpiece of the rotatable frame so that the hub connects the drive motor to the rotatable frame in a direct drive configuration.
Claim 18
Dependent Claim
108 words
An apparatus as defined in claim 13, wherein the seal comprises: means forming a first path length adjacent the second aperture in the back plate of the container, the path formed by the space between the second aperture and the connection between the drive shaft and the rear end piece, which connection extends through the second aperture; means forming a second path length communicating with and extending radially outward from the first path length, the second path length being formed by the space between the flange portion of the hub and the back plate of the container, the second path length communicating with the inside of the container.
Claim 19
Dependent Claim
49 words
An apparatus as defined in claim 13, further comprising: structure defining an obstruction partially blocking the gas seal so as to restrict the cross-sectional area of the gas seal and form a pressure barrier at the restricted area, the pressure barrier inhibiting the movement of contaminants across the barrier.
Claim 20
Dependent Claim
47 words
An apparatus as defined in claim 13 wherein there are gas apertures on each side of the obstruction, the gas apertures creating a positive pressure in the gas seal on each side of the obstruction so as to encourage a positive gas flow away from the obstruction.
Claim 21
Dependent Claim
30 words
An apparatus as defined in claim 13, further comprising: vent means for allowing the escape of gas from the inside of the container while inhibiting moisture from entering the container.
Claim 22
Dependent Claim
49 words
An apparatus as defined in claim 13, further comprising: structure defining at least one recess communicating with the portion of the gas seal adjacent the inside of the container to allow the escape of moisture from the seal so that no moisture will be trapped in the labyrinth seal.
Claim 23
Independent Claim
24 words
An apparatus as defined in claims 13 or 15 wherein the gas seal forms a labyrinth-type seal to inhibit contaminants from traversing the seal.
References Cited (Backward Citations)
US2975528A
Cited
US4207686A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-02-24 | 1989-08-26 | 1990-02-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-02-24 | 1993-08-26 | 1994-02-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-02-24 | 1997-08-26 | 1998-02-25 | $7700.00 | Window Closed / Lapsed |