US4569742A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Reactively sputtered chrome silicon nitride resistors
Assignee: Honeywell Inc
•
Filing: 1984-05-31
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Granted: 1986-02-11
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Expires: 2004-05-31
Abstract
Abstract Radio frequency sputtering of silicon and chromium alloy targets in a nitrogen and argon atmosphere while applying an electrical bias to the substrate produces an electrically resitive thin film on said substrate.
Inventors
- 👤 James A. Schuetz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 23:38
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/40; H10D1/47; C; C23; C23C; C23C14/00; C23C14/0021; C23C14/0036; H01; H01C; H01C17/00; H01C17/06; H01C17/075; H01C17/12; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
65 words
A method of producing an electrically resistive thin film on a substrate, said method comprising: placing said substrate and a sputtering target comprising silicon and chromium in a reaction chamber; evacuating said reaction chamber; providing a sputtering atmosphere comprising nitrogen and argon in said reaction chamber; applying an electrical bias voltage to said substrate; and providing a radio frequency electrical discharge in said reaction chamber.
Claim 2
Independent Claim
65 words
A method of producing an electrically resistive thin film on a substrate, said method comprising: placing said substrate and a sputtering target comprising silicon and chromium in a reaction chamber; evacuating said reaction chamber; providing a sputtering atmosphere comprising nitrogen and argon in said reaction chamber; applying an electrical bias voltage to said substrate; and providing a radio frequency electrical discharge in said reaction chamber.
Claim 3
Dependent Claim
16 words
The method of claim 1 wherein said electrical bias voltage is a radio frequency bias voltage.
Claim 4
Dependent Claim
19 words
The method of claim 1 wherein said electrical bias voltage is in a range of 40 to 60 volts.
Claim 5
Dependent Claim
21 words
The method of claim 1 wherein said nitrogen is provided to said reaction chamber at a rate greater than 1.0 sccm.
Claim 6
Dependent Claim
21 words
The method of claim 2 wherein said nitrogen is provided to said reaction chamber at a rate greater than 1.0 sccm.
Claim 7
Dependent Claim
20 words
The method of claim 5 wherein said sputtering target comprises chromium in a range of 27 to 45 atomic percent.
Claim 8
Dependent Claim
19 words
The method of claim 6 wherein said electrical bias voltage is in a range of 40 to 60 volts.
Claim 9
Dependent Claim
31 words
The method of claim 1 wherein said sputtering atmosphere exerts a pressure in a range of 4×10 -3 to 5×10 -3 torr while said radio frequency electrical discharge is being provided.
Claim 10
Dependent Claim
19 words
The method of claim 8 wherein said electrical bias voltage is in a range of 40 to 60 volts.
Claim 11
Dependent Claim
16 words
The method of claim 9 wherein said electrical bias voltage is a radio frequency bias voltage.
Claim 12
Dependent Claim
25 words
The method of claim 1 wherein gas pressure in said reaction chamber is reduced to no greater than 2×10 -7 torr during said evacuation step.
Claim 13
Dependent Claim
31 words
The method of claim 11 wherein said sputtering atmosphere exerts a pressure in a range of 4×10 -3 to 5×10 -3 torr while said radio frequency electrical discharge is being provided.
Claim 14
Dependent Claim
16 words
The method of claim 12 wherein said electrical bias voltage is a radio frequency bias voltage.
References Cited (Backward Citations)
US3477935A
Cited
US4392992A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-02-10 | 1989-08-12 | 1990-02-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-02-10 | 1993-08-12 | 1994-02-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-02-10 | 1997-08-12 | 1998-02-11 | $7700.00 | Window Closed / Lapsed |