Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
117 words
A solar cell comprising a first member, a second member opposite said first member, and an amorphous silicon lamina connected between said first and said second members, a predetermined one of said first and said second members comprising a transparent conductive layer of indium tin oxide which comprises an aggregation of particles having an average particle size between 300 and 900 angstroms, said transparent conductive layer being obtained by evaporation by controlling at least one of the pressure of oxygen and the deposition rate during said evaporation, said transparent conductive layer having a thickness of about 700 angstroms for an average particle size not smaller than 300 angstroms and said thickness increasing for increased average particle size.
Claim 2
Dependent Claim
117 words
A solar cell comprising a first member, a second member opposite said first member, and an amorphous silicon lamina connected between said first and said second members, a predetermined one of said first and said second members comprising a transparent conductive layer of indium tin oxide which comprises an aggregation of particles having an average particle size between 300 and 900 angstroms, said transparent conductive layer being obtained by evaporation by controlling at least one of the pressure of oxygen and the deposition rate during said evaporation, said transparent conductive layer having a thickness of about 700 angstroms for an average particle size not smaller than 300 angstroms and said thickness increasing for increased average particle size.
Claim 3
Dependent Claim
120 words
A solar cell comprising a first member, a second member opposite said first member, and an amorphous silicon lamina connected between said first and said second members, a predetermined one of said first and said second members comprising a transparent conductive layer of indium tin oxide which comprises an aggregation of particles having an average particle size between 300 and 900 angstroms, said transparent conductive layer having a thickness of about 700 angstroms for an average particle size not smaller than 300 angstroms and said thickness increasing for increased average particle size, said transparent conductive layer being obtained by radio frequency ion plating by controlling at least one of the pressure of oxygen, the deposition rate, and radio frequency power.
Claim 4
Dependent Claim
120 words
A solar cell comprising a first member, a second member opposite said first member, and an amorphous silicon lamina connected between said first and said second members, a predetermined one of said first and said second members comprising a transparent conductive layer of indium tin oxide which comprises an aggregation of particles having an average particle size between 300 and 900 angstroms, said transparent conductive layer having a thickness of about 700 angstroms for an average particle size not smaller than 300 angstroms and said thickness increasing for increased average particle size, said transparent conductive layer being obtained by radio frequency ion plating by controlling at least one of the pressure of oxygen, the deposition rate, and radio frequency power.