US4568614A
Expired / Lapsed
US
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Steel article having a disordered silicon oxide coating thereon and method of preparing the coating
Assignee: Ovonic Synthetic Materials Co Inc
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Filing: 1984-06-27
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Granted: 1986-02-04
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Expires: 2004-06-27
Abstract
Abstract Disclosed is a coated steel article, e.g., a stainless steel article, having a corrosion resistant coating of disordered silicon carboxynitride over at least a portion of the steel surface. Also disclosed is a method of forming an adherent, ductile, disordered silicon carboxynitride coating on a steel substrate by glow discharge deposition.
Inventors
- 👤 Erwin Eichen
- 👤 John Keem
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 22:22
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/14; C23C14/16; C23C16/00; C23C16/22; C23C16/30
Claims Analysis
Total Claims: 55
Claim 1
Independent Claim
86 words
A coated article comprising: (1) a steel substrate; and (2) a corrosion resistant coating thereon comprising disordered, non-stoichiometric silicon carboxynitride over at least a portion of the substrate, the silicon carboxynitride being represented by the formula SiC x O y N z where z is from 0.5 to 1.0, y is from 1.0 to 2.0, z is from 0.6 to 1.33, and (x+0.5y+0.75z) is less than or equal to 1.0, and further comprising a non-metal chosen from the group consisting of boron, phosphorus, and mixtures thereof.
Claim 2
Dependent Claim
86 words
A coated article comprising: (1) a steel substrate; and (2) a corrosion resistant coating thereon comprising disordered, non-stoichiometric silicon carboxynitride over at least a portion of the substrate, the silicon carboxynitride being represented by the formula SiC x O y N z where z is from 0.5 to 1.0, y is from 1.0 to 2.0, z is from 0.6 to 1.33, and (x+0.5y+0.75z) is less than or equal to 1.0, and further comprising a non-metal chosen from the group consisting of boron, phosphorus, and mixtures thereof.
Claim 3
Dependent Claim
29 words
The coated article of claim 1 wherein the corrosion resistant coating is deposited from a plasma maintained by a microwave field having a frequency of above about 1 gigahertz.
Claim 4
Dependent Claim
15 words
The coated article of claim 1, wherein the steel substrate is a stainless steel substrate.
Claim 5
Dependent Claim
14 words
The coated article of claim 1, wherein the disordered silicon carboxynitride is substantially amorphous.
Claim 6
Dependent Claim
14 words
The coated artical of claim 1, wherein the disordered silicon carboxynitride is substantially microcrystalline.
Claim 7
Dependent Claim
19 words
The coated article of claim 1, wherein the disordered silicon carboxynitride is substantially polycrystalline lacking long range compositional order.
Claim 8
Dependent Claim
32 words
The coated article of claim 1, wherein the disordered silicon carboxynitride is a mixture of at least two types of phases chosen from the group consisting of amorphous, microcrystalline, and polycrystalline phases.
Claim 9
Dependent Claim
14 words
The coated article of claim 1, wherein the coating is resistant to atmospheric corrosion.
Claim 10
Dependent Claim
73 words
The coated article of claim 8, wherein the coating is resistant to atmospheric corrosion as determined by the substantial absence of a change in potential for at least about 100 hours, by the method comprising: (1) maintaining a 0.5 normal NaCl solution wetted woven cotton cloth in contact with the coating in a closed chamber maintained at 25 degrees centigrade and 55 percent relative humidity; and (2) measuring the potential of the surface.
Claim 11
Dependent Claim
18 words
The coated article of claim 1, wherein the coating is from about 100 to about 1000 angstroms thick.
Claim 12
Dependent Claim
11 words
The coated article of claim 10, wherein the coating is ductile.
Claim 13
Dependent Claim
20 words
The coated article of claim 1, wherein the coating is deposited by quenching onto a cold substrate from a plasma.
Claim 14
Dependent Claim
19 words
The coated article of claim 12, wherein the substrate temperature during plasma deposition is less than 200 degrees centigrade.
Claim 15
Dependent Claim
25 words
The coated article of claim 12, wherein the coating is quenched at a quench rate of at least about 10 5 degrees centigrade per second.
Claim 16
Dependent Claim
23 words
The coated article of claim 12, wherein the plasma is chosen from the group consisting of react1ve sputtering plasmas and glow discharge plasmas.
Claim 17
Dependent Claim
14 words
The coated article of claim 15, wherein the plasma is a glow discharge plasma.
Claim 18
Dependent Claim
27 words
The coated article of claim 15, wherein the plasma is maintained by an electric field chosen from the group consisting of d.c. fields and radio frequency fields.
Claim 19
Dependent Claim
25 words
The coated article of claim 17, wherein the plasma is maintained by a radio frequency field having a frequency of from 1 to 100 gigahertz.
Claim 20
Dependent Claim
90 words
A coated article comprising; (1) a stainless steel substrate; and (2) a corrosion resistant coating thereon comprising microwave plasma deposited, nonstoichiometric disordered silicon carboxynitride over at least a portion of the substrate, the silicon carboxynitride being represented by the formula SiC x O y N z where x is from 0.5 to 1.0, y is from 1.0 to 2.0, z is from 0.6 to 1.33, and (x+0.5y+0.75z) is less than or equal to 1.0, and further comprises a non-metal chosen from the group consisting of boron, phosphorus, and mixtures thereof.
Claim 21
Dependent Claim
90 words
A coated article comprising; (1) a stainless steel substrate; and (2) a corrosion resistant coating thereon comprising microwave plasma deposited, nonstoichiometric disordered silicon carboxynitride over at least a portion of the substrate, the silicon carboxynitride being represented by the formula SiC x O y N z where x is from 0.5 to 1.0, y is from 1.0 to 2.0, z is from 0.6 to 1.33, and (x+0.5y+0.75z) is less than or equal to 1.0, and further comprises a non-metal chosen from the group consisting of boron, phosphorus, and mixtures thereof.
Claim 22
Independent Claim
155 words
A method of forming an adherent, ductile, disordered silicon carboxynitride coating on a stainless steel substrate comprising: (a) bringing the stainless steel substrate into a vacuum deposition chamber and maintaining the stainless steel substrate in a vacuum; (b) injecting a deposition gas comprising silicon containing gases, nitrogen containing gases, oxygen containing gases, carbon containing gases, and a gas chosen from the group consisting of boron containing gases, phosphorus containing gases, and mixtures thereof, into the vacuum chamber; and (c) forming and maintaining a microwave excited plasma in the vacuum chamber under conditions to deposit a disordered, nonstoichiometric silicon carboxynitride coating having a composition represented by the formula SiC x O y N z , where x is from 0.5 to 1.0, y is from 1.0 to 2.0, z is from 0.6 to 1.33, and (x+0.5y+0.75z) is less than or equal to 1.0, and comprising boron, phosphorus, or a mixture thereof, on the stainless steel substrate.
Claim 23
Independent Claim
155 words
A method of forming an adherent, ductile, disordered silicon carboxynitride coating on a stainless steel substrate comprising: (a) bringing the stainless steel substrate into a vacuum deposition chamber and maintaining the stainless steel substrate in a vacuum; (b) injecting a deposition gas comprising silicon containing gases, nitrogen containing gases, oxygen containing gases, carbon containing gases, and a gas chosen from the group consisting of boron containing gases, phosphorus containing gases, and mixtures thereof, into the vacuum chamber; and (c) forming and maintaining a microwave excited plasma in the vacuum chamber under conditions to deposit a disordered, nonstoichiometric silicon carboxynitride coating having a composition represented by the formula SiC x O y N z , where x is from 0.5 to 1.0, y is from 1.0 to 2.0, z is from 0.6 to 1.33, and (x+0.5y+0.75z) is less than or equal to 1.0, and comprising boron, phosphorus, or a mixture thereof, on the stainless steel substrate.
Claim 24
Dependent Claim
17 words
The method of claim 20, wherein the substrate temperature during deposition is less than 200 degrees centigrade.
Claim 25
Dependent Claim
21 words
The method of claim 20, wherein the silicon compound is chosen from the group consisting of silanes, fluorosilanes, and mixtures thereof.
Claim 26
Dependent Claim
19 words
The method of claim 20, wherein the deposition gas contains nitrogen, whereby to provide the nitrogen in the coating.
Claim 27
Dependent Claim
18 words
The method of claim 20, wherein the deposition gas contains ammonia, whereby to provide nitrogen in the coating.
Claim 28
Dependent Claim
19 words
The method of claim 20, wherein the deposition gas contains oxygen, whereby to provide the oxygen in the coating.
Claim 29
Dependent Claim
20 words
The method of claim 20, wherein the deposition gas contains a hydrocarbon, whereby to provide the carbon in the coating.
Claim 30
Dependent Claim
13 words
The method of claim 20, wherein the disordered silicon carboxynitride is substantially amorphous.
Claim 31
Dependent Claim
13 words
The method of claim 20, wherein the disordered silicon carboxynitride is substantially microcrystalline.
Claim 32
Dependent Claim
13 words
The method of claim 20, wherein the disordered silicon carboxynitride is substantially polycrystalline.
Claim 33
Dependent Claim
31 words
The method of claim 20, wherein the disordered silicon carboxynitride is a mixture of at least two types of phases chosen from the group consisting of amorphous, microcrystalline, and polycrystalline phase.
Claim 34
Dependent Claim
13 words
The method of claim 20, wherein the silicon carboxynitride is a non-stochiometric composition.
Claim 35
Dependent Claim
16 words
The method of claim 20, comprising depositing the coating to a thickness less than 1000 angstroms.
Claim 36
Dependent Claim
10 words
The method of claim 32 wherein the coating is ductile.
Claim 37
Dependent Claim
11 words
The method of claim 20 wherein the coating is corrosion resistant.
Claim 38
Dependent Claim
13 words
The method of claim 34, wherein the coating is resistant to atmospheric corrosion.
Claim 39
Dependent Claim
74 words
The method of claim 35 wherein the coating is resistant to atmospheric corrosion as determined by the substantial absence of a change in potential for at least about 100 hours by the method comprising: (1) maintaining a 0.5 normal NaCL solution wetted woven cotton cloth in contact with the disordered silicon carboxynitride coating in closed chamber maintained at 25 degrees centigrade and 55 percent realtive humidity; and (2) measuring the potential of the surface.
Claim 40
Dependent Claim
111 words
A stainless steel article having a corrosion resistant, adherent, ductile, disordered, nonstoichiometric silicon carboxynitride coating thereon, prepared by the method comprising: (a) bringing the stainless steel substrate into a vacuum deposition chamber and maintaining the stainless steel substrate in a vacuum; (b) injecting a deposition gas comprising a silicon containing gas, a carbon containing gas, and a nitrogen containing gas, an oxygen containing gas, and one or more of a boron compound, a phosphorus compound, or a mixture thereof into the vacuum chamber; and (c) forming and maintaining a plasma by microwave excitation in the vacuum chamber under conditions to deposit the disordered silicon carboxynitride coating on the stainless steel substrate.
Claim 41
Dependent Claim
111 words
A stainless steel article having a corrosion resistant, adherent, ductile, disordered, nonstoichiometric silicon carboxynitride coating thereon, prepared by the method comprising: (a) bringing the stainless steel substrate into a vacuum deposition chamber and maintaining the stainless steel substrate in a vacuum; (b) injecting a deposition gas comprising a silicon containing gas, a carbon containing gas, and a nitrogen containing gas, an oxygen containing gas, and one or more of a boron compound, a phosphorus compound, or a mixture thereof into the vacuum chamber; and (c) forming and maintaining a plasma by microwave excitation in the vacuum chamber under conditions to deposit the disordered silicon carboxynitride coating on the stainless steel substrate.
Claim 42
Dependent Claim
18 words
The steel article of claim 37, wherein the substrate temperature during deposition is less than 200 degrees centigrade.
Claim 43
Dependent Claim
25 words
The steel article of claim 37, wherein the coating is quenched at a quench rate of at least about 10 5 degrees centigrade per second.
Claim 44
Dependent Claim
21 words
The article of claim 37, wherein the silicon compound is chosen from the group consisting of silanes, fluorosilanes, and mixtures thereof.
Claim 45
Dependent Claim
20 words
The steel article of claim 37, wherein the deposition gas contains nitrogen, whereby to provide the nitrogen in the coating.
Claim 46
Dependent Claim
20 words
The steel article of claim 37, wherein the deposition gas contains ammonia, whereby to provide the nitrogen in the coating.
Claim 47
Dependent Claim
20 words
The steel article of claim 37, wherein the deposition gas contains oxygen, whereby to provide the oxygen in the coating.
Claim 48
Dependent Claim
21 words
The steel article of claim 37, wherein the deposition gas contains a hydrocarbon, whereby to provide the carbon in the coating.
Claim 49
Dependent Claim
14 words
The steel article of claim 37, wherein the disordered silicon carboxynitride is substantially amorphous.
Claim 50
Dependent Claim
14 words
The steel article of claim 37, wherein the disordered silicon carboxynitride is substantially microcrystalline.
Claim 51
Dependent Claim
14 words
The steel article of claim 37, wherein the disordered silicon carboxynitride is substantially polycrystalline.
Claim 52
Dependent Claim
32 words
The steel article of claim 37, wherein the disordered silicon carboxynitride is a mixture of at least two types of phases chosen from the group consisting of amorphous, microcrystalline, and polycrystalline phase.
Claim 53
Dependent Claim
17 words
The steel article of claim 37, comprising depositing the coating to a thickness less than 1000 angstrom.
Claim 54
Dependent Claim
14 words
The steel article of claim 37, wherein the coating is resistant to atmospheric corrosion.
Claim 55
Dependent Claim
75 words
The steel article of claim 50 wherein the coating is resistant to atmospheric corrosion as determined by the substantial absence of a change in potential for at least about 100 hours by the method comprising: (1) maintaining a 0.5 normal NaCl solution wetted woven cotton cloth in contact with the disordered silicon carboxynitride coating in closed chamber maintained at 25 degrees centigrade and 55 percent relative humidity; and (2) measuring the potential of the surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-02-03 | 1989-08-05 | 1990-02-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-02-03 | 1993-08-05 | 1994-02-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-02-03 | 1997-08-05 | 1998-02-04 | $7700.00 | Window Closed / Lapsed |