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US4567767A Expired / Lapsed US ⏱️ 0.0 years remaining

Method and apparatus for very low temperature acoustic microscopy

Assignee: Leland Stanford Junior University
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Filing: 1984-05-14
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Granted: 1986-02-04
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Expires: 2004-05-14
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Abstract

Abstract A method and apparatus for imaging objects utilizing acoustic waves at frequencies above 4.2 Ghz and up to 8 Ghz wherein the transducer and the object imaged by waves or beams from the transducer are both at a temperature no greater 0.2° K. The transducer is driven by pulses generated by a short pulse generator which are stretched and coded by a dispersive filter and inductively coupled to a low temperature coupler to be use to drive the transducer. The frequency returns are carried by the same bidirectional coupler to a low noise amplifier. Both the low noise amplifier and bidirectional coupler are maintained at a temperature of less than 4.2° K. The output of the amplifier is then coupled to a dispersive filter which responds the coding in the first dispersive filter to decode the information and reconstruct the signal. Subsurface defects are detected by heating the object while it is inspected by the acoustic transducer.

Inventors

  • 👤 Clavin F. Quate
  • 👤 John Foster
  • 👤 Daniel Rugar

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 20:11
CPC Classifications
G; G01; G01N; G01N29/00; G01N29/04; G01N29/06; G01N29/0654; G01N29/0681; G01H; G01H3/00; G01H3/10; G01H3/12; G01H3/125; G01S; G01S15/00; G01S15/88; G01S15/89; G01S15/8906; G01N2291/00; G01N2291/02; G01N2291/028; G01N2291/02881; Y; Y10; Y10S; Y10S505/00; Y10S505/825; Y10S505/842

Claims Analysis

Total Claims: 21
Claim 1
Independent Claim 84 words
A method of acoustic imaging a sample utilizing an acoustic beam at an imaging frequency greater than 4 GHz comprising generating a high frequency pulse train, cooling said object to a very low temperature, coupling said pulses to a transducer for imaging said object through a directional coupler in a very low temperature atmosphere, detecting the acoustic energy reflected from said object through said bidirectional coupler to an amplifier in said low temperature atmosphere, and converting said detected energy to an electrical output signal.
Claim 2
Independent Claim 84 words
A method of acoustic imaging a sample utilizing an acoustic beam at an imaging frequency greater than 4 GHz comprising generating a high frequency pulse train, cooling said object to a very low temperature, coupling said pulses to a transducer for imaging said object through a directional coupler in a very low temperature atmosphere, detecting the acoustic energy reflected from said object through said bidirectional coupler to an amplifier in said low temperature atmosphere, and converting said detected energy to an electrical output signal.
Claim 3
Dependent Claim 21 words
A method as claimed in claim 1 wherein said directional coupler is cooled to a temperature no greater than 4.2° k.
Claim 4
Dependent Claim 25 words
A method as claimed in claim 1 wherein said bidirectional coupler and said amplifier are cooled to a temperature no more than about 4.2° k.
Claim 5
Dependent Claim 20 words
A method as claimed in claim 3 wherein the high frequency pulses are generated by components maintained at room temperature.
Claim 6
Dependent Claim 16 words
A method as claimed in claim 4 wherein said bidirectional coupler comprises a superconducting transmission line.
Claim 7
Dependent Claim 23 words
A method as claimed in claim 5 wherein said pulse stream is coupled by induction to said transmission line within the cooled region.
Claim 8
Dependent Claim 16 words
A method as claimed in claim 6 wherein said object is heated during said imaging step.
Claim 9
Dependent Claim 25 words
A method as claimed in claim 7 wherein said heat is applied to said object on the side opposite the impingement of said acoustic waves.
Claim 10
Dependent Claim 74 words
Acoustic imaging apparatus comprising an acoustic transducer for imaging an object with high frequency acoustic energy, means for driving said acoustic transducer at a frequency of at least 4 Ghz, means for cooling said acoustic transducer and said object to less than 0.2° k., means for receiving the reflected acoustic energy from said object including an amplifier and a directional coupler between said transducer and said amplifier, means for cooling said amplifier and coupler.
Claim 11
Dependent Claim 74 words
Acoustic imaging apparatus comprising an acoustic transducer for imaging an object with high frequency acoustic energy, means for driving said acoustic transducer at a frequency of at least 4 Ghz, means for cooling said acoustic transducer and said object to less than 0.2° k., means for receiving the reflected acoustic energy from said object including an amplifier and a directional coupler between said transducer and said amplifier, means for cooling said amplifier and coupler.
Claim 12
Dependent Claim 39 words
Apparatus as claimed in claim 9 wherein said driving means includes a short pulse generator and dispersive filter for coding said input frequency, and said receiving means includes a dispersive filter and detector for decoding said reflected acoustic energy.
Claim 13
Dependent Claim 19 words
Apparatus as claimed in claim 9 wherein said directional coupler cooled to a temperature no greater than 4.2° k.
Claim 14
Dependent Claim 22 words
Apparatus as claimed in claim 9 wherein said directional coupler and amplifier are cooled to a temperature no greater than 4.2° k.
Claim 15
Dependent Claim 21 words
Apparatus as claimed in claim 12 wherein said dispersive filters and pulse generator and detector are maintained at about room temperature.
Claim 16
Dependent Claim 19 words
Apparatus as claimed in claim 11 wherein said directional coupler is a bidirectional coupler including a superconducting transmission line.
Claim 17
Dependent Claim 24 words
Apparatus as claimed in claim 14 wherein said driving means includes means for inductively coupling said acoustic transducer driving frequencies to said transmission line.
Claim 18
Dependent Claim 16 words
Apparatus as claimed in claim 15 including means for heating said cooled object during acoustic imaging.
Claim 19
Dependent Claim 25 words
Apparatus as claimed in claim 16 wherein said heating means heat a surface of said object opposite to said acoustically imaged surface of the object.
Claim 20
Dependent Claim 18 words
Apparatus as claimed in claim 17 wherein said transducer has a driving electrode of about 2000 Å thickness.
Claim 21
Dependent Claim 18 words
Apparatus as claimed in claim 18 wherein said transducer has a radiating aperture of radius about 125 mm.

References Cited (Backward Citations)

US4378699A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1989-02-03 1989-08-05 1990-02-04 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1993-02-03 1993-08-05 1994-02-04 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1997-02-03 1997-08-05 1998-02-04 $7700.00 Window Closed / Lapsed

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