US4564764A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer having chips for determining the position of the wafer by means of electron beams
Assignee: Fujitsu Ltd
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Filing: 1983-09-30
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Granted: 1986-01-14
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Expires: 2003-09-30
Abstract
Abstract A wafer having chips for determining the position of the wafer, at least one of the chips comprising a plurality of first-direction line groups formed on one side portion of the chip and a plurality of second-direction line groups formed on the other region of the chip, the first-direction line groups and the second-direction line groups being orthogonal to each other, each of the first-direction line groups comprising one first-direction main mark and one first-direction code mark expressing the position of the one first-direction main mark, each of the second-direction line groups comprising one second-direction main mark and one second-direction code mark, whereby, by scanning only one of the first-direction line groups and only one of the second-direction line groups by means of an electron beam, the position of the wafer is determined.
Inventors
- 👤 Hiroshi Yasuda
- 👤 Kenichi Kawashima
- 👤 Takayuki Miyazaki
- 👤 Koichi Kobayashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 19:26
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/304; H01J37/3045
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
200 words
A wafer having position determining chips for determining the position of said wafer by means of electron beams, at least one of said position-determining chips comprising: a plurality of first-direction line groups formed on one side portion of said at least one position-determining chip and extending in parallel to each other; a plurality of second-direction line groups formed on the other region of said at least one position-determining chips and extending in the direction orthogonal to the direction of said first-direction line groups, said second-direction line groups extending in parallel to each other; each of said first-direction line groups comprising one first-direction main mark and one first-direction code mark expressing the position of said one first-direction main mark, wherein said first-direction code mark is different for each of said first-direction line groups; each of said second-direction line groups comprising one second-direction main mark and one second-direction code mark expressing the position of said one second-direction main mark, wherein said second-direction code mark is different for each of said second-direction line groups; whereby, by scanning one of said first-direction line groups and one of said second-direction line groups by means of an electron beam, the position of said wafer is determined.
Claim 2
Dependent Claim
200 words
A wafer having position determining chips for determining the position of said wafer by means of electron beams, at least one of said position-determining chips comprising: a plurality of first-direction line groups formed on one side portion of said at least one position-determining chip and extending in parallel to each other; a plurality of second-direction line groups formed on the other region of said at least one position-determining chips and extending in the direction orthogonal to the direction of said first-direction line groups, said second-direction line groups extending in parallel to each other; each of said first-direction line groups comprising one first-direction main mark and one first-direction code mark expressing the position of said one first-direction main mark, wherein said first-direction code mark is different for each of said first-direction line groups; each of said second-direction line groups comprising one second-direction main mark and one second-direction code mark expressing the position of said one second-direction main mark, wherein said second-direction code mark is different for each of said second-direction line groups; whereby, by scanning one of said first-direction line groups and one of said second-direction line groups by means of an electron beam, the position of said wafer is determined.
Claim 3
Dependent Claim
36 words
A wafer as set forth in claim 1, wherein said first-direction main marks are separated from each other by a predetermined distance, and said second-direction main marks are separated from each other by said predetermined distance.
Claim 4
Dependent Claim
67 words
A wafer as set forth in claim 2, wherein the length of each of said second-direction main marks and of said second-direction code marks is the same as the side length of said at least one position-determining chips, and the length of each of said first-direction main marks and of said first-direction code marks is shorter than the side length of said at least one position-determining chips.
Claim 5
Dependent Claim
30 words
A wafer as set forth in claim 3, wherein the length of said first-direction main marks and of said first-direction code marks is equal to or smaller than 500 μm.
Claim 6
Dependent Claim
44 words
A wafer as set forth in claim 4, wherein each of said first-direction code marks and said second-direction code marks comprises a predetermined number of fine lines for expressing the position of the corresponding first-direction main mark or of the corresponding second-direction main mark.
Claim 7
Dependent Claim
20 words
A wafer as set forth in claim 5, wherein said predetermined distance is equal to or smaller than 100 μm.
Claim 8
Dependent Claim
42 words
A wafer as set forth in claim 6, wherein at least one of said position-determining chips further comprises, on the periphery of said at lease one position-determining chips, a plurality of projected patterns for detecting the angle of rotation of said wafer.
Claim 9
Dependent Claim
25 words
A wafer as set forth in claim 7, wherein said projected patterns are provided on all sides of said at least one position determining chips.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-01-13 | 1989-07-15 | 1990-01-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-01-13 | 1993-07-15 | 1994-01-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-01-13 | 1997-07-15 | 1998-01-14 | $7700.00 | Window Closed / Lapsed |