US4564284A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor exposure apparatus
Assignee: Canon Inc
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Filing: 1985-06-05
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Granted: 1986-01-14
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Expires: 2005-06-05
Abstract
Abstract In a semiconductor exposure apparatus having chucks for holding a mask and a wafer, respectively, the holding portion of at least one of the chucks has a coefficient of linear expansion equal to or smaller than the coefficient of linear expansion of the bodies held. Particularly, the coefficient of linear expansion of the holding portion of the chuck should preferably be of a small absolute value, but even where the absolute value of the coefficient of linear expansion is great, the chucks are usable by providing temperature control.
Inventors
- 👤 Shinji Tsutsui
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 17:39
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/708; G03F7/70858; G03F7/70866
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
52 words
A semiconductor exposure apparatus having: a mask clutch for holding a mask; and a wafer chuck for holding a wafer; the holding portion of at least one of said chucks having a coefficient of linear expansion substantially coincident with the coefficient of linear expansion of the mask or the wafer held thereby.
Claim 2
Dependent Claim
52 words
A semiconductor exposure apparatus having: a mask clutch for holding a mask; and a wafer chuck for holding a wafer; the holding portion of at least one of said chucks having a coefficient of linear expansion substantially coincident with the coefficient of linear expansion of the mask or the wafer held thereby.
Claim 3
Dependent Claim
26 words
A semiconductor exposure apparatus according to claim 1, wherein the coefficient of linear expansion of said holding portion of said chuck has a small absolute value.
Claim 4
Dependent Claim
15 words
A semiconductor exposure apparatus according to claim 2, wherein said holding portion includes a ceramic.
Claim 5
Dependent Claim
14 words
A semiconductor exposure apparatus according to claim 2, wherein said holding portion includes silicon.
Claim 6
Dependent Claim
15 words
A semiconductor exposure apparatus according to claim 2, wherein said holding portion includes Hastelloy A.
Claim 7
Dependent Claim
14 words
A semiconductor exposure apparatus according to claim 2, wherein said holding portion includes invar.
Claim 8
Dependent Claim
51 words
A semiconductor exposure apparatus having: a mask chuck for holding a mask; and a wafer chuck for holding a wafer; the holding portion of at least one of said chucks having a coefficient of linear expansion smaller than the coefficient of linear expansion of the mask of the wafer held thereby.
Claim 9
Dependent Claim
51 words
A semiconductor exposure apparatus having: a mask chuck for holding a mask; and a wafer chuck for holding a wafer; the holding portion of at least one of said chucks having a coefficient of linear expansion smaller than the coefficient of linear expansion of the mask of the wafer held thereby.
Claim 10
Dependent Claim
26 words
A seminconductor exposure apparatus according to claim 7, wherein the coefficient of linear expansion of said holding portion of said chuck has a small absolute value.
Claim 11
Dependent Claim
15 words
A semiconductor exposure apparatus according to claim 8, wherein said holding portion includes super invar.
Claim 12
Dependent Claim
66 words
A semiconductor exposure apparatus having: a mask chuck for holding a mask; a wafer chuck for holding a wafer; the holding portion of at least one of said chucks having a coefficient of linear expansion substantially coincident with the coefficient of linear expansion of the mask or the wafer held thereby; and temperature control means for controlling the temperature of at least one of said chucks.
Claim 13
Dependent Claim
66 words
A semiconductor exposure apparatus having: a mask chuck for holding a mask; a wafer chuck for holding a wafer; the holding portion of at least one of said chucks having a coefficient of linear expansion substantially coincident with the coefficient of linear expansion of the mask or the wafer held thereby; and temperature control means for controlling the temperature of at least one of said chucks.
Claim 14
Dependent Claim
65 words
A seminconductor exposure apparatus having: a mask chuck for holding a mask; a wafer chuck for holding a wafer; the holding portion of at least one of said chucks having a coefficient of linear expansion smaller than the coefficient of linear expansion of the mask or the wafer held thereby; and temperature control means for controlling the temperature of at least one of said chucks.
Claim 15
Dependent Claim
65 words
A seminconductor exposure apparatus having: a mask chuck for holding a mask; a wafer chuck for holding a wafer; the holding portion of at least one of said chucks having a coefficient of linear expansion smaller than the coefficient of linear expansion of the mask or the wafer held thereby; and temperature control means for controlling the temperature of at least one of said chucks.
Claim 16
Dependent Claim
72 words
A holding apparatus for holding a seminconductor mask or wafer, the apparatus comprising: a chuck for holding the mask or wafer, said chuck including a holding portion having a coefficient of linear expansion substantially coincident with the coefficient of linear expansion of the mask or wafer held thereby; and means for cooperating with said holding portion for applying a megative pressure thereto to hold the mask or wafer on said holding portion.
Claim 17
Dependent Claim
72 words
A holding apparatus for holding a seminconductor mask or wafer, the apparatus comprising: a chuck for holding the mask or wafer, said chuck including a holding portion having a coefficient of linear expansion substantially coincident with the coefficient of linear expansion of the mask or wafer held thereby; and means for cooperating with said holding portion for applying a megative pressure thereto to hold the mask or wafer on said holding portion.
Claim 18
Dependent Claim
19 words
A holding apparatus according to claim 12, further comprising temperature control means for controlling the temperature of said chuck.
Claim 19
Dependent Claim
73 words
A holding apparatus for holding a semiconductor mask or wafer, the apparatus comprising: a chuck for holding the mask or wafer, said chuck including a holding portion having a coefficient of linear expansion smaller than the coefficient of linear expansion of the mask or wafer held thereby; and means for cooperating with said chucks to apply a negative pressure to said holding portion to hold the mask or wafer on said holding portion.
Claim 20
Dependent Claim
73 words
A holding apparatus for holding a semiconductor mask or wafer, the apparatus comprising: a chuck for holding the mask or wafer, said chuck including a holding portion having a coefficient of linear expansion smaller than the coefficient of linear expansion of the mask or wafer held thereby; and means for cooperating with said chucks to apply a negative pressure to said holding portion to hold the mask or wafer on said holding portion.
Claim 21
Dependent Claim
19 words
A holding apparatus according to claim 14, further comprising temperature control means for controlling the temperature of said chuck.
Claim 22
Dependent Claim
79 words
A holding apparatus for holding at least one of a semiconductor mask and wafer, said apparatus comprising: a chuck for holding said at least one of said mask and wafer, said chuck including a holding portion having a coefficient of linear expansion substantially coincident with the coefficient of linear expansion of said at least one of said mask and wafer held thereby; and means for securing said at least one of said mask and wafer on said holding portion.
Claim 23
Dependent Claim
79 words
A holding apparatus for holding at least one of a semiconductor mask and wafer, said apparatus comprising: a chuck for holding said at least one of said mask and wafer, said chuck including a holding portion having a coefficient of linear expansion substantially coincident with the coefficient of linear expansion of said at least one of said mask and wafer held thereby; and means for securing said at least one of said mask and wafer on said holding portion.
Claim 24
Dependent Claim
19 words
A holding apparatus according to claim 16, further comprising temperature control means for controlling the temperature of said chuck.
Claim 25
Dependent Claim
75 words
A holding apparatus for holding at least one of a semiconductor mask and wafer, the apparatus comprising: a chuck for holding said at least one of said mask and wafer, said chuck including a holding portion having a coefficient of linear expansion smaller than the coefficient of linear expansion of said at least one of said mask and wafer held thereby; and means for securing one of the mask and wafer on said holding portion.
Claim 26
Dependent Claim
75 words
A holding apparatus for holding at least one of a semiconductor mask and wafer, the apparatus comprising: a chuck for holding said at least one of said mask and wafer, said chuck including a holding portion having a coefficient of linear expansion smaller than the coefficient of linear expansion of said at least one of said mask and wafer held thereby; and means for securing one of the mask and wafer on said holding portion.
Claim 27
Dependent Claim
19 words
A holding apparatus according to claim 18, further comprising temperature control means for controlling the temperature of said chuck.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-01-13 | 1989-07-15 | 1990-01-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-01-13 | 1993-07-15 | 1994-01-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-01-13 | 1997-07-15 | 1998-01-14 | $7700.00 | Window Closed / Lapsed |