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US4563610A Expired / Lapsed US ⏱️ 0.0 years remaining

Device for generating negative-ion beams by alkaline metal ion sputtering

Assignee: NISSHIN HIGH-VOLTAGE Co Ltd A CORP OF JAPAN
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Filing: 1983-03-23
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Granted: 1986-01-07
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Expires: 2003-03-23
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Abstract

Abstract A negative-ion source comprising means for discharging alkaline metal for discharging neutral alkaline metal particles together with alkaline metal ion particles; an electrode for generating negative ions which can serve as an extraction electrode for extracting said alkaline metal ion particles and a target bombarded with said alkaline metal ion particles and which provides with a hold for holding negative-ion seed material in the portion bombarded with said alkaline metal ion particles and an aperture for letting out negative-ion particles; and a negative-ion extraction electrode for said negative-ion particles. The present negative-ion source has an improved ion current efficiency and is compact size.

Inventors

  • 👤 Toshinori Takagi
  • 👤 Junzo Ishikawa
  • 👤 Koji Matsuda

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-06 17:33
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/028

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 90 words
A negative ion source comprising means for discharging neutral alkaline metal particles together with alkaline metal ion particles; an electrode for generating negative ions which serves as an extraction electrode for extracting said alkaline metal ion particles and as a target for being bombarded with said alkaline metal ion particles and which is provided with means for holding negation-ion seed material in the portion bombarded with said alkaline metal ion particles and with an aperture for permitting negative-ion particles to exit; and a negative-ion extraction electrode for said negative ions.
Claim 2
Dependent Claim 90 words
A negative ion source comprising means for discharging neutral alkaline metal particles together with alkaline metal ion particles; an electrode for generating negative ions which serves as an extraction electrode for extracting said alkaline metal ion particles and as a target for being bombarded with said alkaline metal ion particles and which is provided with means for holding negation-ion seed material in the portion bombarded with said alkaline metal ion particles and with an aperture for permitting negative-ion particles to exit; and a negative-ion extraction electrode for said negative ions.
Claim 3
Dependent Claim 47 words
A negative-ion source as claimed in claim 1, wherein said means for discharging alkaline metal comprises means for supplying said neutral alkaline metal particles, means for supplying energy for ionizing said neutral alkaline metal particles, and an ionization chamber wherein said neutral alkaline metal particles are ionized.
Claim 4
Dependent Claim 39 words
A negative-ion source as claimed in claim 2, wherein said means for supplying energy is a cathode of an electron bombardment type ion source and said ionization chamber is an arc chamber of said electron bombardment type ion source.
Claim 5
Dependent Claim 51 words
A negative-ion source as claimed in claim 1, wherein said means for holding negative-ion seed material is disposed on the perimeter of the aperture of electrode for generating negative ions for holding said negative-ion seed material in the shape of a cone expanding toward said means for discharging said alkaline metal.
Claim 6
Dependent Claim 14 words
A negative-ion source as claimed in claim 1, wherein said alkaline metal is cesium.
Claim 7
Dependent Claim 14 words
A negative-ion source as claimed in claim 1, wherein said alkaline metal is rubidium.

References Cited (Backward Citations)

US3233404A Cited
GB1063199A Cited
US3849656A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1989-01-06 1989-07-08 1990-01-07 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1993-01-06 1993-07-08 1994-01-07 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1997-01-06 1997-07-08 1998-01-07 $7700.00 Window Closed / Lapsed

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