US4560417A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Decontamination method for semiconductor wafer handling equipment
Assignee: Technomex Development Ltd
•
Filing: 1984-02-27
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Granted: 1985-12-24
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Expires: 2004-02-27
Abstract
Abstract Semiconductor wafer handling equipment is cleaned and rinsed in a sealed first chamber. Thereafter, the first chamber is unsealed and the handling equipment is moved into a second chamber so that only the handling equipment is introduced into the second chamber. The second chamber is then sealed and the handling equipment is dried therein and thereafter subjected to a stream of ionized gas to eliminate static charge therefrom.
Inventors
- 👤 Juan Bardina
- 👤 Mikel Gonzalez
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 18:37
CPC Classifications
H; H05; H05F; H05F3/00; B; B08; B08B; B08B3/00; B08B3/02; B08B3/022
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
97 words
A method of decontaminating semiconductor wafer handling equipment, comprising the steps of: providing contaminated semiconductor wafer handling equipment; loading the contaminated handling equipment in a first chamber; thereafter sealing the first chamber; applying decontamination liquid to the contaminated handling equipment in the first chamber; thereafter unsealing the first chamber; thereafter moving the decontaminated handling equipment into a second chamber in a manner introducing only the decontaminated handling equipment into the second chamber; sealing the second chamber with the decontaminated handling equipment therein; drying the decontaminated handling equipment in the second chamber; and thereafter unloading the second chamber.
Claim 2
Independent Claim
97 words
A method of decontaminating semiconductor wafer handling equipment, comprising the steps of: providing contaminated semiconductor wafer handling equipment; loading the contaminated handling equipment in a first chamber; thereafter sealing the first chamber; applying decontamination liquid to the contaminated handling equipment in the first chamber; thereafter unsealing the first chamber; thereafter moving the decontaminated handling equipment into a second chamber in a manner introducing only the decontaminated handling equipment into the second chamber; sealing the second chamber with the decontaminated handling equipment therein; drying the decontaminated handling equipment in the second chamber; and thereafter unloading the second chamber.
Claim 3
Dependent Claim
25 words
A method as set forth in claim 1 wherein an additional step of rinsing the handling equipment occurs before placing it in the second chamber.
Claim 4
Dependent Claim
19 words
A method as set forth in claim 2 wherein the first chamber is rinsed and drained before being unsealed.
Claim 5
Dependent Claim
24 words
A method as set forth in claim 3 which includes the additional step of applying electrostatic elimination fluid to dried handling equipment before unloading.
Claim 6
Dependent Claim
22 words
A method as set forth in claim 1 wherein said loading includes inserting only the contaminated handling equipment into the first chamber.
Claim 7
Dependent Claim
29 words
A method as set forth in claim 1 wherein said unloading is performed without inserting any items external of the second chamber during said drying into the second chamber.
Claim 8
Dependent Claim
22 words
A method as set forth in claim 1 wherein said unloading includes extending only the decontaminated handling equipment from the second chamber.
References Cited (Backward Citations)
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Cited
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Cited
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Cited
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Cited
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Cited
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Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-12-23 | 1989-06-24 | 1989-12-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-12-23 | 1993-06-24 | 1993-12-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-12-23 | 1997-06-24 | 1997-12-24 | $7700.00 | Window Closed / Lapsed |