US4558017A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Light induced production of ultrafine powders comprising metal silicide powder and silicon
Assignee: Honeywell International Inc
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Filing: 1984-05-14
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Granted: 1985-12-10
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Expires: 2004-05-14
Abstract
Abstract A method of producing ultrafine powders comprising metal silicide powder and the products produced by the method are disclosed. The ultrafine powders comprising metal silicide powders are ideally suited to form stable colloidal suspensions which are used in the production of conductive metal silicide containing films. The process employs gaseous reactants comprising a metal halide and a silicon-containing compound. The reactants are exposed to high intensity light to produce ultrafine powders. In addition to the production of metal silicide powders, the ultrafine powders may also include silicon powder and metal subhalide powder. The ultrafine powders are particularly suited for use in VLSI and VVLSI production.
Inventors
- 👤 Arunava Gupta
- 👤 Gary A. West
- 👤 James T. Yardley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 09:09
CPC Classifications
B; B01; B01J; B01J19/00; B01J19/08; B01J19/12; B01J19/121; B01J12/00; B01J12/02; C; C01; C01B; C01B33/00; C01B33/06
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
24 words
A mixture of powders, said mixture comprising at least about 50 weight percent metal silicide and at least about 5 weight percent free silicon.
Claim 2
Dependent Claim
24 words
A mixture of powders, said mixture comprising at least about 50 weight percent metal silicide and at least about 5 weight percent free silicon.
Claim 3
Dependent Claim
18 words
A mixture as in claim 1 comprising between about 5 and about 50 weight percent of free silicon.
Claim 4
Dependent Claim
23 words
A mixture as in claim 2 wherein the free silicon is present in an amount between about 35 and about 45 weight percent.
Claim 5
Dependent Claim
10 words
A mixture as in claim 1 further comprising metal subhalide.
Claim 6
Dependent Claim
18 words
A mixture as in claim 4 wherein the metal subhalide is not more than about 20 weight percent.
Claim 7
Dependent Claim
33 words
A mixture as in claim 1 wherein the mixture comprises ultrafine powder, said ultrafine powder consisting of powder particles which are generally spherical and have diameters of not more than about 500 Å.
Claim 8
Dependent Claim
15 words
A mixture as in claim 1 wherein the metal silicide is a stoiciometrically unbalanced composition.
Claim 9
Dependent Claim
12 words
A mixture as in claim 1 wherein the metal silicide is crystalline.
Claim 10
Dependent Claim
32 words
A mixture as in claim 1 wherein the metal is selected from the group consisting of Groups IIIb-VIb and the ferro metals of Group VIII of the Periodic Chart of the Elements.
Claim 11
Dependent Claim
91 words
A product produced by the process comprising the steps of: (a) supplying gas phase reactants to a reaction site, the gas phase reactants comprising a metal halide and a silicon-containing compound, at a ratio of less than about 1:2 to about 1:4, including regulating the supply of reactants to produce a total reaction chamber pressure of at least about 200 torr; and (b) exposing the gases at the reaction site to high intensity light of at least about 10 watts/cm 2 to produce ultrafine powder comprising metal silicide and free silicon.
Claim 12
Dependent Claim
91 words
A product produced by the process comprising the steps of: (a) supplying gas phase reactants to a reaction site, the gas phase reactants comprising a metal halide and a silicon-containing compound, at a ratio of less than about 1:2 to about 1:4, including regulating the supply of reactants to produce a total reaction chamber pressure of at least about 200 torr; and (b) exposing the gases at the reaction site to high intensity light of at least about 10 watts/cm 2 to produce ultrafine powder comprising metal silicide and free silicon.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-12-09 | 1989-06-10 | 1989-12-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-12-09 | 1993-06-10 | 1993-12-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-12-09 | 1997-06-10 | 1997-12-10 | $7700.00 | Window Closed / Lapsed |