US4556619A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Negative-type acetalized polyvinyl alcohol resist sensitive to ionizing radiation
Assignee: DAI NIPPON INSATSU A Co OF JAPAN KK
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Filing: 1982-10-05
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Granted: 1985-12-03
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Expires: 2002-10-05
Abstract
Abstract An acetalized polyvinyl alcohol having a molecular weight of 10,000 to 1,000,000 represented by the formula: ##STR1## wherein: R 1 represents a halogen-containing residue of an aldehyde or a ketone; R 2 represents a hydrogen atom, which may partially be substituted with an acetyl group; R 3 represents naught or a monomeric unit copolymerizable with vinyl acetate; and l, m, n are integers indicating polymerization degrees, has excellent characteristics such as high sensitivity, high resolving power and excellent dry etching resistance and is suitable as a negative-type resist in ionizing radiation lithography.
Inventors
- 👤 Naoya Ogata
- 👤 Kohei Sanui
- 👤 Chiaki Azuma
- 👤 Hozumi Tanaka
- 👤 Kiyoshi Oguchi
- 👤 Yoichi Takahashi
- 👤 Tomihiro Nakada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 16:19
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106; Y10S430/108; Y10S430/11
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
79 words
A negative-type resist cross-linked by exposure to ionizing radiation, which comprises a cross-linked acetalized polyvinyl alcohol polymer having a molecular weight of 10,000 to 1,000,000 represented by the formula: ##STR29## wherein: R 1 represents an aromatic ring having halogen substitution; R 2 represents a hydrogen atom, which may partially be substituted by an acetyl group; R 3 being absent or if present, being a monomeric unit copolymerizable with vinyl acetate; and l, m, n are integers indicating polymerization degrees.
Claim 2
Dependent Claim
79 words
A negative-type resist cross-linked by exposure to ionizing radiation, which comprises a cross-linked acetalized polyvinyl alcohol polymer having a molecular weight of 10,000 to 1,000,000 represented by the formula: ##STR29## wherein: R 1 represents an aromatic ring having halogen substitution; R 2 represents a hydrogen atom, which may partially be substituted by an acetyl group; R 3 being absent or if present, being a monomeric unit copolymerizable with vinyl acetate; and l, m, n are integers indicating polymerization degrees.
Claim 3
Dependent Claim
21 words
A negative-type resist according to claim 1, which comprises a mixture of said polyvinyl alcohol polymer with another polymer compatible therewith.
Claim 4
Dependent Claim
27 words
A negative-type resist according to claim 2, wherein said another polymer is selected from polyvinyl acetate, ethylene/vinyl acetate copolymer, styrene/vinyl acetate copolymer and partially saponified products thereof.
Claim 5
Dependent Claim
28 words
A negative type resist according to claim 1, wherein the acetalized moiety content as represented by 1/(l+m+n) in said acetalized polyvinyl alcohol is 20 to 85 mole %.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-12-02 | 1989-06-03 | 1989-12-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-12-02 | 1993-06-03 | 1993-12-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-12-02 | 1997-06-03 | 1997-12-03 | $7700.00 | Window Closed / Lapsed |