Laser vibrometer

Claim 2

Apparatus for interferometrically measuring ultrasonic vibration on an object surface comprising: means for propagating a beam of monochromatic light, said propagating means having a mirror at its emitting end; light modulating means disposed in the path of the light beam for frequency shifting a portion thereof such that the frequency shifted portion is deflected toward the object surface to be measured; adjustable means disposed in the path of the deflected beam portion for directing only the frequency shifted beam portion onto the object surface being measured and for focusing the reflected portion of the light scattered by the surface onto the end mirror of said propagating means from which it is divergingly reflected; and photoelectric means disposed in the paths of both the divergingly reflected light beam and the unshifted portion of the propagated light beam and responsive to both said beams, for generating a phase modulated electrical signal indicative of the amplitude and velocity of ultrasonic vibration on the object surface.

Claim 3

Apparatus as recited in claim 1 wherein said light beam propagating means comprises a laser.

Claim 4

Apparatus as recited in claim 2 wherein said light modulating means comprises an acousto-optic modulator.

Claim 5

Apparatus as recited in claim 3 wherein said adjustable directing means comprises an optical lens.

Claim 6

Apparatus as recited in claim 4 wherein said photoelectric means comprises: reflecting means for intercepting and deflecting the divergingly reflected light beam and the unshifted portion of the propagated light beam; and a photo-diode formed to receive the deflected beams from said reflecting means for generating an electrical signal proportional thereto.

Claim 7

Apparatus as recited in claim 5 wherein: the photodiode has a centrally located photosensitive region; and the reflecting means is oriented such that the unshifted portion of the propagated light beam is incident on the photodiode just to one side of said photosensitive region.

Claim 8

Apparatus as recited in claim 6 further comprising: means for phase-demodulating the electrical signal generated by said photodiode, whereby the amplitude of ultrasonic surface vibrations may be determined; and means for detecting the rate of change of phase in the electrical signal from said photodiode, whereby the velocity of ultrasonic surface vibrations may be determined.

Claim 9

Apparatus for interferometrically measuring ultrasonic vibration on an object surface comprising: a laser formed for propogating a beam of light, said laser having a mirror at its emitting end; an acousto-optic modulator disposed in the path of the light beam, said modulator being formed to shift the frequency of a portion of the light beam such that the frequency shifted portion is deflected in the direction of the object surface to be measured; an adjustable microscope objective lens disposed in the path of the frequency shifted beam for directing said frequency shifted beam onto the object surface, and for focusing the reflected portion of the light scattered by the surface onto the end mirror of said laser such that it is divergingly reflected therefrom; a planar mirror operatively disposed for intercepting both the unshifted portion of the original laser beam and the divergingly reflected beam, said planar mirror being oriented for deflecting both of the intercepted beams; a photodiode formed to be responsive to the unshifted laser beam and the divergingly reflected beam for generating an electrical signal proportional thereto; a phase demodulator responsive to the electrical signal from said photodiode for determining phase shifts in the electrical signal whereby the amplitude of ultrasonic surface vibrations may be determined; and a phase/frequency demodulator also responsive to the electrical signal from said photodiode for determining the rate of change of phase shifts in the signal, whereby the velocity of ultrasonic surface vibrations may be determined.

Claim 10

Apparatus for interferometrically measuring ultrasonic vibration on an object surface comprising: a laser formed for propogating a beam of light, said laser having a mirror at its emitting end; an acousto-optic modulator disposed in the path of the light beam, said modulator being formed to shift the frequency of a portion of the light beam such that the frequency shifted portion is deflected in the direction of the object surface to be measured; an adjustable microscope objective lens disposed in the path of the frequency shifted beam for directing said frequency shifted beam onto the object surface, and for focusing the reflected portion of the light scattered by the surface onto the end mirror of said laser such that it is divergingly reflected therefrom; a planar mirror operatively disposed for intercepting both the unshifted portion of the original laser beam and the divergingly reflected beam, said planar mirror being oriented for deflecting both of the intercepted beams; a photodiode formed to be responsive to the unshifted laser beam and the divergingly reflected beam for generating an electrical signal proportional thereto; a phase demodulator responsive to the electrical signal from said photodiode for determining phase shifts in the electrical signal whereby the amplitude of ultrasonic surface vibrations may be determined; and a phase/frequency demodulator also responsive to the electrical signal from said photodiode for determining the rate of change of phase shifts in the signal, whereby the velocity of ultrasonic surface vibrations may be determined.