US4552740A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for producing amorphous and crystalline silicon nitride
Assignee: DRS Sensors and Targeting Systems Inc
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Filing: 1985-02-22
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Granted: 1985-11-12
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Expires: 2005-02-22
Abstract
Abstract A process for producing amorphous or crystalline silicon nitride is disclosed which comprises reacting silicon disulfide ammonia gas at elevated temperature. In a preferred embodiment silicon disulfide in the form of "whiskers" or needles is heated at temperature ranging from about 900° C. to about 1200° C. to produce silicon nitride which retains the whisker or needle morphological characteristics of the silicon disulfide. Silicon carbide, e.g. in the form of whiskers, also can be prepared by reacting substituted ammonia, e.g. methylamine, or a hydrocarbon containing active hydrogen-containing groups, such as ethylene, with silicon disulfide, at elevated temperature, e.g. 900° C.
Inventors
- 👤 Peter E. D. Morgan
- 👤 Eloise A. Pugar
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 04:45
CPC Classifications
C; C30; C30B; C30B29/00; C30B29/10; C30B29/38; C01; C01B; C01B21/00; C01B21/06; C01B21/068; C01B32/00; C01B32/90; C01B32/914; C01B32/956; C01B32/963; C30B25/00; C30B25/005; C01P; C01P2002/00; C01P2002/02; C01P2004/00; C01P2004/01; C01P2004/03; C01P2004/10; C01P2004/60; C01P2004/61
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
33 words
A process for producing silicon nitride which comprises reacting silicon disulfide in solid form with ammonia gas at temperature ranging from about 800° C. to about 1450° C. and recovering amorphous silicon nitride.
Claim 2
Dependent Claim
33 words
A process for producing silicon nitride which comprises reacting silicon disulfide in solid form with ammonia gas at temperature ranging from about 800° C. to about 1450° C. and recovering amorphous silicon nitride.
Claim 3
Dependent Claim
22 words
The process of claim 1, including further heating the reaction product to temperature greater than 1450° C., to form crystalline silicon nitride.
Claim 4
Dependent Claim
13 words
The process of claim 1, employing a mixture of ammonia gas and argon.
Claim 5
Dependent Claim
21 words
The process of claim 1, including first reacting silicon powder with hydrogen sulfide at elevated temperature to produce said silicon disulfide.
Claim 6
Dependent Claim
21 words
The process of claim 2, said reaction being carried out at temperature ranging from about 900° C. to about 1200° C.
Claim 7
Dependent Claim
15 words
The process of claim 5, the silicon disulfide being in the form of orthorhombic needles.
Claim 8
Dependent Claim
28 words
The process of claim 6, the reaction taking place in the solid phase and the amorphous silicon nitride retaining the orthorhombic needle morphological characteristics of the silicon disulfide.
Claim 9
Dependent Claim
43 words
A process for producing amorphous silicon nitride which comprises heating silicon disulfide in the form of whiskers with ammonia gas at temperature ranging from about 900° C. to about 1200° C., to produce amorphous silicon nitride whiskers, and recovering said amorphous silicon nitride.
Claim 10
Dependent Claim
43 words
A process for producing amorphous silicon nitride which comprises heating silicon disulfide in the form of whiskers with ammonia gas at temperature ranging from about 900° C. to about 1200° C., to produce amorphous silicon nitride whiskers, and recovering said amorphous silicon nitride.
Claim 11
Dependent Claim
13 words
The process of claim 8, employing a mixture of ammonia gas and argon.
Claim 12
Dependent Claim
58 words
The process of claim 9, including initially heating silicon powder to about 900° C. and passing a mixture of argon and hydrogen sulfide over said silicon powder to produce said silicon disulfide whiskers, and passing a mixture of ammonia gas and argon over said silicon disulfide whiskers, at said temperature of about 900° C. to about 1200° C.
References Cited (Backward Citations)
US3211527A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-11-11 | 1989-05-13 | 1989-11-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-11-11 | 1993-05-13 | 1993-11-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-11-11 | 1997-05-13 | 1997-11-12 | $7700.00 | Window Closed / Lapsed |