US4551625A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Spectrometer objective for particle beam measurement technique
Assignee: Siemens AG
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Filing: 1983-07-14
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Granted: 1985-11-05
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Expires: 2003-07-14
Abstract
Abstract An arrangement for particle beam measurement utilizes, an objective for the imaging of primary probe particles on a specimen and a spectrometer for the detection of secondary particles. The arrangement also utilizes the superposition of the electric field of the spectrometer with the electric field of the objective lens to render possible an effective increase of the probe current and/or an improved potential resolution. A portion of the field of the objective is provided for the focusing of the secondary particles onto an electrode for determining energy selection.
Inventors
- 👤 Burkhard Lischke
- 👤 Erich Plies
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 21:22
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/244; H01J37/04; H01J37/05; H01J37/10; H01J37/26; H01J37/266; H01J49/00; H01J49/44; H01J49/46; H01J49/48; H01J49/488; H01J2237/00; H01J2237/244; H01J2237/2443
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
118 words
An improved arrangement for particle beam potential measurement having an electron probe objective lens for imaging primary particles on a specimen and a spectrometer for detecting secondary particles released from said specimen, the improvement comprising a first electrode means adjacent said specimen for accelerating said secondary particles and for focusing secondary particles along an optical axis, a second electrode means above said first electrode means for determining energy selection based on secondary particles passing along said optical axis, means for adjusting the voltage of the second electrode means which is in combination with a magnetic field of said objective lens between said first and second electrode means for focusing and retarding secondary particles on said second electrode means.
Claim 2
Dependent Claim
118 words
An improved arrangement for particle beam potential measurement having an electron probe objective lens for imaging primary particles on a specimen and a spectrometer for detecting secondary particles released from said specimen, the improvement comprising a first electrode means adjacent said specimen for accelerating said secondary particles and for focusing secondary particles along an optical axis, a second electrode means above said first electrode means for determining energy selection based on secondary particles passing along said optical axis, means for adjusting the voltage of the second electrode means which is in combination with a magnetic field of said objective lens between said first and second electrode means for focusing and retarding secondary particles on said second electrode means.
Claim 3
Dependent Claim
16 words
The improvement of claim 1, wherein said electron probe objective is a scanning electron microscope objective.
Claim 4
Dependent Claim
15 words
The improvement of claim 1, wherein said electron probe objective is a stray field lens.
Claim 5
Dependent Claim
18 words
The improvement of claim 1, wherein said first electrode means includes a screen apertured about said optical axis.
Claim 6
Dependent Claim
19 words
The improvement of claim 1, wherein said first and second electrode means are in the form of fine diaphragms.
Claim 7
Dependent Claim
23 words
The improvement of claim 1, wherein the voltage of the first electrode means is set to focus secondary particles along said optical axis.
Claim 8
Dependent Claim
22 words
The improvement of claim 1, further comprising magnetic field means above said second electrode means for conducting secondary particles onto a detector.
Claim 9
Dependent Claim
32 words
The improvement of claim 7, further comprising a third electrode means associated with said detector for rendering the magnetic and electric field intensities between said second and third electrode means substantially parallel.
Claim 10
Dependent Claim
15 words
The improvement of claim 7, wherein said detector is shaped symmetrically about said optical axis.
Claim 11
Dependent Claim
31 words
The improvement of claim 1, wherein at least one of said first and second electrode means includes a grid and a screen adjacent said grid and apertured about said optical axis.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-11-04 | 1989-05-06 | 1989-11-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-11-04 | 1993-05-06 | 1993-11-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-11-04 | 1997-05-06 | 1997-11-05 | $7700.00 | Window Closed / Lapsed |